MY137307A - Vacuum module (variants thereof) and system of modules for applying coatings to a substrate - Google Patents

Vacuum module (variants thereof) and system of modules for applying coatings to a substrate

Info

Publication number
MY137307A
MY137307A MYPI20013177A MYPI20013177A MY137307A MY 137307 A MY137307 A MY 137307A MY PI20013177 A MYPI20013177 A MY PI20013177A MY PI20013177 A MYPI20013177 A MY PI20013177A MY 137307 A MY137307 A MY 137307A
Authority
MY
Malaysia
Prior art keywords
substrate
applying coatings
modules
module
common
Prior art date
Application number
MYPI20013177A
Other languages
English (en)
Inventor
Shyrypau Uladzirnir
Leuchuk Mikalai
Khakhlou Aliaksandr
Maryshev Sergei
Original Assignee
Shyrypau Uladzirnir
Leuchuk Mikalai
Khakhlou Aliaksandr
Maryshev Sergei
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shyrypau Uladzirnir, Leuchuk Mikalai, Khakhlou Aliaksandr, Maryshev Sergei filed Critical Shyrypau Uladzirnir
Publication of MY137307A publication Critical patent/MY137307A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/46—Machines having sequentially arranged operating stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/01—Generalised techniques
    • H01J2209/012—Coating
    • H01J2209/015—Machines therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
MYPI20013177A 2000-07-05 2001-07-03 Vacuum module (variants thereof) and system of modules for applying coatings to a substrate MY137307A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EA200000807A EA003148B1 (ru) 2000-07-05 2000-07-05 Вакуумный модуль (его варианты) и система модулей для нанесения покрытий на подложку

Publications (1)

Publication Number Publication Date
MY137307A true MY137307A (en) 2009-01-30

Family

ID=8161557

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20013177A MY137307A (en) 2000-07-05 2001-07-03 Vacuum module (variants thereof) and system of modules for applying coatings to a substrate

Country Status (7)

Country Link
JP (1) JP4766821B2 (enExample)
KR (1) KR100737035B1 (enExample)
CN (1) CN100348773C (enExample)
AU (1) AU6896001A (enExample)
EA (1) EA003148B1 (enExample)
MY (1) MY137307A (enExample)
WO (1) WO2002008484A2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100914087B1 (ko) 2003-05-13 2009-08-27 어플라이드 머티어리얼스, 인코포레이티드 처리 챔버의 개구를 밀봉하기 위한 방법 및 장치
EA200501183A1 (ru) * 2005-07-18 2006-12-29 Владимир Яковлевич ШИРИПОВ Вакуумный кластер для нанесения покрытий на подложку (варианты)
EA009303B1 (ru) * 2006-05-15 2007-12-28 Владимир Яковлевич ШИРИПОВ Способ нанесения пленок нитрида кремния в вакууме (варианты)
EA034967B1 (ru) 2018-05-04 2020-04-13 Общество С Ограниченной Ответственностью "Изовак Технологии" Технологическая линия для формирования тонкопленочных покрытий в вакууме (варианты)
CN110592550A (zh) * 2019-10-28 2019-12-20 上海映晓电子科技有限公司 一种磁控溅射和电子束蒸镀双腔镀膜装置及其使用方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2008156B (en) * 1977-11-19 1982-06-23 Hunt C J L Vacuum metallising of hollow articles
US5489369A (en) * 1993-10-25 1996-02-06 Viratec Thin Films, Inc. Method and apparatus for thin film coating an article
KR100318724B1 (ko) * 1996-04-18 2002-04-22 니시무로 타이죠 음극선관의제조방법및그장치

Also Published As

Publication number Publication date
EA003148B1 (ru) 2003-02-27
JP2004504495A (ja) 2004-02-12
WO2002008484A3 (en) 2002-07-04
KR20030024771A (ko) 2003-03-26
CN100348773C (zh) 2007-11-14
WO2002008484A2 (en) 2002-01-31
KR100737035B1 (ko) 2007-07-09
AU6896001A (en) 2002-02-05
JP4766821B2 (ja) 2011-09-07
EA200000807A1 (ru) 2002-02-28
CN1617947A (zh) 2005-05-18

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