LT3735332T - Tiesioginio lazerio interferencijos struktūrų sudarymo optinis įrenginys - Google Patents

Tiesioginio lazerio interferencijos struktūrų sudarymo optinis įrenginys

Info

Publication number
LT3735332T
LT3735332T LTEPPCT/EP2018/081895T LTEP2018081895T LT3735332T LT 3735332 T LT3735332 T LT 3735332T LT EP2018081895 T LTEP2018081895 T LT EP2018081895T LT 3735332 T LT3735332 T LT 3735332T
Authority
LT
Lithuania
Prior art keywords
optical arrangement
laser interference
direct laser
interference structuring
structuring
Prior art date
Application number
LTEPPCT/EP2018/081895T
Other languages
English (en)
Inventor
Mikhael El-Khoury
Andrés Fabián LASAGNI
Sabri Alamri
Tim Kunze
Bogdan Voisiat
Original Assignee
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. filed Critical Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Publication of LT3735332T publication Critical patent/LT3735332T/lt

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/355—Texturing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
    • G02B6/02133—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
  • Optical Elements Other Than Lenses (AREA)
LTEPPCT/EP2018/081895T 2018-01-03 2018-11-20 Tiesioginio lazerio interferencijos struktūrų sudarymo optinis įrenginys LT3735332T (lt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018200036.0A DE102018200036B3 (de) 2018-01-03 2018-01-03 Optische Anordnung zur direkten Laserinterferenzstrukturierung
PCT/EP2018/081895 WO2019134769A1 (de) 2018-01-03 2018-11-20 Optische anordnung zur direkten laserinterferenzstrukturierung

Publications (1)

Publication Number Publication Date
LT3735332T true LT3735332T (lt) 2022-02-10

Family

ID=64402224

Family Applications (1)

Application Number Title Priority Date Filing Date
LTEPPCT/EP2018/081895T LT3735332T (lt) 2018-01-03 2018-11-20 Tiesioginio lazerio interferencijos struktūrų sudarymo optinis įrenginys

Country Status (8)

Country Link
US (1) US11370061B2 (lt)
EP (1) EP3735332B1 (lt)
JP (1) JP7116174B2 (lt)
KR (1) KR102539160B1 (lt)
DE (1) DE102018200036B3 (lt)
ES (1) ES2904663T3 (lt)
LT (1) LT3735332T (lt)
WO (1) WO2019134769A1 (lt)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018204250B4 (de) * 2018-03-20 2023-10-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Laserstrahlschneiden von Werkstücken
DE102018212495B3 (de) 2018-07-26 2019-12-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Anordnung zur Erkennung des Vorhandenseins von Pathogenen
CN111457843B (zh) * 2019-04-26 2021-07-30 上海微电子装备（集团）股份有限公司 位移测量装置、位移测量方法及光刻设备
DE102019206179B4 (de) 2019-04-30 2023-06-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Anordnung zur Modifizierung von Oberflächen metallischer Bauteile
DE102019208106B3 (de) * 2019-06-04 2020-09-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Anordnung zur Überwachung von Laserstrukturierungsprozessen, die an Oberflächen von Bauteilen durchgeführt werden
DE102020205849A1 (de) 2020-05-08 2021-11-11 Technische Universität Dresden Anordnung optischer Elemente für die Ausbildung von Strukturmustern
WO2022167111A1 (de) 2021-02-05 2022-08-11 Werner Kirsch Verfahren zur herstellung von hochstromkondensatoren durch lasertechnik
DE102021201655A1 (de) 2021-02-22 2022-08-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Bauelement mit einer Oberfläche, die von einem Partikel enthaltenden Gasstrom angeströmt oder umströmt und mit der ein Anhaften von Partikeln verhindert oder reduziert wird sowie ein Herstellungsverfahren
CN112846546B (zh) * 2021-03-10 2022-04-26 武汉华工激光工程有限责任公司 一种激光切割系统
CN113654656B (zh) * 2021-10-18 2022-02-11 之江实验室 一种基于三光束干涉的光束漂移检测装置与方法
WO2023095198A1 (ja) * 2021-11-24 2023-06-01 株式会社ニコン 加工装置及び加工方法
DE102022100262A1 (de) 2022-01-07 2023-07-13 Gebr. Heller Maschinenfabrik Gmbh Beschichtungsverfahren und beschichtetes Bauteil
WO2023218580A1 (ja) * 2022-05-11 2023-11-16 株式会社ニコン 加工光学系、加工装置及び加工方法
DE102023102170A1 (de) 2023-01-30 2024-08-01 Trumpf Laser Gmbh Vorrichtung und Verfahren zum Bearbeiten eines Werkstücks
WO2024160647A1 (de) 2023-01-30 2024-08-08 Trumpf Laser Gmbh Vorrichtung und verfahren zum bearbeiten eines werkstücks
DE102023201553A1 (de) 2023-02-22 2024-08-22 3D-Micromac Ag Verfahren und System zur Herstellung mikroelektronischer Komponenten mit Schichtaufbau

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1548703B2 (de) * 1966-07-16 1971-04-15 Ernst Leitz Gmbh, 6330 Wetzlar Fotoelektrischer schrittgeber fuer vierphasen signale
US3488104A (en) * 1966-09-12 1970-01-06 Fairchild Camera Instr Co Dual focal plane microscope
CH471368A (de) * 1968-01-25 1969-04-15 Bbc Brown Boveri & Cie Verfahren und Einrichtung zur interferometrischen Messung von mehreren Längen mit monochromatischen Lichtbündeln
JP2002196502A (ja) 1991-03-22 2002-07-12 Hitachi Ltd 露光方法
EP0668519A1 (en) * 1994-02-18 1995-08-23 AT&T Corp. Spatially-varying distributed bragg-reflectors in optical media
US6549309B1 (en) 1998-02-10 2003-04-15 Illinois Tool Works Inc. Holography apparatus, method and product
JP3201375B2 (ja) 1999-02-22 2001-08-20 日本電気株式会社 基板表面粗化方法および基板表面粗化装置ならびに印刷配線板の製造方法および印刷配線板の製造装置
US6853772B2 (en) 2003-05-13 2005-02-08 3M Innovative Properties Company Fiber grating writing interferometer with continuous wavelength tuning and chirp capability
GB2442920B (en) 2005-08-16 2010-07-14 Tokyo Seimitsu Co Ltd Laser distance measuring apparatus
JP2007110064A (ja) * 2005-09-14 2007-04-26 Ishikawajima Harima Heavy Ind Co Ltd レーザアニール方法及び装置
US20080083886A1 (en) * 2006-09-14 2008-04-10 3M Innovative Properties Company Optical system suitable for processing multiphoton curable photoreactive compositions
DE102007033124B4 (de) * 2007-07-16 2012-12-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur optischen Detektion von Substanzen in einem flüssigen oder gasförmigen Medium
DE102008011527B4 (de) * 2008-02-28 2015-05-21 Leica Instruments (Singapore) Pte. Ltd. Beleuchtungseinrichtung für ein Mikroskop
DE102009057566A1 (de) * 2009-12-09 2011-06-16 Osram Opto Semiconductors Gmbh Vorrichtung für ein Laserabhebeverfahren und Laserabhebeverfahren
US8405836B2 (en) * 2010-03-19 2013-03-26 Interfiber Analysis, LLC System and method for measuring an optical fiber
US9164397B2 (en) * 2010-08-03 2015-10-20 Kla-Tencor Corporation Optics symmetrization for metrology
LT5833B (lt) * 2010-09-16 2012-05-25 Valstybinis mokslinių tyrimų institutas Fizinių ir technologijos mokslų centras Būdas periodinėms struktūroms ploname medžiagos sluoksnyje formuoti interferuojančiais lazerio pluoštais
DE102011011734B4 (de) 2011-02-10 2014-12-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung, Anordnung und Verfahren zur Interferenzstrukturierung von flächigen Proben
DE202011110732U1 (de) 2011-05-10 2015-12-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Anordnung zur Laserinterferenzstrukturierung einer Probe mit Strahlführung gleicher Weglänge
US9793673B2 (en) * 2011-06-13 2017-10-17 Kla-Tencor Corporation Semiconductor inspection and metrology system using laser pulse multiplier
DE102011119764B4 (de) 2011-11-24 2015-04-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zur Interferenzstrukturierung von flächigen Proben und deren Verwendung
DE102012011343B4 (de) 2012-06-11 2017-05-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur Interferenzstrukturierung von Proben
US8546762B1 (en) * 2012-06-29 2013-10-01 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Method and arrangement for carrying out time-domain measurements
DE102012217655B4 (de) * 2012-09-27 2014-05-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Bestimmen der relativen Zeitlage elektromagnetischer Pulse und Bestimmungsvorrichtung
CN103091772B (zh) 2013-01-21 2014-11-05 清华大学 制作任意反射波长超长光纤光栅的方法及装置
KR102302777B1 (ko) * 2014-08-05 2021-09-15 삼성디스플레이 주식회사 레이저 결정화 장치

Also Published As

Publication number Publication date
WO2019134769A1 (de) 2019-07-11
JP2021509864A (ja) 2021-04-08
ES2904663T3 (es) 2022-04-05
JP7116174B2 (ja) 2022-08-09
KR102539160B1 (ko) 2023-06-01
KR20200127976A (ko) 2020-11-11
US20200306879A1 (en) 2020-10-01
EP3735332B1 (de) 2021-11-10
DE102018200036B3 (de) 2019-01-17
US11370061B2 (en) 2022-06-28
EP3735332A1 (de) 2020-11-11

Similar Documents

Publication Publication Date Title
LT3735332T (lt) Tiesioginio lazerio interferencijos struktūrų sudarymo optinis įrenginys
EP3933456A4 (en) OPTICAL LENS
IL292456A (en) Optical assembly of a light guide
SG11202103846PA (en) Optical lens
EP3542209A4 (en) OPTICAL RECTIFIER
IL261489B (en) Optical piezograms for lidar vibrometry
EP3676694A4 (en) IMPROVED OPTICAL COMPONENT
EP3331109A4 (en) LASER LIGHT SOURCE DEVICE
EP3557293A4 (en) OPTICAL COMPONENT
EP3504945A4 (en) LASER GLASS FIBER TRAY
EP3511750A4 (en) HOLDER FOR AN OPTICAL FIBER
GB2577218B (en) Integrated WDM optical transceiver
GB2575939B (en) Reliable laser light source
EP3521867A4 (en) OPTICAL LENS
EP3597351A4 (en) LASER MACHINING DEVICE
EP3884328C0 (en) OPTICAL MICROSCOPY
SG11202001261SA (en) Method for optical waveguide fabrication
EP3506437A4 (en) LASER MODULE
GB201903925D0 (en) Underwater laser light source
LT3466598T (lt) Lazerinis optinis įtaisas, skirtas apdorojimui, paremtam lazerio interferencija, ypač skirtas paviršiaus struktūros formavimui lazeriu
EP3134758A4 (en) Lens assembly for optical imaging
GB201809011D0 (en) Optical interference analysis
EP3370312A4 (en) LASER LIGHT SOURCE MODULE
EP3767761A4 (en) LASER MODULE
EP3734221A4 (en) THREE-DIMENSIONAL LASER LIGHT SCANNING DEVICE