MY156815A - Component having an overlapping laser track; method for producing such a component - Google Patents

Component having an overlapping laser track; method for producing such a component

Info

Publication number
MY156815A
MY156815A MYPI2011004671A MYPI2011004671A MY156815A MY 156815 A MY156815 A MY 156815A MY PI2011004671 A MYPI2011004671 A MY PI2011004671A MY PI2011004671 A MYPI2011004671 A MY PI2011004671A MY 156815 A MY156815 A MY 156815A
Authority
MY
Malaysia
Prior art keywords
component
laser
fracture
track
laser track
Prior art date
Application number
MYPI2011004671A
Other languages
English (en)
Inventor
Reiss Kunibert
Karl Thomas
Kluge Dr Claus Peter
Original Assignee
Ceramtec Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ceramtec Gmbh filed Critical Ceramtec Gmbh
Publication of MY156815A publication Critical patent/MY156815A/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/40Removing material taking account of the properties of the material involved
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/362Laser etching
    • B23K26/364Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0626Energy control of the laser beam
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/0222Scoring using a focussed radiation beam, e.g. laser
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/08Severing cooled glass by fusing, i.e. by melting through the glass
    • C03B33/082Severing cooled glass by fusing, i.e. by melting through the glass using a focussed radiation beam, e.g. laser
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P54/00Cutting or separating of wafers, substrates or parts of devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/36Electric or electronic devices
    • B23K2101/40Semiconductor devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic materials other than metals or composite materials
    • B23K2103/52Ceramics
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic materials other than metals or composite materials
    • B23K2103/56Inorganic materials other than metals or composite materials being semiconducting
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/15Sheet, web, or layer weakened to permit separation through thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Laser Beam Processing (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Golf Clubs (AREA)
  • Conveying And Assembling Of Building Elements In Situ (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Producing Shaped Articles From Materials (AREA)
MYPI2011004671A 2009-03-31 2010-03-26 Component having an overlapping laser track; method for producing such a component MY156815A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009015087 2009-03-31

Publications (1)

Publication Number Publication Date
MY156815A true MY156815A (en) 2016-03-31

Family

ID=42229244

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2011004671A MY156815A (en) 2009-03-31 2010-03-26 Component having an overlapping laser track; method for producing such a component

Country Status (18)

Country Link
US (1) US8822003B2 (https=)
EP (1) EP2414132B1 (https=)
JP (1) JP5661733B2 (https=)
KR (1) KR20120004498A (https=)
CN (1) CN102448659B (https=)
BR (1) BRPI1012662A2 (https=)
CA (1) CA2757229A1 (https=)
DE (1) DE102010003314A1 (https=)
DK (1) DK2414132T3 (https=)
ES (1) ES2625308T3 (https=)
IL (1) IL215452A0 (https=)
MX (1) MX2011010284A (https=)
MY (1) MY156815A (https=)
PT (1) PT2414132T (https=)
RU (1) RU2542056C2 (https=)
SG (1) SG174996A1 (https=)
TW (1) TW201039958A (https=)
WO (1) WO2010112412A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102848084B (zh) * 2012-09-28 2015-09-16 合肥彩虹蓝光科技有限公司 一种具有不同切割深度的发光原件切割方法
US20150364374A1 (en) * 2014-06-12 2015-12-17 Toshiba Corporation Semiconductor Device Die Singulation by Discontinuous Laser Scribe and Break
EP3023397A1 (de) * 2014-11-24 2016-05-25 Manz AG Verfahren zum Abtrennen eines Teils eines spröden Materials
CN106932944B (zh) 2017-04-28 2020-06-30 上海天马有机发光显示技术有限公司 一种显示面板及其制作方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3583279B2 (ja) * 1998-01-13 2004-11-04 三菱電機株式会社 穴あけ加工方法
US20050263854A1 (en) * 1998-10-23 2005-12-01 Shelton Bryan S Thick laser-scribed GaN-on-sapphire optoelectronic devices
JP2003002677A (ja) * 2001-06-22 2003-01-08 Seiko Epson Corp レーザ割断用支持テーブル、レーザ割断装置、レーザ割断方法、及び、液晶パネルの製造方法
JP2003320466A (ja) * 2002-05-07 2003-11-11 Disco Abrasive Syst Ltd レーザビームを使用した加工機
JP2004063803A (ja) * 2002-07-29 2004-02-26 Ngk Spark Plug Co Ltd プリント配線基板の製造方法、プリント配線基板製造用金属板、連結プリント配線基板
JP2005209719A (ja) * 2004-01-20 2005-08-04 Disco Abrasive Syst Ltd 半導体ウエーハの加工方法
JP3908236B2 (ja) 2004-04-27 2007-04-25 株式会社日本製鋼所 ガラスの切断方法及びその装置
JP2006319198A (ja) * 2005-05-13 2006-11-24 Disco Abrasive Syst Ltd ウエーハのレーザー加工方法およびレーザー加工装置
CN101341100A (zh) * 2005-12-29 2009-01-07 H2B光电技术有限公司 用于分离加工脆性材料构件的装置
TWI449137B (zh) * 2006-03-23 2014-08-11 製陶技術創新製陶工程股份公司 構件或電路用的攜帶體
WO2008062496A1 (en) * 2006-10-31 2008-05-29 Kyocera Corporation Ceramic member, method of forming groove in ceramic member, and substrate for electronic part
JP2008198905A (ja) * 2007-02-15 2008-08-28 Hitachi Metals Ltd セラミックス基板及びセラミックス回路基板の製造方法並びに集合基板と半導体モジュール
DE102008043539A1 (de) * 2007-11-07 2009-05-14 Ceramtec Ag Verfahren zum Laserritzen von spröden Bauteilen
JP5230240B2 (ja) * 2008-04-04 2013-07-10 芝浦メカトロニクス株式会社 レーザ加工装置

Also Published As

Publication number Publication date
RU2542056C2 (ru) 2015-02-20
WO2010112412A1 (de) 2010-10-07
MX2011010284A (es) 2011-12-08
US20120015129A1 (en) 2012-01-19
CA2757229A1 (en) 2010-10-07
JP5661733B2 (ja) 2015-01-28
SG174996A1 (en) 2011-11-28
RU2011143585A (ru) 2013-05-10
IL215452A0 (en) 2011-12-29
TW201039958A (en) 2010-11-16
DE102010003314A1 (de) 2010-10-07
DK2414132T3 (en) 2017-06-26
ES2625308T3 (es) 2017-07-19
CN102448659B (zh) 2015-10-21
BRPI1012662A2 (pt) 2016-04-05
CN102448659A (zh) 2012-05-09
JP2012521895A (ja) 2012-09-20
KR20120004498A (ko) 2012-01-12
PT2414132T (pt) 2017-04-24
EP2414132B1 (de) 2017-03-22
US8822003B2 (en) 2014-09-02
EP2414132A1 (de) 2012-02-08

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