CN103673888A - Optical displacement meter and optical displacement calculating method - Google Patents
Optical displacement meter and optical displacement calculating method Download PDFInfo
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- CN103673888A CN103673888A CN201310375884.4A CN201310375884A CN103673888A CN 103673888 A CN103673888 A CN 103673888A CN 201310375884 A CN201310375884 A CN 201310375884A CN 103673888 A CN103673888 A CN 103673888A
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Abstract
The invention provides an optical displacement meter provided with a light source radiating first light containing a plurality of wavelengths; an objective lens radiating the first light emitted by the light source, so as to enable each one of the wavelength to focus on different positions on an optical axis; a separation part separating the second light passing through the objective lens from the reflection light from a sample and emitting a third light; an optical element emitting a fourth light making the third light have aberration and similarity indexes; a plurality of detection parts used for detecting the fourth light emitted from the optical element; and an operation part calculating height of a sample from a referential face based on the fourth light detected by the detection parts.
Description
Technical field
The present invention relates to a kind of optical displacement and take into account optical displacement operational method, in detail, relate to the optical displacement of realizing miniaturization, cost degradation, high-speed response and take into account optical displacement operational method.
Background technology
Fig. 6 is the structural drawing as the 1st optical displacement meter 200a of prior art.Specifically, Fig. 6 is the structural drawing of the optical displacement meter 200a that records in Japanese kokai publication hei 10-9827.
In Fig. 6, that send from white light sources 201 such as Xe lamps, to comprise a plurality of wavelength components light, by pin hole 206a, is focused on by object lens 204 by optical splitter 203, is radiated on sample 205.
On sample 205, the light of reflection is reflected by optical splitter 203, by pin hole 206b, is incident in photodetector 207.Photodetector 207 has color filter 208a, 208b and is subject to optical sensor 209R, 209G, 209B.Color filter 208a, 208b are decomposed into trichromatic dichronic mirror by incident light.Being subject to optical sensor 209R, 209G, 209B is the sensor that receives trichromatic light.
Usually, the focal length f of lens is represented approx by following formula (1).
（1/f）=（n－1）×｛（1/r1）－（1/r2）｝…（1）
In formula (1), n is the refractive index that forms the glass material of lens, and r1, r2 are the radius-of-curvature of lens.
As shown in above-mentioned formula (1), focal distance f depends on the refractive index n of lens.The refractive index n of lens depends on the light wavelength λ passing through.Thus, the focus position of light is corresponding with wavelength X, not identical on optical axis direction.
In the explanation of Fig. 6, the situation that is λ 1 < λ 2 < λ 3 to the length of wavelength describes.
As shown in Figure 6, if the light of wavelength X 2 in the top of sample 205 focus, the light of wavelength X 1, because its focal length is shorter, therefore in the place ahead (the paper top of Fig. 6) of sample 205 focus.In addition, the light of wavelength X 3, because its focal length is longer, therefore in the rear (the paper below of Fig. 6) of sample 205 focus.
For example, in the situation that the only B(of wavelength X 1 is blue), the only G(of wavelength X 2 is green), the only R(of wavelength X 3 is red), at the light of the wavelength X 2 of the top of sample 205 focus, via color filter 208a, 208b, be incident to and be subject in optical sensor 209G most.Handling part 210a, according to each light quantity that received by optical sensor 209B, 209G, 209R, detects and is subject to the light income of optical sensor 209G maximum, the height of the sample from reference field R0 205 is defined as to the focus position of green light.
Fig. 7 is the structural drawing as the 2nd optical displacement meter 200b of prior art.In Fig. 7, in photodetector 207, be provided with line sensor 214.
In Fig. 7, by being incident to the light in photodetector 207 after pin hole 206a, utilize lens 211 to become directional light.The light that this directional light is each wavelength components by prism 212 light splitting as spectrum light splitter.Light after light splitting is focused on by lens 213.Then, the light of convergence is incident to by CCD(charge bonded element) etc. in the line sensor 214 that forms.
In this structure, in the situation that only wavelength X 2 green light of the top of sample 205 reflection are irradiated maximum light on the position corresponding with wavelength X 2 on on-line sensor 214.
Therefore,, as long as obtain in advance the relation of the height of sample 205 and the light receiving position of line sensor 214, handling part 210b just can obtain from the light receiving position of line sensor 214 height of sample 205.
Fig. 8 is the structural drawing as the 3rd optical displacement meter 200c of prior art.Specifically, Fig. 8 is the structural drawing of the optical displacement meter 200c that records in TOHKEMY 2011-39026.In Fig. 8, on optical axis, for the larger object lens 204 of aberration, focal length is different along with optical wavelength (look).That is to say, blue light B0 is in the position focus nearer apart from object lens 204, and red light R0 is in the position focus far away apart from object lens 204.The position focus of green light G0 between the focus position of blue light B0 and the focus position of red light R0.Optical displacement meter 200c working sample 205 in measurement range M0.In TOHKEMY 2011-39026, with respect to object lens 204, as the sample 205 of determination object and the confocal point of opposition side, identical no matter how color is all considered as.If the pointolite of configuration white or wide band is corresponding with the height of sample 205, on sample 205, the color of focus is with relationship change one to one.Therefore, if the spatial filter such as pin hole are set on the common focal position when the reflected light from sample 205 returns, and reflected light is passed through, the light of the color of focus on sample 205 can be extracted.In TOHKEMY 2011-39026, utilized this principle.
And in TOHKEMY 2011-39026, by using the optical splitters such as diffraction grid 226 in handling part 210c, designated color (optical wavelength) becomes the height (displacement) of the sample 205 of relation one to one thereby measure with color.
Usually, use optical fiber 230 white light (wide band light) to be guided to the confocal some place of sensor head 215, the fibre core of fiber end face 230a is seen as to pin hole and as confocal point, to calibration lens 216, applied diverging light.
After sample 205 reflection, be radiated in the white light on sample 205, on sample 205, the light of the color of focus selectively concentrates on the common focal position of fiber end face 230a.The light that concentrates on common focal position enters in fiber core, via fiber coupler 224, to optical splitter 226, guides.On the other hand, for the light of other colors, the fibre core of fiber end face 230a is equivalent to pin hole and limits the light of incident.Thus, the light except the light of the color of focus on sample 205, is blocked by the periphery of fiber core, can not be incident in optical fiber 230.
226 pairs of light wavelengths of returning in optical fiber 230 of optical splitter detect.The detected wavelength of optical splitter 226 inputs to electronic circuit 228 and processes.
Utilize the dichronic mirror shown in above-mentioned Fig. 6 and use the optical displacement meter 200a in 3 paths, it installs maximization.In addition, dichronic mirror price is higher, has limitation in the precision of measurement range, and cost raises.
In addition, use the optical displacement meter 200b of the prism 212 shown in above-mentioned Fig. 7 and line sensor 214, it installs maximization.In addition, the price of line sensor 214 is higher, cannot make reading speed high speed.
In addition, use the optical displacement meter 200c of the optical splitter 226 shown in above-mentioned Fig. 8, the price of optical splitter 226 and electronic circuit 228 is higher.
Summary of the invention
The invention provides a kind of optical displacement and take into account optical displacement operational method, it reduces the manufacturing cost of device, makes reading speed high speed, makes equipment miniaturization.
(1) the 1st mode of the present invention is following optical displacement meter, and it has: light source, the 1st light that its irradiation comprises a plurality of wavelength; Object lens, its aforementioned the 1st light that aforementioned light source is irradiated is to sample irradiation, so that each in aforementioned a plurality of wavelength, the diverse location focus on optical axis; Separation unit, it carries out separation to the 2nd light by aforementioned object lens in the reflected light from aforementioned sample, and penetrates the 3rd light; Optical element, its ejaculation makes aforementioned the 3rd light that aforementioned separation unit penetrates produce aberration and astigmatism and the 4th light that obtains; A plurality of test sections, its aforementioned the 4th light that aforementioned optical element is penetrated detects; And operational part, it,, based on detected aforementioned the 4th light of aforementioned a plurality of test sections, carries out computing to the height of the aforementioned sample from reference plane.
(2) in the 1st mode of the present invention, aforementioned separation unit is fiber coupler, and it is spatially separated by aforementioned the 2nd light, as aforementioned the 3rd light, penetrates.
(3) in the 1st mode of the present invention, also can have: the 1st optical fiber, it makes aforementioned the 1st light of aforementioned light source irradiation from one end incident, and aforementioned the 1st light is penetrated from the other end; And the 2nd optical fiber, it makes to utilize aforementioned separation unit to penetrate from aforementioned the 3rd light of aforementioned the 2nd light separation.
(4) in the 1st mode of the present invention, the aforementioned other end of aforementioned the 1st optical fiber is configured to, with respect to the surface of aforementioned sample and in common focal position.
(5) in the 1st mode of the present invention, aforementioned separation unit is optical splitter, and it is separated into aforementioned the 2nd light reflected light and sees through light, using separated reflected light as aforementioned the 3rd light, penetrates.
(6) in the 1st mode of the present invention, also can have: the 1st pin hole, it makes aforementioned the 1st light of aforementioned light source irradiation from a side incident, and aforementioned the 1st light is penetrated from opposite side; And the 2nd pin hole, it makes aforementioned the 2nd light from a side incident, and aforementioned the 2nd light is penetrated from opposite side as aforementioned the 3rd light.
(7), in the 1st mode of the present invention, aforementioned the 1st pin hole also can be configured to, with respect to aforementioned sample and in common focal position.
(8), in the 1st mode of the present invention, aforementioned the 2nd pin hole also can be configured to, with respect to aforementioned sample and in common focal position.
(9) in the 1st mode of the present invention, also have framework, it also has framework, and this framework is included in aforementioned object lens and aforementioned the 2nd pin hole wherein, and aforementioned the 1st pin hole is arranged in aforementioned framework.
(10), in the 1st mode of the present invention, aforementioned optical element can be also aberration lens and cylindrical lens.
(11) in the 1st mode of the present invention, aforementioned optical element can be also parallel plate glass, and it is configured on the optical axis of aforementioned the 4th light, with respect to the inclined light shaft of aforementioned the 4th light.
(12), in the 1st mode of the present invention, aforementioned a plurality of test sections also can consist of the 1st～4th photodiode.
(13) in the 1st mode of the present invention, in the situation that the value that aforementioned the 1st～4th photodiode detects is respectively A1, B1, C1, D1, also can utilize the relation of ((A1+B1)-(C1+D1)/(A1+B1+C1+D1)), the height of the aforementioned sample from aforementioned reference plane is carried out to computing.
(14), in the 1st mode of the present invention, aforementioned the 1st～4th photodiode also can be configured on the foursquare summit vertical with the optical axis of aforementioned the 4th light.
(15), in the 1st mode of the present invention, aforementioned a plurality of test sections also can consist of the 1st and the 2nd photodiode.
(16) in the 1st mode of the present invention, also can there is storage part, this storage part is associated the operation result of the output signal of the height of the aforementioned sample from aforementioned reference plane and aforementioned a plurality of test sections and store, the operation result of the output signal of aforementioned operational part based on aforementioned a plurality of test sections is read the height of aforementioned sample from aforementioned storage part.
(17) in the 1st mode of the present invention, also can there is moving part, this moving part makes aforementioned optical displacement meter move abreast with respect to aforementioned reference field, aforementioned operational part, in aforementioned moving part makes process that aforementioned optical displacement meter moves, carries out computing to the height of aforementioned sample.
(18) the 2nd mode of the present invention is following optical displacement meter, and it has: the 1st light source, the 1st light that its irradiation comprises a plurality of wavelength; The 1st object lens, its aforementioned the 1st light that aforementioned the 1st light source is irradiated is to sample irradiation, so that each in aforementioned a plurality of wavelength, the diverse location focus on optical axis; The 1st separation unit, it is to carrying out separation from the 2nd light by aforementioned the 1st object lens in one of aforementioned sample surperficial reflected light, and ejaculation the 3rd light; The 1st optical element, its ejaculation makes aforementioned the 3rd light that aforementioned the 1st separation unit penetrates produce aberration and astigmatism and the 4th light that obtains; A plurality of the 1st test sections, its aforementioned the 4th light that aforementioned the 1st optical element is penetrated detects; The 2nd light source, the 5th light that its irradiation comprises a plurality of wavelength; The 2nd object lens, its aforementioned the 5th light that aforementioned the 2nd light source is irradiated is to sample irradiation, so that each in aforementioned a plurality of wavelength, the diverse location focus on optical axis; The 2nd separation unit, it carries out separation to the 6th light by aforementioned the 2nd object lens in another the surperficial reflected light from aforementioned sample, and penetrates the 7th light; The 2nd optical element, its ejaculation makes aforementioned the 7th light that aforementioned the 2nd separation unit penetrates produce aberration and astigmatism and the 8th light that obtains; A plurality of the 2nd test sections, its aforementioned the 8th light that aforementioned the 2nd optical element is penetrated detects; And operational part, it is based on detected aforementioned the 4th light of aforementioned a plurality of the 1st test section, to the 1st of an aforementioned face side of the aforementioned sample from reference plane the, highly carry out computing, and based on detected aforementioned the 8th light of aforementioned a plurality of the 2nd test section, to the 2nd of aforementioned another face side of the aforementioned sample from aforementioned reference plane the, highly carry out computing, then based on aforementioned the 1st height and aforementioned the 2nd height, the thickness of aforementioned sample is carried out to computing.
(19) the 3rd mode of the present invention is following optical displacement operational method, , from light source, irradiate the 1st light that comprises a plurality of wavelength, aforementioned the 1st light that aforementioned light source is irradiated is from object lens to sample irradiation, so that each in aforementioned a plurality of wavelength, diverse location focus on optical axis, utilize separation unit, the 2nd smooth separation unit by aforementioned object lens in reflected light from aforementioned sample is carried out to separation, and ejaculation the 3rd light, from optical element, penetrate the 4th light make aforementioned the 3rd light that aforementioned separation unit penetrates produce aberration and astigmatism and to obtain, aforementioned the 4th light that utilizes a plurality of test sections to penetrate aforementioned optical element detects, based on detected aforementioned the 4th light of aforementioned a plurality of test sections, utilize operational part to carry out computing to the height of the aforementioned sample from reference plane.
(20) the 4th mode of the present invention is following optical displacement operational method, , from the 1st light source, irradiate the 1st light that comprises a plurality of wavelength, aforementioned the 1st light that aforementioned the 1st light source is irradiated is from the 1st object lens to sample irradiation, so that each in aforementioned a plurality of wavelength, diverse location focus on optical axis, utilize the 1st separation unit to carrying out separation from the 2nd light by aforementioned the 1st object lens in one of aforementioned sample surperficial reflected light, and ejaculation the 3rd light, from the 1st optical element, penetrate the 4th light make aforementioned the 3rd light that aforementioned the 1st separation unit penetrates produce aberration and astigmatism and to obtain, aforementioned the 4th light that utilizes a plurality of the 1st test sections to penetrate aforementioned the 1st optical element detects, from the 2nd light source, irradiate the 5th light that comprises a plurality of wavelength, aforementioned the 5th light that aforementioned the 2nd light source is irradiated is from the 2nd object lens to sample irradiation, so that each in aforementioned a plurality of wavelength, diverse location focus on optical axis, utilize the 2nd separation unit to carry out separation to the 6th light by aforementioned the 2nd object lens in another the surperficial reflected light from aforementioned sample, and ejaculation the 7th light, from the 2nd optical element, penetrate the 8th light make aforementioned the 7th light that aforementioned the 2nd separation unit penetrates produce aberration and astigmatism and to obtain, aforementioned the 8th light that utilizes a plurality of the 2nd test sections to penetrate aforementioned the 2nd optical element detects, based on detected aforementioned the 4th light of aforementioned a plurality of the 1st test section, utilize operational part highly to carry out computing to the 1st of an aforementioned face side of the aforementioned sample from reference plane the, and based on detected aforementioned the 8th light of aforementioned a plurality of the 2nd test section, utilize aforementioned operational part highly to carry out computing to the 2nd of aforementioned another face side of the aforementioned sample from aforementioned reference plane the, then based on aforementioned the 1st height and aforementioned the 2nd height, utilize aforementioned operational part to carry out computing to the thickness of aforementioned sample.
According to the present invention, can provide a kind of optical displacement to take into account optical displacement operational method, it reduces the manufacturing cost of device, makes reading speed high speed, makes equipment miniaturization.
Accompanying drawing explanation
Fig. 1 wants portion's structural drawing according to the optical displacement meter of the 1st embodiment of the present invention.
Fig. 2 means that reflected light becomes the figure of the state of different ellipticities on the surface of 4 minutes photodiodes.
Fig. 3 wants portion's structural drawing according to the optical displacement meter of the 2nd embodiment of the present invention.
Fig. 4 wants portion's structural drawing according to the optical displacement meter of the 3rd embodiment of the present invention.
Fig. 5 wants portion's structural drawing according to the optical displacement meter of the 4th embodiment of the present invention.
Fig. 6 is the structural drawing as the 1st optical displacement meter of prior art.
Fig. 7 is the structural drawing as the 2nd optical displacement meter of prior art.
Fig. 8 is the structural drawing as the 3rd optical displacement meter of prior art.
Embodiment
Below, with reference to accompanying drawing, the 1st～4th embodiment of the present invention is described.The following explanation that the 1st～4th embodiment of the present invention relates to, just the invention of stipulating in additional claim and equivalent thereof are described particularly, object is not that it is limited, and this is understandable based on present disclosure for a person skilled in the art.
(the 1st embodiment)
First, the optical displacement meter 100a of the 1st embodiment is described.
Fig. 1 be the 1st embodiment of the present invention optical displacement meter 100a want portion's structural drawing.
In Fig. 1, light source 101 is the white light sources that irradiate the light that comprises a plurality of wavelength.The light that light source 101 irradiates is incident in optical fiber 130a.The light being incident in optical fiber 130a penetrates from the exit wound of bullet 130c of optical fiber 130a.Image optics is that 140a has fiber coupler 124, object lens 104.Sample 105 is configured in a side contrary with fiber coupler 124 across object lens 104.Object lens 104 are aberration lens.See through the irradiation of object lens 104 on sample 105.
Here, from sample 105 for example produce the light (green) of the light of wavelength X 1 (blueness), wavelength X 2, the light (redness) of wavelength X 3 as reflected light.In addition, the exit wound of bullet 130c of optical fiber 130a can be considered pointolite.The exit wound of bullet 130c of optical fiber 130a is configured to, with respect to the surface of sample 105 and in common focal position.
The reflected light being reflected by sample 105 is reverse advancing on the path identical with incident path, by the fiber coupler 124 being arranged on optical fiber 130a, spatially carries out separation, and via optical fiber 130b, being incident to reflected light image optics is in 141a.
Reflected light image optics is that 141a has aberration lens 104a, cylindrical lens 143 and 4 minutes photodiodes 144.
The reflected light penetrating from the exit wound of bullet 130d of optical fiber 130b sees through aberration lens 104a, and these aberration lens 104a is for making this reflected light penetrate to the distance focal position different with wavelength.See through the light transmission cylindrical lens (cylindrical lens) 143 of aberration lens 104a.
Fig. 2 means that reflected light becomes the figure of the state of different ellipticities on the surface of 4 minutes photodiodes 144.Specifically, the window W1 of Fig. 2 represents following situation, that is, the reflected light penetrating from the exit wound of bullet 130d of the optical fiber 130b shown in Fig. 1, sees through cylindrical lens (cylindrical lens) 143 after seeing through aberration lens 104a, arrives 4 minutes photodiodes 144.The surface that the window W2 of Fig. 2 is illustrated in 4 minutes photodiodes 144 becomes the state of different ellipticities.
As shown in Figure 2,4 minutes photodiodes 144 have photodiode 144A, 144B, 144C, 144D.In Fig. 2, the situation on the vertical foursquare summit of the optical axis of the light that represent photodiode 144A, 144B, 144C, 144D is configured in to be penetrated with cylindrical lens 143.
Output from 4 minutes photodiodes 144 inputs to respectively operational part 142, and the output of 4 minutes photodiodes 144 is carried out to computing, obtains the information about the shape of the image in detection faces.For example, if using the output of photodiode 144A, the 144B of Fig. 2,144C, 144D as A1, B1, C1, D1, as long as carry out the computing of ((A1+B1)-(C1+D1)/(A1+B1+C1+D1)), when elongate shape, be on the occasion of, when growing crosswise shape, be negative value.Owing to determining wavelength from this operation result, therefore finally can obtain sample 105 from the height (thickness of sample 105) of reference plane.For example, operational part 142 has storage part (omit diagram), and it is the height from reference field R1 to the surface of sample 105 in advance, and the operation result of the output signal of photodiode 144A, 144B, 144C, 144D is associated and stores.In the situation that obtain the operation result of the output signal of photodiode 144A, 144B, 144C, 144D, operational part 142 is read the height corresponding with this operation result from storage part, the height of the surface of determining sample 105 from reference field R1.
In addition,, as operational part 142, can use electric circuit or microcomputer, microcontroller etc.
In the 1st embodiment, the detecting element of the light penetrating as cylindrical lens 143, has been used 4 minutes photodiodes 144, but has been not limited to this.The element that for example, also the strength ratio of a plurality of detecting elements can be changed along with the variation of imaging shape is as detecting element.For example, as detecting element, also can not use 4 minutes photodiodes 144, and use 2 minutes photodiodes.
(the 2nd embodiment)
Below, the optical displacement meter 100b that the 2nd embodiment of the present invention is related to describes.In addition, for the 2nd embodiment, adopt the part of the structure identical with the 1st embodiment, mark identical label, omit their explanation.
Fig. 3 be the optical displacement meter 10b that relates to of the 2nd embodiment of the present invention want portion's structural drawing.In the 2nd embodiment, be with the difference of the 1st embodiment: replace optical fiber 130a, 130b and use pin hole 106a, 106b; Use optical splitter 103 that the reflected light from sample 105 is separated; Making to utilize the reflected light of optical splitter 103 separation to be incident to reflected light image optics via pin hole 106b is in 141b.
The image optics that the 2nd embodiment relates to is that 140b has pin hole 106a, pin hole 106b, aberration lens 104.
In Fig. 3, the light that light source 101 is irradiated is that 140b imports by the 1st pin hole 106a to image optics.Pin hole 106a and 106b are configured to, with respect to the surface of sample 105 and in common focal position.
In addition, between the surface from pin hole 106a to sample 105, configure optical splitter, as reflected light is spatially carried out to the separation unit of path separation, on the position focusing at the reflected light by optical splitter 103 separation, configure the 2nd pin hole 106b.Because reflected light image optics is other structures and the effect of 141b, the reflected light image optics relating to the 1st embodiment shown in Fig. 1 is that 141a is identical, and therefore the description thereof will be omitted.
In the optical displacement meter 100b of structure shown in Fig. 3, the optical displacement meter 100a relating to the 1st embodiment shown in Fig. 1 works in the same manner.
(the 3rd embodiment)
Below, the optical displacement meter 100c that the 3rd embodiment of the present invention is related to describes.In addition, for the 3rd embodiment, adopt the part of the structure identical with the 2nd embodiment, mark identical label, omit their explanation.
Fig. 4 be the optical displacement meter 10c that relates to of the 3rd embodiment of the present invention want portion's structural drawing.In the 3rd embodiment, be with the difference of the 1st embodiment: replace optical fiber 130a, 130b and use pin hole 106a, 106b; Use optical splitter 103 that the reflected light from sample 105 is separated; Making to utilize the reflected light of optical splitter 103 separation to be incident to reflected light image optics via pin hole 106b is in 141b.
In addition, in the 3rd embodiment, be with the difference of the 2nd embodiment, not like this, the inside that is 140b in image optics arranges pin hole 106a for the 2nd embodiment as shown in Figure 3.Specifically, in the 3rd embodiment, image optics is that the framework 1400 of the cubic of 140c is included in object lens 104 and pin hole 106b wherein.And pin hole 106c is arranged on the central authorities of the upper surface of framework 1400.
In the 3rd embodiment, due to support portion and the pin hole 101b without supporting light sources 101 is set in addition, the image optics therefore relating to the 2nd embodiment is that 140b compares, and can reduce manufacturing cost.
In addition, pin hole 106c is configured to, with respect to the surface of sample 105 and in common focal position.
The optical displacement meter 100c of structure shown in Fig. 4, the optical displacement meter 100a relating to the 1st embodiment shown in Fig. 1 works in the same manner.
(the 4th embodiment)
Below, the optical displacement meter 100d that the 4th embodiment of the present invention is related to describes.In addition, adopt the part of the structure identical with the 1st embodiment for the 4th embodiment, mark identical label, the description thereof will be omitted.
Fig. 5 be the optical displacement meter 100d that relates to of the 4th embodiment of the present invention want the structure knot figure of portion.In the same manner, having image optics is that 140a and reflected light image optics are 141a for the optical displacement meter 100d of the 4th embodiment and the 1st embodiment.And it is that 140d and reflected light image optics are 141d that the optical displacement meter 100d of the 4th embodiment also has image optics.
Image optics is that 140d, reflected light image optics are that 141d and image optics are that 140a, reflected light image optics are that 141a works in the same manner.That is to say, light source 301, optical fiber 330a, 330b, fiber coupler 324, aberration lens 304,304a, 343,4 minutes photodiodes 344 of cylindrical lens, work in the same manner with the light source 101 illustrating in the 1st embodiment, optical fiber 130a, 130b, fiber coupler 124, aberration lens 104,104a, 143,4 minutes photodiodes 144 of cylindrical lens respectively.
In the 4th embodiment, for the sample 105 as tabular or laminal determination object, by utilizing a pair of image optics, be that 140a, 140d are configured in both sides and measure respectively across sample 105, thus thickness that can calculation sample 105.
That is to say, the optical displacement meter 100d of the 4th embodiment has: light source 101, the 1st light that its irradiation comprises a plurality of wavelength; Object lens 104, it makes the 1st light that light source 101 irradiates to sample irradiation, so that each in a plurality of wavelength X 1, λ 2, λ 3, the diverse location focus on optical axis; Fiber coupler 124, it is to carrying out separation from the 2nd light by object lens 104 in one of sample 105 surperficial reflected light, and ejaculation the 3rd light; Aberration lens 104a, its ejaculation makes the 3rd light that fiber coupler 124 penetrates produce aberration and the 4th light that obtains; Cylindrical lens 143, its ejaculation makes the 4th light that aberration lens 104a penetrates produce astigmatism and the 5th light that obtains; And 4 minutes photodiodes 144, its 5th light that cylindrical lens 143 is penetrated detects.
In addition, the optical displacement meter 100d of the 4th embodiment has: light source 301, the 6th light that its irradiation comprises a plurality of wavelength X 1, λ 2, λ 3; Object lens 304, it makes the 6th light that light source 301 irradiates irradiate to sample 105, so that each in a plurality of wavelength X 1, λ 2, λ 3, the diverse location focus on optical axis; Fiber coupler 324, it carries out separation to the 7th light by object lens 304 in another the surperficial reflected light from sample 105, and penetrates the 8th light; Aberration lens 304a, its ejaculation makes the 8th light that fiber coupler 324 penetrates produce aberration and the 9th light that obtains; Cylindrical lens 343, its ejaculation makes the 9th light that aberration lens 304a penetrates produce astigmatism and the 10th light that obtains; And 4 minutes photodiodes 344, its 10th light that cylindrical lens 343 is penetrated detects.
In addition, the optical displacement meter 100d of the 4th embodiment has operational part 142d, it was based on 4 minutes detected the 5th light of photodiode 144, the 1st height H 1 to a face side of the sample 105 from reference field R1 is carried out computing, based on 4 minutes detected the 10th light of photodiode 344, the 2nd height H 2 to another face side of the sample 105 from reference field R1 is carried out computing, based on the 1st and the 2nd height H 1 and H2, the thickness of sample 105 (the 1st height with the 2nd height and) is carried out to computing.
In addition, be disposed at both sides 4 cut apart photodiode 144 and 4 minutes photodiodes 344 can be in the situation that image optics be relatively displacement on the optical axis direction of 140a, 140b, by the utensil that 4 distances of cutting apart photodiode 144 and 4 minutes photodiodes 344 are measured is set in addition, can correctly calculate the thickness of determination object.
The structure of the optical displacement meter 100a～100d relating to according to the 1st～4th embodiment, as forming reflected light image optics, be optical element 141a, 141b, 141d, that produce aberration and astigmatism, can use utensil (aberration lens 104a, cylindrical lens 143) cheaply.Thus, can form the reflected light image optics that cost is lower than commercially available optical splitter is 141a, 141b, 141d.
In addition, within 4 minutes, photodiode 144 is compared with hundreds of～thousands of element arrays using in optical splitter, and price is lower, and can high speed motion.
And, because reflected light image optics is that 141a, 141b, 141d are simple optical system, so optical system small-sized, the light weight that becomes, can be used as and insert the sensor of use and apply.
In addition, in the optical displacement meter 100a～100d relating at the 1st～4th embodiment of the present invention, moving part (not shown) also can be set, it moves abreast optical displacement meter 100a～100d on reference field R1 with respect to tabular or laminal determination object (sample 105).By sample 105 is fixing, utilize moving part that optical displacement meter 100a～100d is moved abreast on reference field R1, working sample 105 is from the height of reference plane, can be determined at exactly the height (thickness) of the determination object on the reference field of sample 105.
In addition, above-mentioned explanation only shows with explanation of the present invention and is exemplified as the specific preferred forms of object.For example, also can calibrate lens and arrange between calibration areas in the configuration midway in travel path of incident light or reflected light path.
The present invention is not limited to above-mentioned embodiment, can apply change or distortion within not departing from its essential scope.
Claims (20)
1. an optical displacement meter, it has:
Light source, the 1st light that its irradiation comprises a plurality of wavelength;
Object lens, its aforementioned the 1st light that aforementioned light source is irradiated is to sample irradiation, so that each in aforementioned a plurality of wavelength, the diverse location focus on optical axis;
Separation unit, it carries out separation to the 2nd light by aforementioned object lens in the reflected light from aforementioned sample, and penetrates the 3rd light;
Optical element, its ejaculation makes aforementioned the 3rd light that aforementioned separation unit penetrates produce aberration and astigmatism and the 4th light that obtains;
A plurality of test sections, its aforementioned the 4th light that aforementioned optical element is penetrated detects; And
Operational part, it,, based on detected aforementioned the 4th light of aforementioned a plurality of test sections, carries out computing to the height of the aforementioned sample from reference plane.
2. optical displacement meter according to claim 1,
Aforementioned separation unit is fiber coupler, and it is spatially separated by aforementioned the 2nd light, as aforementioned the 3rd light, penetrates.
3. optical displacement meter according to claim 1, it has:
The 1st optical fiber, it makes aforementioned the 1st light of aforementioned light source irradiation from one end incident, and aforementioned the 1st light is penetrated from the other end; And
The 2nd optical fiber, it makes to utilize aforementioned separation unit to penetrate from aforementioned the 3rd light of aforementioned the 2nd light separation.
4. optical displacement meter according to claim 3,
The aforementioned other end of aforementioned the 1st optical fiber is configured to, with respect to the surface of aforementioned sample and in common focal position.
5. optical displacement meter according to claim 1,
Aforementioned separation unit is optical splitter, and it is separated into aforementioned the 2nd light reflected light and sees through light, using separated reflected light as aforementioned the 3rd light, penetrates.
6. optical displacement meter according to claim 1, it has:
The 1st pin hole, it makes aforementioned the 1st light of aforementioned light source irradiation from a side incident, and aforementioned the 1st light is penetrated from opposite side; And
The 2nd pin hole, it makes aforementioned the 2nd light from a side incident, and aforementioned the 2nd light is penetrated from opposite side as aforementioned the 3rd light.
7. optical displacement meter according to claim 6,
Aforementioned the 1st pin hole is configured to, with respect to the surface of aforementioned sample and in common focal position.
8. optical displacement meter according to claim 6,
Aforementioned the 2nd pin hole is configured to, with respect to the surface of aforementioned sample and in common focal position.
9. optical displacement meter according to claim 6,
It also has framework, and this framework is included in aforementioned object lens and aforementioned the 2nd pin hole wherein,
Aforementioned the 1st pin hole is arranged in aforementioned framework.
10. optical displacement meter according to claim 1,
Aforementioned optical element is aberration lens and cylindrical lens.
11. optical displacement meters according to claim 1,
Aforementioned optical element is parallel plate glass, and it is configured on the optical axis of aforementioned the 4th light, with respect to the inclined light shaft of aforementioned the 4th light.
12. optical displacement meters according to claim 1,
Aforementioned a plurality of test section consists of the 1st～4th photodiode.
13. optical displacement meters according to claim 12,
In the situation that the value that aforementioned the 1st～4th photodiode detects is respectively A1, B1, C1, D1, utilize the relation of ((A1+B1)-(C1+D1)/(A1+B1+C1+D1)), the height of the aforementioned sample from aforementioned reference plane is carried out to computing.
14. optical displacement meters according to claim 12,
Aforementioned the 1st～4th photodiode is configured on the foursquare summit vertical with the optical axis of aforementioned the 4th light.
15. optical displacement meters according to claim 1,
Aforementioned a plurality of test section consists of the 1st and the 2nd photodiode.
16. optical displacement meters according to claim 1,
It has storage part, and this storage part is associated the operation result of the output signal of the height of the aforementioned sample from aforementioned reference plane and aforementioned a plurality of test sections and store,
The operation result of the output signal of aforementioned operational part based on aforementioned a plurality of test sections is read the height of aforementioned sample from aforementioned storage part.
17. optical displacement meters according to claim 1,
It has moving part, and this moving part makes aforementioned optical displacement meter move abreast with respect to aforementioned reference field,
Aforementioned operational part, in aforementioned moving part makes process that aforementioned optical displacement meter moves, carries out computing to the height of aforementioned sample.
18. 1 kinds of optical displacement meters, it has:
The 1st light source, the 1st light that its irradiation comprises a plurality of wavelength;
The 1st object lens, its aforementioned the 1st light that aforementioned the 1st light source is irradiated is to sample irradiation, so that each in aforementioned a plurality of wavelength, the diverse location focus on optical axis;
The 1st separation unit, it is to carrying out separation from the 2nd light by aforementioned the 1st object lens in one of aforementioned sample surperficial reflected light, and ejaculation the 3rd light;
The 1st optical element, its ejaculation makes aforementioned the 3rd light that aforementioned the 1st separation unit penetrates produce aberration and astigmatism and the 4th light that obtains;
A plurality of the 1st test sections, its aforementioned the 4th light that aforementioned the 1st optical element is penetrated detects;
The 2nd light source, the 5th light that its irradiation comprises a plurality of wavelength;
The 2nd object lens, its aforementioned the 5th light that aforementioned the 2nd light source is irradiated is to sample irradiation, so that each in aforementioned a plurality of wavelength, the diverse location focus on optical axis;
The 2nd separation unit, it carries out separation to the 6th light by aforementioned the 2nd object lens in another the surperficial reflected light from aforementioned sample, and penetrates the 7th light;
The 2nd optical element, its ejaculation makes aforementioned the 7th light that aforementioned the 2nd separation unit penetrates produce aberration and astigmatism and the 8th light that obtains;
A plurality of the 2nd test sections, its aforementioned the 8th light that aforementioned the 2nd optical element is penetrated detects; And
Operational part, it is based on detected aforementioned the 4th light of aforementioned a plurality of the 1st test section, to the 1st of an aforementioned face side of the aforementioned sample from reference plane the, highly carry out computing, and based on detected aforementioned the 8th light of aforementioned a plurality of the 2nd test section, to the 2nd of aforementioned another face side of the aforementioned sample from aforementioned reference plane the, highly carry out computing, then based on aforementioned the 1st height and aforementioned the 2nd height, the thickness of aforementioned sample is carried out to computing.
19. 1 kinds of optical displacement operational methods,
From light source, irradiate the 1st light that comprises a plurality of wavelength,
Aforementioned the 1st light that aforementioned light source is irradiated is from object lens to sample irradiation, so that each in aforementioned a plurality of wavelength, the diverse location focus on optical axis,
Utilize separation unit, the 2nd light by aforementioned object lens in the reflected light from aforementioned sample carried out to separation, and penetrate the 3rd light,
From optical element, penetrate the 4th light make aforementioned the 3rd light that aforementioned separation unit penetrates produce aberration and astigmatism and to obtain,
Aforementioned the 4th light that utilizes a plurality of test sections to penetrate aforementioned optical element detects,
Based on detected aforementioned the 4th light of aforementioned a plurality of test sections, utilize operational part to carry out computing to the height of the aforementioned sample from reference plane.
20. 1 kinds of optical displacement operational methods,
From the 1st light source, irradiate the 1st light that comprises a plurality of wavelength,
Aforementioned the 1st light that aforementioned the 1st light source is irradiated is from the 1st object lens to sample irradiation, so that each in aforementioned a plurality of wavelength, the diverse location focus on optical axis,
Utilize the 1st separation unit, to carrying out separation from the 2nd light by aforementioned the 1st object lens in one of aforementioned sample surperficial reflected light, and penetrate the 3rd light,
From the 1st optical element, penetrate the 4th light make aforementioned the 3rd light that aforementioned the 1st separation unit penetrates produce aberration and astigmatism and to obtain,
Aforementioned the 4th light that utilizes a plurality of the 1st test sections to penetrate aforementioned the 1st optical element detects,
From the 2nd light source, irradiate the 5th light that comprises a plurality of wavelength,
Aforementioned the 5th light that aforementioned the 2nd light source is irradiated is from the 2nd object lens to sample irradiation, so that each in aforementioned a plurality of wavelength, the diverse location focus on optical axis,
Utilize the 2nd separation unit, the 6th light by aforementioned the 2nd object lens in another the surperficial reflected light from aforementioned sample carried out to separation, and penetrate the 7th light,
From the 2nd optical element, penetrate the 8th light make aforementioned the 7th light that aforementioned the 2nd separation unit penetrates produce aberration and astigmatism and to obtain,
Aforementioned the 8th light that utilizes a plurality of the 2nd test sections to penetrate aforementioned the 2nd optical element detects,
Based on detected aforementioned the 4th light of aforementioned a plurality of the 1st test section, utilize operational part highly to carry out computing to the 1st of an aforementioned face side of the aforementioned sample from reference plane the, based on detected aforementioned the 8th light of aforementioned a plurality of the 2nd test section, utilize aforementioned operational part highly to carry out computing to the 2nd of aforementioned another face side of the aforementioned sample from aforementioned reference plane the, based on aforementioned the 1st height and aforementioned the 2nd height, utilize aforementioned operational part to carry out computing to the thickness of aforementioned sample.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
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| JP2012187670A JP5674050B2 (en) | 2012-08-28 | 2012-08-28 | Optical displacement meter |
| JP2012-187670 | 2012-08-28 |
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| Publication Number | Publication Date |
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| CN103673888A true CN103673888A (en) | 2014-03-26 |
| CN103673888B CN103673888B (en) | 2016-09-07 |
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| CN201310375884.4A Active CN103673888B (en) | 2012-08-28 | 2013-08-26 | Optical displacement meter and optical displacement operation method |
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| JP (1) | JP5674050B2 (en) |
| CN (1) | CN103673888B (en) |
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Also Published As
| Publication number | Publication date |
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| MY167829A (en) | 2018-09-26 |
| JP2014044161A (en) | 2014-03-13 |
| JP5674050B2 (en) | 2015-02-18 |
| CN103673888B (en) | 2016-09-07 |
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