MY167829A - Optical displacement gauge and optical displacement calculation method - Google Patents
Optical displacement gauge and optical displacement calculation methodInfo
- Publication number
- MY167829A MY167829A MYPI2013003139A MYPI2013003139A MY167829A MY 167829 A MY167829 A MY 167829A MY PI2013003139 A MYPI2013003139 A MY PI2013003139A MY PI2013003139 A MYPI2013003139 A MY PI2013003139A MY 167829 A MY167829 A MY 167829A
- Authority
- MY
- Malaysia
- Prior art keywords
- light
- optical displacement
- optical
- emits
- sample
- Prior art date
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
- Automatic Focus Adjustment (AREA)
Abstract
OPTICAL DISPLACEMENT GAUGE AND OPTICAL DISPLACEMENT CALCULATION METHOD AN OPTICAL DISPLACEMENT GAUGE INCLUDE: A LIGHT SOURCE THAT EMITS A FIRST BEAM OF LIGHT THAT INCLUDES A PLURALITY OF WAVELENGTHS; AN OBJECTIVE LENS THAT SHINES THE FIRST BEAM OF LIGHT EMITTED BY THE LIGHT SOURCE ONTO A SAMPLE SO THAT THE FIRST BEAM OF LIGHT IS FOCUSED AT DIFFERENT POSITIONS ON AN OPTICAL AXIS FOR DIFFERENT ONES OF THE PLURALITY OF WAVELENGTHS; A SEPARATION UNIT THAT SEPARATES A SECOND BEAM OF LIGHT THAT HAS BEEN REFLECTED FROM THE SAMPLE AND PASSED THROUGH THE OBJECTIVE LENS, AND EMITS A THIRD BEAM OF LIGHT; AN OPTICAL ELEMENT THAT CAUSES CHROMATIC ABERRATION AND ASTIGMATISM IN THE THIRD BEAM OF LIGHT AND EMITS A FOURTH BEAM OF LIGHT WHICH HAS THE CHROMATIC ABERRATION AND THE ASTIGMATISM; A PLURALITY OF DETECTION UNITS THAT DETECT THE FOURTH BEAM OF LIGHT EMITTED FROM THE OPTICAL ELEMENT; AND A CALCULATION UNIT THAT CALCULATES A HEIGHT OF THE SAMPLE FROM A REFERENCE SURFACE, BASED ON THE FOURTH BEAM OF LIGHT DETECTED BY THE PLURALITY OF DETECTION UNITS. (FIGURE 1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012187670A JP5674050B2 (en) | 2012-08-28 | 2012-08-28 | Optical displacement meter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| MY167829A true MY167829A (en) | 2018-09-26 |
Family
ID=50312171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MYPI2013003139A MY167829A (en) | 2012-08-28 | 2013-08-26 | Optical displacement gauge and optical displacement calculation method |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5674050B2 (en) |
| CN (1) | CN103673888B (en) |
| MY (1) | MY167829A (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10495446B2 (en) * | 2015-06-29 | 2019-12-03 | Kla-Tencor Corporation | Methods and apparatus for measuring height on a semiconductor wafer |
| WO2017110838A1 (en) * | 2015-12-25 | 2017-06-29 | 株式会社キーエンス | Confocal displacement meter |
| JP6493265B2 (en) | 2016-03-24 | 2019-04-03 | オムロン株式会社 | Optical measuring device |
| JP2018124167A (en) * | 2017-01-31 | 2018-08-09 | オムロン株式会社 | Inclination measuring device |
| CN109163662A (en) * | 2018-08-31 | 2019-01-08 | 天津大学 | Spectral Confocal displacement measurement method and device based on length scanning |
| CN110308152B (en) * | 2019-07-26 | 2020-04-07 | 上海御微半导体技术有限公司 | Optical detection device and optical detection method |
| CN113741019B (en) * | 2021-08-23 | 2024-07-02 | 余姚市朗森光学科技有限公司 | Chromatic aberration focusing module, system and method |
| CN115077391A (en) * | 2022-03-25 | 2022-09-20 | 上海洛丁森工业自动化设备有限公司 | Micro-displacement sensor and displacement measuring method |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63149513A (en) * | 1986-12-12 | 1988-06-22 | Sankyo Seiki Mfg Co Ltd | Optical displacement measuring method |
| JPH109827A (en) * | 1996-06-24 | 1998-01-16 | Omron Corp | Method and equipment for determining height |
| JP4209709B2 (en) * | 2003-03-20 | 2009-01-14 | 株式会社キーエンス | Displacement meter |
| JP2005221451A (en) * | 2004-02-09 | 2005-08-18 | Mitsutoyo Corp | Laser displacement gauge |
| JP4133884B2 (en) * | 2004-03-18 | 2008-08-13 | 株式会社ミツトヨ | Optical displacement measuring instrument |
| JP2009236655A (en) * | 2008-03-27 | 2009-10-15 | Nikon Corp | Displacement detecting apparatus, exposure apparatus, and device manufacturing method |
| JP5520036B2 (en) * | 2009-07-16 | 2014-06-11 | 株式会社ミツトヨ | Optical displacement meter |
| JP2011237272A (en) * | 2010-05-10 | 2011-11-24 | Seiko Epson Corp | Optical distance meter and distance measuring method |
| US20110286006A1 (en) * | 2010-05-19 | 2011-11-24 | Mitutoyo Corporation | Chromatic confocal point sensor aperture configuration |
| JP5248551B2 (en) * | 2010-06-17 | 2013-07-31 | 株式会社東芝 | Height detection device |
| JP5634138B2 (en) * | 2010-06-17 | 2014-12-03 | Dmg森精機株式会社 | Displacement detector |
-
2012
- 2012-08-28 JP JP2012187670A patent/JP5674050B2/en active Active
-
2013
- 2013-08-26 CN CN201310375884.4A patent/CN103673888B/en active Active
- 2013-08-26 MY MYPI2013003139A patent/MY167829A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CN103673888A (en) | 2014-03-26 |
| CN103673888B (en) | 2016-09-07 |
| JP2014044161A (en) | 2014-03-13 |
| JP5674050B2 (en) | 2015-02-18 |
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