MY179890A - Sputtering target for magnetic recording film formation and production method therefor - Google Patents
Sputtering target for magnetic recording film formation and production method thereforInfo
- Publication number
- MY179890A MY179890A MYPI2017701004A MYPI2017701004A MY179890A MY 179890 A MY179890 A MY 179890A MY PI2017701004 A MYPI2017701004 A MY PI2017701004A MY PI2017701004 A MYPI2017701004 A MY PI2017701004A MY 179890 A MY179890 A MY 179890A
- Authority
- MY
- Malaysia
- Prior art keywords
- sputtering target
- magnetic recording
- production method
- film formation
- recording film
- Prior art date
Links
- 238000005477 sputtering target Methods 0.000 title abstract 4
- 230000015572 biosynthetic process Effects 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910015371 AuCu Inorganic materials 0.000 abstract 1
- 229910005335 FePt Inorganic materials 0.000 abstract 1
- 239000000956 alloy Substances 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C5/00—Alloys based on noble metals
- C22C5/04—Alloys based on a platinum group metal
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
- H01F10/14—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys containing iron or nickel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/12—Both compacting and sintering
- B22F3/14—Both compacting and sintering simultaneously
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/12—Both compacting and sintering
- B22F3/14—Both compacting and sintering simultaneously
- B22F3/15—Hot isostatic pressing
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Power Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- Powder Metallurgy (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Magnetic Record Carriers (AREA)
Abstract
An FePt-based sintered sputtering target containing C and/or BN, wherein an area ratio of AuCu alloy grains on a polished surface of a cross section that is perpendicular to a sputtered surface of the sputtering target is 0.5% or higher and 15% or less. An object of this invention is to provide a sputtering target capable of reducing the particles that are generated during sputtering and efficiently depositing a magnetic thin film of a magnetic recording medium.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014197407 | 2014-09-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
MY179890A true MY179890A (en) | 2020-11-18 |
Family
ID=55581105
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI2017701004A MY179890A (en) | 2014-09-26 | 2015-09-18 | Sputtering target for magnetic recording film formation and production method therefor |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6084711B2 (en) |
CN (2) | CN107075665A (en) |
MY (1) | MY179890A (en) |
SG (1) | SG11201701838XA (en) |
WO (1) | WO2016047578A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
MY186238A (en) | 2016-09-12 | 2021-06-30 | Jx Nippon Mining & Metals Corp | Ferromagnetic material sputtering target |
JP7057692B2 (en) * | 2018-03-20 | 2022-04-20 | 田中貴金属工業株式会社 | Fe-Pt-Oxide-BN-based sintered body for sputtering target |
JP6878349B2 (en) * | 2018-04-27 | 2021-05-26 | 田中貴金属工業株式会社 | C-containing sputtering target and its manufacturing method |
TWI702294B (en) * | 2018-07-31 | 2020-08-21 | 日商田中貴金屬工業股份有限公司 | Sputtering target for magnetic recording media |
JP7104001B2 (en) * | 2019-06-28 | 2022-07-20 | 田中貴金属工業株式会社 | Fe-Pt-BN-based sputtering target and its manufacturing method |
JP7267425B2 (en) * | 2019-07-12 | 2023-05-01 | 田中貴金属工業株式会社 | Fe-Pt-BN-based sputtering target and manufacturing method thereof |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4885333B1 (en) * | 2010-09-03 | 2012-02-29 | Jx日鉱日石金属株式会社 | Ferromagnetic sputtering target |
CN103270554B (en) * | 2010-12-20 | 2016-09-28 | 吉坤日矿日石金属株式会社 | It is dispersed with the Fe-Pt type sputtering target of C particle |
JP5041261B2 (en) * | 2011-01-31 | 2012-10-03 | 三菱マテリアル株式会社 | Sputtering target for forming a magnetic recording medium film and method for producing the same |
JP5041262B2 (en) * | 2011-01-31 | 2012-10-03 | 三菱マテリアル株式会社 | Sputtering target for forming a magnetic recording medium film and method for producing the same |
US9683284B2 (en) * | 2011-03-30 | 2017-06-20 | Jx Nippon Mining & Metals Corporation | Sputtering target for magnetic recording film |
CN103930592B (en) * | 2011-12-22 | 2016-03-16 | 吉坤日矿日石金属株式会社 | Be dispersed with the Fe-Pt type sputtering target of C particle |
SG11201404067PA (en) * | 2012-06-18 | 2014-10-30 | Jx Nippon Mining & Metals Corp | Sputtering target for magnetic recording film |
US10325762B2 (en) * | 2012-07-20 | 2019-06-18 | Jx Nippon Mining & Metals Corporation | Sputtering target for forming magnetic recording film and process for producing same |
SG11201404222PA (en) * | 2012-08-31 | 2014-10-30 | Jx Nippon Mining & Metals Corp | Fe-BASED MAGNETIC MATERIAL SINTERED BODY |
MY169260A (en) * | 2012-09-21 | 2019-03-20 | Jx Nippon Mining & Metals Corp | Fe-pt-based magnetic materials sintered compact |
JP6366095B2 (en) * | 2014-07-29 | 2018-08-01 | 株式会社フルヤ金属 | Sputtering target for magnetic recording media |
-
2015
- 2015-09-18 CN CN201580051739.8A patent/CN107075665A/en active Pending
- 2015-09-18 WO PCT/JP2015/076628 patent/WO2016047578A1/en active Application Filing
- 2015-09-18 MY MYPI2017701004A patent/MY179890A/en unknown
- 2015-09-18 JP JP2015560124A patent/JP6084711B2/en active Active
- 2015-09-18 SG SG11201701838XA patent/SG11201701838XA/en unknown
- 2015-09-18 CN CN202210426425.3A patent/CN114959599A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
CN107075665A (en) | 2017-08-18 |
JP6084711B2 (en) | 2017-02-22 |
CN114959599A (en) | 2022-08-30 |
WO2016047578A1 (en) | 2016-03-31 |
SG11201701838XA (en) | 2017-04-27 |
JPWO2016047578A1 (en) | 2017-04-27 |
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