KR970052481A - Bottom electrode of semiconductor manufacturing apparatus - Google Patents
Bottom electrode of semiconductor manufacturing apparatus Download PDFInfo
- Publication number
- KR970052481A KR970052481A KR1019950066942A KR19950066942A KR970052481A KR 970052481 A KR970052481 A KR 970052481A KR 1019950066942 A KR1019950066942 A KR 1019950066942A KR 19950066942 A KR19950066942 A KR 19950066942A KR 970052481 A KR970052481 A KR 970052481A
- Authority
- KR
- South Korea
- Prior art keywords
- lower electrode
- manufacturing apparatus
- semiconductor manufacturing
- electrode
- insulating film
- Prior art date
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- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
본 발명은 반도체 제조장치의 하부전극에 관해 개시한다. 본 발명의 하부전극은 전극의 상부 전면에 절연막을 구비하는 반도체 제조장치의 하부전극에 있어서, 상기 전극의 상부 전면에 국부적으로만 절연막을 구비한다.The present invention relates to a lower electrode of a semiconductor manufacturing apparatus. The lower electrode of the present invention is a lower electrode of a semiconductor manufacturing apparatus having an insulating film on an upper front surface of an electrode, wherein the lower electrode includes an insulating film only locally on an upper front surface of the electrode.
따라서, 본 발명에 의한 하부전극을 사용하면, 웨이퍼가 띄는 많은 하전량은 상기 하분전극의 절연막이 형성되지 않은 부분을 통하여 방전할 수 있으므로, 웨이퍼와 하부전극간의 정전기력에 의한 인력을 제거할 수 있고 웨이퍼의 조작을 쉽게할 수 있다.Therefore, when the lower electrode according to the present invention is used, a large amount of charge on the wafer can be discharged through the portion where the insulating film of the lower electrode is not formed, thereby eliminating the attractive force due to the electrostatic force between the wafer and the lower electrode. The wafer can be easily manipulated.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제2도는 본 발명에 의한 반도체 제조장치의 하부전극의 단면도이다.2 is a cross-sectional view of the lower electrode of the semiconductor manufacturing apparatus according to the present invention.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950066942A KR970052481A (en) | 1995-12-29 | 1995-12-29 | Bottom electrode of semiconductor manufacturing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950066942A KR970052481A (en) | 1995-12-29 | 1995-12-29 | Bottom electrode of semiconductor manufacturing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970052481A true KR970052481A (en) | 1997-07-29 |
Family
ID=66637867
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950066942A KR970052481A (en) | 1995-12-29 | 1995-12-29 | Bottom electrode of semiconductor manufacturing apparatus |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970052481A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100599335B1 (en) * | 2004-02-06 | 2006-07-14 | (주)쿨빙고우성 | A cold table having with kitchen tool receipt means |
-
1995
- 1995-12-29 KR KR1019950066942A patent/KR970052481A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100599335B1 (en) * | 2004-02-06 | 2006-07-14 | (주)쿨빙고우성 | A cold table having with kitchen tool receipt means |
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