MX338452B - Objetivo para vaporizacion por chispa con limitacion fisica de la propagacion de la chispa. - Google Patents
Objetivo para vaporizacion por chispa con limitacion fisica de la propagacion de la chispa.Info
- Publication number
- MX338452B MX338452B MX2012012055A MX2012012055A MX338452B MX 338452 B MX338452 B MX 338452B MX 2012012055 A MX2012012055 A MX 2012012055A MX 2012012055 A MX2012012055 A MX 2012012055A MX 338452 B MX338452 B MX 338452B
- Authority
- MX
- Mexico
- Prior art keywords
- spark
- target
- propogation
- vaporization
- physical limiting
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32614—Consumable cathodes for arc discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3444—Associated circuits
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Coating By Spraying Or Casting (AREA)
Abstract
La presente invención se refiere a un objetivo para una fuente ARC que tiene un primer cuerpo (3) compuesto de un material que se vaporizará, el cual comprende esencialmente una superficie que está destinada a vaporizarse en un plano, donde la superficie rodea un área central en este plano, que se caracteriza porque un segundo cuerpo (7) se proporciona en el área central, cuyo segundo cuerpo (7) está preferiblemente en la forma de un disco y está aislado eléctricamente del primer cuerpo (3), para que el segundo cuerpo (7) no pueda proporcionar esencialmente los electrones para el mantenimiento de una chispa.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US32492910P | 2010-04-16 | 2010-04-16 | |
DE102010020737A DE102010020737A1 (de) | 2010-05-17 | 2010-05-17 | Target für Funkenverdampfung mit räumlicher Begrenzung der Ausbreitung des Funkens |
PCT/EP2011/000057 WO2011128004A1 (de) | 2010-04-16 | 2011-01-10 | Target für funkenverdampfung mit räumlicher begrenzung der ausbreitung des funkens |
Publications (2)
Publication Number | Publication Date |
---|---|
MX2012012055A MX2012012055A (es) | 2012-12-17 |
MX338452B true MX338452B (es) | 2016-04-18 |
Family
ID=43735926
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2012012055A MX338452B (es) | 2010-04-16 | 2011-01-10 | Objetivo para vaporizacion por chispa con limitacion fisica de la propagacion de la chispa. |
Country Status (12)
Country | Link |
---|---|
US (1) | US9657389B2 (es) |
EP (1) | EP2559050B1 (es) |
JP (1) | JP5757991B2 (es) |
KR (1) | KR101784540B1 (es) |
CN (1) | CN102822938B (es) |
BR (1) | BR112012026552B1 (es) |
CA (1) | CA2796394C (es) |
DE (1) | DE102010020737A1 (es) |
MX (1) | MX338452B (es) |
RU (1) | RU2562909C2 (es) |
TW (1) | TWI544101B (es) |
WO (1) | WO2011128004A1 (es) |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62218562A (ja) * | 1986-03-19 | 1987-09-25 | Fujitsu Ltd | スパツタリング装置 |
US5298136A (en) | 1987-08-18 | 1994-03-29 | Regents Of The University Of Minnesota | Steered arc coating with thick targets |
DE4401986A1 (de) | 1994-01-25 | 1995-07-27 | Dresden Vakuumtech Gmbh | Verfahren zum Betreiben eines Vakuumlichtbogenverdampfers und Stromversorgungseinrichtung dafür |
CH689558A5 (de) * | 1995-07-11 | 1999-06-15 | Erich Bergmann | Bedampfungsanlage und Verdampfereinheit. |
US6338781B1 (en) | 1996-12-21 | 2002-01-15 | Singulus Technologies Ag | Magnetron sputtering cathode with magnet disposed between two yoke plates |
WO2000016373A1 (de) | 1998-09-14 | 2000-03-23 | Unaxis Trading Ag | Targetanordnung für eine arc-verdampfungs-kammer |
CA2268659C (en) * | 1999-04-12 | 2008-12-30 | Vladimir I. Gorokhovsky | Rectangular cathodic arc source and method of steering an arc spot |
US6783638B2 (en) * | 2001-09-07 | 2004-08-31 | Sputtered Films, Inc. | Flat magnetron |
ATE367232T1 (de) * | 2002-03-23 | 2007-08-15 | Metal Nanopowders Ltd | Verfahren zur erzeugung von pulver |
JP2005126737A (ja) * | 2003-10-21 | 2005-05-19 | Riken Corp | アーク式蒸発源 |
US20060049041A1 (en) * | 2004-08-20 | 2006-03-09 | Jds Uniphase Corporation | Anode for sputter coating |
EP2466614A3 (de) * | 2006-05-16 | 2013-05-22 | Oerlikon Trading AG, Trübbach | Arcquelle und Magnetanordnung |
US20100018857A1 (en) * | 2008-07-23 | 2010-01-28 | Seagate Technology Llc | Sputter cathode apparatus allowing thick magnetic targets |
-
2010
- 2010-05-17 DE DE102010020737A patent/DE102010020737A1/de not_active Withdrawn
-
2011
- 2011-01-10 WO PCT/EP2011/000057 patent/WO2011128004A1/de active Application Filing
- 2011-01-10 CN CN201180019323.XA patent/CN102822938B/zh active Active
- 2011-01-10 JP JP2013504138A patent/JP5757991B2/ja active Active
- 2011-01-10 EP EP11701194.0A patent/EP2559050B1/de active Active
- 2011-01-10 BR BR112012026552-0A patent/BR112012026552B1/pt active IP Right Grant
- 2011-01-10 CA CA2796394A patent/CA2796394C/en active Active
- 2011-01-10 KR KR1020127026973A patent/KR101784540B1/ko active IP Right Grant
- 2011-01-10 US US13/641,499 patent/US9657389B2/en active Active
- 2011-01-10 MX MX2012012055A patent/MX338452B/es active IP Right Grant
- 2011-01-10 RU RU2012148715/07A patent/RU2562909C2/ru active
- 2011-04-14 TW TW100112896A patent/TWI544101B/zh active
Also Published As
Publication number | Publication date |
---|---|
RU2562909C2 (ru) | 2015-09-10 |
TW201207141A (en) | 2012-02-16 |
JP2013525600A (ja) | 2013-06-20 |
TWI544101B (zh) | 2016-08-01 |
MX2012012055A (es) | 2012-12-17 |
CN102822938A (zh) | 2012-12-12 |
EP2559050B1 (de) | 2017-06-07 |
JP5757991B2 (ja) | 2015-08-05 |
EP2559050A1 (de) | 2013-02-20 |
US20130126348A1 (en) | 2013-05-23 |
BR112012026552B1 (pt) | 2022-01-11 |
KR20130064045A (ko) | 2013-06-17 |
CA2796394C (en) | 2019-07-09 |
BR112012026552A2 (pt) | 2016-07-12 |
DE102010020737A1 (de) | 2011-11-17 |
US9657389B2 (en) | 2017-05-23 |
RU2012148715A (ru) | 2014-05-27 |
CN102822938B (zh) | 2016-05-04 |
CA2796394A1 (en) | 2011-10-20 |
KR101784540B1 (ko) | 2017-10-11 |
WO2011128004A1 (de) | 2011-10-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
HC | Change of company name or juridical status |
Owner name: SOLENIS TECHNOLOGIES CAYMAN, L.P. |
|
FG | Grant or registration |