MY167829A - Optical displacement gauge and optical displacement calculation method - Google Patents

Optical displacement gauge and optical displacement calculation method

Info

Publication number
MY167829A
MY167829A MYPI2013003139A MYPI2013003139A MY167829A MY 167829 A MY167829 A MY 167829A MY PI2013003139 A MYPI2013003139 A MY PI2013003139A MY PI2013003139 A MYPI2013003139 A MY PI2013003139A MY 167829 A MY167829 A MY 167829A
Authority
MY
Malaysia
Prior art keywords
light
optical displacement
optical
emits
sample
Prior art date
Application number
MYPI2013003139A
Other languages
English (en)
Inventor
Chida Naomichi
Wada Ken-Ichirou
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Publication of MY167829A publication Critical patent/MY167829A/en

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Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Automatic Focus Adjustment (AREA)
MYPI2013003139A 2012-08-28 2013-08-26 Optical displacement gauge and optical displacement calculation method MY167829A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012187670A JP5674050B2 (ja) 2012-08-28 2012-08-28 光学式変位計

Publications (1)

Publication Number Publication Date
MY167829A true MY167829A (en) 2018-09-26

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2013003139A MY167829A (en) 2012-08-28 2013-08-26 Optical displacement gauge and optical displacement calculation method

Country Status (3)

Country Link
JP (1) JP5674050B2 (ja)
CN (1) CN103673888B (ja)
MY (1) MY167829A (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10495446B2 (en) * 2015-06-29 2019-12-03 Kla-Tencor Corporation Methods and apparatus for measuring height on a semiconductor wafer
DE112016005953T5 (de) * 2015-12-25 2018-10-04 Keyence Corporation Konfokaler verschiebungssensor
JP6493265B2 (ja) 2016-03-24 2019-04-03 オムロン株式会社 光学計測装置
JP2018124167A (ja) * 2017-01-31 2018-08-09 オムロン株式会社 傾斜測定装置
CN109163662A (zh) * 2018-08-31 2019-01-08 天津大学 基于波长扫描的光谱共焦位移测量方法及装置
CN110308152B (zh) * 2019-07-26 2020-04-07 上海御微半导体技术有限公司 一种光学检测装置和光学检测方法
CN113741019A (zh) * 2021-08-23 2021-12-03 余姚市朗森光学科技有限公司 一种色差对焦模块、系统及方法
CN115077391A (zh) * 2022-03-25 2022-09-20 上海洛丁森工业自动化设备有限公司 微位移传感器及位移测量方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63149513A (ja) * 1986-12-12 1988-06-22 Sankyo Seiki Mfg Co Ltd 光学式変位計測方法
JPH109827A (ja) * 1996-06-24 1998-01-16 Omron Corp 高さ判別装置および方法
JP4209709B2 (ja) * 2003-03-20 2009-01-14 株式会社キーエンス 変位計
JP2005221451A (ja) * 2004-02-09 2005-08-18 Mitsutoyo Corp レーザ変位計
JP4133884B2 (ja) * 2004-03-18 2008-08-13 株式会社ミツトヨ 光学的変位測定器
JP2009236655A (ja) * 2008-03-27 2009-10-15 Nikon Corp 変位検出装置、露光装置、およびデバイス製造方法
JP5520036B2 (ja) * 2009-07-16 2014-06-11 株式会社ミツトヨ 光学式変位計
JP2011237272A (ja) * 2010-05-10 2011-11-24 Seiko Epson Corp 光距離計及び距離測定方法
US20110286006A1 (en) * 2010-05-19 2011-11-24 Mitutoyo Corporation Chromatic confocal point sensor aperture configuration
JP5634138B2 (ja) * 2010-06-17 2014-12-03 Dmg森精機株式会社 変位検出装置
JP5248551B2 (ja) * 2010-06-17 2013-07-31 株式会社東芝 高さ検出装置

Also Published As

Publication number Publication date
JP5674050B2 (ja) 2015-02-18
JP2014044161A (ja) 2014-03-13
CN103673888A (zh) 2014-03-26
CN103673888B (zh) 2016-09-07

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