MX339283B - Medidor de flujo térmico. - Google Patents
Medidor de flujo térmico.Info
- Publication number
- MX339283B MX339283B MX2014015384A MX2014015384A MX339283B MX 339283 B MX339283 B MX 339283B MX 2014015384 A MX2014015384 A MX 2014015384A MX 2014015384 A MX2014015384 A MX 2014015384A MX 339283 B MX339283 B MX 339283B
- Authority
- MX
- Mexico
- Prior art keywords
- flow meter
- thermal flow
- molding step
- circuit package
- resin
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/14—Casings, e.g. of special material
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Abstract
La presente invención se hizo se hizo para mejorar la precisión de medición de un medidor de flujo térmico. En el medidor de flujo térmico de acuerdo con la invención, un paquete de circuitos (400) que mide una velocidad de flujo es moldeado en un primer proceso de moldeo de resina. En un segundo proceso de moldeo de resina, un alojamiento (302) que tiene una canaleta de entrada (351), una canaleta de pasaje de derivación en el lado frontal (332), una canaleta de salida (353), y similares, se forman mediante moldeo de resina, y una superficie circunferencial exterior del paquete de circuitos (400) producido en el primer proceso de moldeo de resina para fijar el paquete de circuitos (400) al alojamiento (302).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2012/065317 WO2013186910A1 (ja) | 2012-06-15 | 2012-06-15 | 熱式流量計 |
Publications (2)
Publication Number | Publication Date |
---|---|
MX2014015384A MX2014015384A (es) | 2015-07-14 |
MX339283B true MX339283B (es) | 2016-05-10 |
Family
ID=49757772
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2014015384A MX339283B (es) | 2012-06-15 | 2012-06-15 | Medidor de flujo térmico. |
Country Status (6)
Country | Link |
---|---|
US (4) | US9784605B2 (es) |
JP (1) | JP6014665B2 (es) |
CN (4) | CN104364615B (es) |
DE (1) | DE112012006520T5 (es) |
MX (1) | MX339283B (es) |
WO (1) | WO2013186910A1 (es) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5944222B2 (ja) * | 2012-05-01 | 2016-07-05 | ヤンマー株式会社 | エンジン回転数制御装置 |
JP5884769B2 (ja) | 2013-05-09 | 2016-03-15 | 株式会社デンソー | 空気流量計測装置 |
JP2016090413A (ja) | 2014-11-06 | 2016-05-23 | 日立オートモティブシステムズ株式会社 | 熱式空気流量計 |
JP6154966B2 (ja) * | 2014-12-08 | 2017-06-28 | 日立オートモティブシステムズ株式会社 | 物理量検出装置 |
DE102017206226A1 (de) * | 2017-04-11 | 2018-10-11 | Robert Bosch Gmbh | Sensor zur Erfassung mindestens einer Eigenschaft eines fluiden Mediums |
DE102017112622A1 (de) * | 2017-06-08 | 2018-12-13 | Endress + Hauser Flowtec Ag | Thermisches Durchflussmessgerät |
JP6965358B2 (ja) * | 2017-09-05 | 2021-11-10 | 日立Astemo株式会社 | 熱式流量計 |
DE112019000696T5 (de) | 2018-02-07 | 2020-10-15 | Denso Corporation | Vorrichtung zur Messung einer physikalischen Größe |
JP6838227B2 (ja) * | 2018-03-09 | 2021-03-03 | 日立Astemo株式会社 | 物理量測定装置 |
CN108643987A (zh) * | 2018-04-25 | 2018-10-12 | 天津天传电子有限公司 | 发动机机油断流检测开关及温度检测一体化装置 |
US11927466B2 (en) * | 2018-11-29 | 2024-03-12 | Hitachi Astemo, Ltd. | Physical quantity measurement device including a thermal flow rate sensor with a ventilation flow path |
JP6775629B2 (ja) * | 2019-04-23 | 2020-10-28 | 日立オートモティブシステムズ株式会社 | 物理量検出素子 |
JP7115446B2 (ja) * | 2019-09-04 | 2022-08-09 | 株式会社デンソー | 空気流量測定装置 |
EP3957868A1 (de) * | 2020-08-20 | 2022-02-23 | Precision Nanosensors Inc | Kolben-zylinder-einheit mit kolbenpositionserfassungseinheit und kollimator |
Family Cites Families (36)
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JPH06265384A (ja) * | 1993-03-15 | 1994-09-20 | Hitachi Ltd | 熱式空気流量計 |
JP3438843B2 (ja) * | 1995-06-14 | 2003-08-18 | 株式会社デンソー | 熱式流量計 |
JP3323745B2 (ja) * | 1996-07-25 | 2002-09-09 | 株式会社日立製作所 | 物理量検出装置の特性調整手段および発熱抵抗式空気流量装置 |
JP3019784B2 (ja) * | 1996-09-04 | 2000-03-13 | サンケン電気株式会社 | 流体の流れ検出装置 |
JP3328547B2 (ja) * | 1997-06-16 | 2002-09-24 | 株式会社日立製作所 | 熱式空気流量センサ |
JP2000208809A (ja) * | 1999-01-12 | 2000-07-28 | Oki Electric Ind Co Ltd | 光結合半導体装置 |
EP1193477A4 (en) * | 1999-06-24 | 2006-10-18 | Mitsui Mining & Smelting Co | FLOW DETECTOR, FLOWMETER AND FLOW SENSOR |
KR20010039993A (ko) * | 1999-10-06 | 2001-05-15 | 오카무라 가네오 | 유량 및 유속 측정장치 |
JP3577269B2 (ja) * | 2000-08-30 | 2004-10-13 | 株式会社日立製作所 | 熱式空気流量センサおよびその形成方法 |
JP3785319B2 (ja) | 2000-12-11 | 2006-06-14 | 株式会社日立製作所 | 流量計測装置 |
JP3787509B2 (ja) | 2001-09-03 | 2006-06-21 | 株式会社日立製作所 | 発熱抵抗式空気流量測定装置 |
GR1004106B (el) * | 2002-01-24 | 2003-01-13 | Εκεφε "Δημοκριτος" Ινστιτουτο Μικροηλεκτρονικης | Ολοκληρωμενοι θερμικοι αισθητηρες πυριτιου χαμηλης ισχυος και διαταξεις μικρο-ροης βασισμενοι στην χρηση τεχνολογιας κοιλοτητας αερα σφραγισμενης με μεμβρανη πορωδους πυριτιου ή τεχνολογιας μικρο-καναλιων |
JP2003254805A (ja) * | 2002-03-07 | 2003-09-10 | Hitachi Ltd | 熱式流量センサおよび光供給方法 |
US6708561B2 (en) * | 2002-04-19 | 2004-03-23 | Visteon Global Technologies, Inc. | Fluid flow meter having an improved sampling channel |
JP3888228B2 (ja) * | 2002-05-17 | 2007-02-28 | 株式会社デンソー | センサ装置 |
JP2004028631A (ja) * | 2002-06-21 | 2004-01-29 | Mitsubishi Electric Corp | 流量センサ |
US6826955B2 (en) * | 2002-09-20 | 2004-12-07 | Visteon Global Technologies, Inc. | Mass fluid flow sensor having an improved housing design |
JP4073324B2 (ja) * | 2003-01-24 | 2008-04-09 | 株式会社日立製作所 | 熱式流量測定装置 |
JP2005209882A (ja) * | 2004-01-22 | 2005-08-04 | Renesas Technology Corp | 半導体パッケージ及び半導体装置 |
JP2007024589A (ja) * | 2005-07-13 | 2007-02-01 | Hitachi Ltd | 気体流量計測装置 |
JP4845187B2 (ja) * | 2006-02-07 | 2011-12-28 | 株式会社山武 | センサのパッケージ構造及びこれを有するフローセンサ |
JP4979262B2 (ja) * | 2006-05-08 | 2012-07-18 | 日立オートモティブシステムズ株式会社 | 流量測定装置 |
JP4952428B2 (ja) * | 2007-08-01 | 2012-06-13 | 株式会社デンソー | センサ装置 |
JP2009270930A (ja) | 2008-05-07 | 2009-11-19 | Denso Corp | 熱式流量センサ |
JP5168091B2 (ja) * | 2008-11-05 | 2013-03-21 | 株式会社デンソー | 熱式フローセンサの製造方法及び熱式フローセンサ |
JP5049996B2 (ja) * | 2009-03-31 | 2012-10-17 | 日立オートモティブシステムズ株式会社 | 熱式流量測定装置 |
JP4929335B2 (ja) * | 2009-09-30 | 2012-05-09 | 日立オートモティブシステムズ株式会社 | 熱式流量測定装置 |
JP4827961B2 (ja) * | 2009-10-19 | 2011-11-30 | 三菱電機株式会社 | 流量測定装置 |
JP5208099B2 (ja) * | 2009-12-11 | 2013-06-12 | 日立オートモティブシステムズ株式会社 | 流量センサとその製造方法、及び流量センサモジュール |
JP5195819B2 (ja) | 2010-06-02 | 2013-05-15 | 株式会社デンソー | 空気流量測定装置 |
JP5256264B2 (ja) * | 2010-09-03 | 2013-08-07 | 日立オートモティブシステムズ株式会社 | 熱式空気流量センサ |
JP5496027B2 (ja) * | 2010-09-09 | 2014-05-21 | 日立オートモティブシステムズ株式会社 | 熱式空気流量計 |
CN102445246A (zh) * | 2010-09-30 | 2012-05-09 | 美新半导体(无锡)有限公司 | 热式质量流量传感器封装件及其制造方法 |
WO2012049742A1 (ja) * | 2010-10-13 | 2012-04-19 | 日立オートモティブシステムズ株式会社 | 流量センサおよびその製造方法並びに流量センサモジュールおよびその製造方法 |
JP5710538B2 (ja) * | 2012-04-06 | 2015-04-30 | 日立オートモティブシステムズ株式会社 | 流量センサ |
JP5916637B2 (ja) * | 2013-01-11 | 2016-05-11 | 日立オートモティブシステムズ株式会社 | 流量センサおよびその製造方法 |
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2012
- 2012-06-15 CN CN201280073984.5A patent/CN104364615B/zh active Active
- 2012-06-15 CN CN201710142630.6A patent/CN106959140B/zh active Active
- 2012-06-15 US US14/407,730 patent/US9784605B2/en active Active
- 2012-06-15 DE DE112012006520.4T patent/DE112012006520T5/de active Granted
- 2012-06-15 JP JP2014521073A patent/JP6014665B2/ja active Active
- 2012-06-15 MX MX2014015384A patent/MX339283B/es active IP Right Grant
- 2012-06-15 CN CN201710142628.9A patent/CN107063369B/zh active Active
- 2012-06-15 WO PCT/JP2012/065317 patent/WO2013186910A1/ja active Application Filing
- 2012-06-15 CN CN201710142275.2A patent/CN107063368B/zh active Active
-
2017
- 2017-09-06 US US15/696,860 patent/US10190897B2/en active Active
-
2019
- 2019-01-15 US US16/248,070 patent/US10655993B2/en active Active
-
2020
- 2020-04-15 US US16/848,978 patent/US10935403B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JPWO2013186910A1 (ja) | 2016-02-01 |
CN107063369A (zh) | 2017-08-18 |
CN107063368B (zh) | 2020-06-16 |
US10935403B2 (en) | 2021-03-02 |
US9784605B2 (en) | 2017-10-10 |
US10655993B2 (en) | 2020-05-19 |
CN104364615B (zh) | 2017-04-05 |
CN106959140A (zh) | 2017-07-18 |
CN104364615A (zh) | 2015-02-18 |
CN107063369B (zh) | 2021-11-02 |
WO2013186910A1 (ja) | 2013-12-19 |
CN107063368A (zh) | 2017-08-18 |
DE112012006520T5 (de) | 2015-03-05 |
US20190162569A1 (en) | 2019-05-30 |
CN106959140B (zh) | 2021-11-16 |
US20170363455A1 (en) | 2017-12-21 |
US20200240822A1 (en) | 2020-07-30 |
JP6014665B2 (ja) | 2016-10-25 |
US10190897B2 (en) | 2019-01-29 |
MX2014015384A (es) | 2015-07-14 |
US20150122012A1 (en) | 2015-05-07 |
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Legal Events
Date | Code | Title | Description |
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HH | Correction or change in general | ||
FG | Grant or registration |