DE112008002564A5 - Sondenhaltervorrichtung - Google Patents

Sondenhaltervorrichtung Download PDF

Info

Publication number
DE112008002564A5
DE112008002564A5 DE112008002564T DE112008002564T DE112008002564A5 DE 112008002564 A5 DE112008002564 A5 DE 112008002564A5 DE 112008002564 T DE112008002564 T DE 112008002564T DE 112008002564 T DE112008002564 T DE 112008002564T DE 112008002564 A5 DE112008002564 A5 DE 112008002564A5
Authority
DE
Germany
Prior art keywords
holder device
probe holder
probe
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE112008002564T
Other languages
English (en)
Inventor
Stojan Dr. Kanev
Stefan Kreissig
Jörg Dr. Kiesewetter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FormFactor Beaverton Inc
Original Assignee
SUSS MicroTec Test Systems GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUSS MicroTec Test Systems GmbH filed Critical SUSS MicroTec Test Systems GmbH
Publication of DE112008002564A5 publication Critical patent/DE112008002564A5/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
DE112008002564T 2007-10-10 2008-10-10 Sondenhaltervorrichtung Withdrawn DE112008002564A5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102007048816 2007-10-10
DE102007048816.7 2007-10-10
PCT/EP2008/063678 WO2009050127A2 (de) 2007-10-10 2008-10-10 Sondenhaltervorrichtung

Publications (1)

Publication Number Publication Date
DE112008002564A5 true DE112008002564A5 (de) 2010-09-23

Family

ID=40467228

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112008002564T Withdrawn DE112008002564A5 (de) 2007-10-10 2008-10-10 Sondenhaltervorrichtung

Country Status (5)

Country Link
US (1) US8402848B2 (de)
JP (1) JP2011501116A (de)
KR (1) KR101496123B1 (de)
DE (1) DE112008002564A5 (de)
WO (1) WO2009050127A2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8049522B2 (en) * 2008-08-26 2011-11-01 Evapco, Inc. Ice thickness probe, ice thickness probe assembly and ice thickness monitoring apparatus
US8904169B2 (en) * 2009-09-15 2014-12-02 Symantec Corporation Just in time trust establishment and propagation
CN110073227B (zh) * 2016-12-20 2022-07-29 夸利陶公司 具有五个自由度的通用探测组件
KR102045506B1 (ko) * 2018-06-25 2019-11-18 주식회사에이치티엔씨 미세 피치 회로 검사 장치
US11828797B1 (en) * 2022-05-06 2023-11-28 Nanya Technology Corporation Probing device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5761823A (en) * 1994-09-27 1998-06-09 Williamson, Jr.; John S. Relative planarity verification apparatus and method of use
US6011405A (en) * 1997-10-28 2000-01-04 Qualitau, Inc. Apparatus and method for probing multiple integrated circuit dice in a semiconductor wafer
US6744268B2 (en) * 1998-08-27 2004-06-01 The Micromanipulator Company, Inc. High resolution analytical probe station
JP4178741B2 (ja) * 2000-11-02 2008-11-12 株式会社日立製作所 荷電粒子線装置および試料作製装置
KR100583949B1 (ko) * 2002-01-07 2006-05-26 삼성전자주식회사 웨이퍼 프로빙 장치 및 테스트 헤드 도킹 제어방법
US6864697B1 (en) * 2003-08-06 2005-03-08 Taiwan Semiconductor Manufacturing Co. Ltd Flip-over alignment station for probe needle adjustment
DE102006056543A1 (de) * 2006-11-29 2008-06-19 Suss Microtec Test Systems Gmbh Sondenhalter für eine Sonde zur Prüfung von Halbleiterbauelementen
DE102006056646B4 (de) * 2006-11-29 2009-04-30 Suss Microtec Test Systems Gmbh Sondenhalter für eine Sonde zur Prüfung von Halbleiterbauelementen

Also Published As

Publication number Publication date
JP2011501116A (ja) 2011-01-06
KR20100105541A (ko) 2010-09-29
US20100294053A1 (en) 2010-11-25
WO2009050127A2 (de) 2009-04-23
US8402848B2 (en) 2013-03-26
KR101496123B1 (ko) 2015-02-26
WO2009050127A3 (de) 2009-07-02

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8127 New person/name/address of the applicant

Owner name: CASCADE MICROTECH DRESDEN GMBH, 01561 THIENDOR, DE

R016 Response to examination communication
R016 Response to examination communication
R082 Change of representative

Representative=s name: PATENTANWAELTE LIPPERT, STACHOW & PARTNER, DE

R081 Change of applicant/patentee

Owner name: CASCADE MICROTECH, INC., BEAVERTON, US

Free format text: FORMER OWNER: CASCADE MICROTECH DRESDEN GMBH, 01561 THIENDORF, DE

Effective date: 20140429

Owner name: CASCADE MICROTECH, INC., US

Free format text: FORMER OWNER: CASCADE MICROTECH DRESDEN GMBH, 01561 THIENDORF, DE

Effective date: 20140429

R082 Change of representative

Representative=s name: LIPPERT STACHOW PATENTANWAELTE RECHTSANWAELTE , DE

Effective date: 20140429

Representative=s name: PATENTANWAELTE LIPPERT, STACHOW & PARTNER, DE

Effective date: 20140429

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee