KR970053544A - Semiconductor device with dummy metal pattern - Google Patents
Semiconductor device with dummy metal pattern Download PDFInfo
- Publication number
- KR970053544A KR970053544A KR1019950057112A KR19950057112A KR970053544A KR 970053544 A KR970053544 A KR 970053544A KR 1019950057112 A KR1019950057112 A KR 1019950057112A KR 19950057112 A KR19950057112 A KR 19950057112A KR 970053544 A KR970053544 A KR 970053544A
- Authority
- KR
- South Korea
- Prior art keywords
- metal pattern
- semiconductor device
- dummy metal
- region
- pattern density
- Prior art date
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- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Abstract
본 발명은 더미메탈패턴이 형성된 반도체 장치에 관해 게시한다. 종래의 반도체 장치는 메탈패턴밀도가 낮은 영역은 과식각되는 현상이 발생할 수 있었다. 그러나 본 발명에서는 메탈패턴밀도가 낮은 영역이 과식각되는 현상을 방지하기 위하여 메탈패턴밀도가 낮은 영역에 더미메탈패턴을 형성함으로써 반도체 장치내의 메틸패턴밀도를 균등하게 하여 부분적으로 과식각되는 현상을 방지할 수 있다.The present invention discloses a semiconductor device in which a dummy metal pattern is formed. In the conventional semiconductor device, a region where the metal pattern density is low may be overetched. However, in the present invention, in order to prevent overetching of a region having a low metal pattern density, a dummy metal pattern is formed in a region having a low metal pattern density to equalize methyl pattern density in a semiconductor device, thereby preventing partial overetching. can do.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제2도는 본 발명에 의하여 더미메탈패턴을 갖는 반도체 장치의 평면도이다.2 is a plan view of a semiconductor device having a dummy metal pattern according to the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950057112A KR970053544A (en) | 1995-12-26 | 1995-12-26 | Semiconductor device with dummy metal pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950057112A KR970053544A (en) | 1995-12-26 | 1995-12-26 | Semiconductor device with dummy metal pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970053544A true KR970053544A (en) | 1997-07-31 |
Family
ID=66618993
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950057112A KR970053544A (en) | 1995-12-26 | 1995-12-26 | Semiconductor device with dummy metal pattern |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970053544A (en) |
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1995
- 1995-12-26 KR KR1019950057112A patent/KR970053544A/en not_active Application Discontinuation
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WITN | Withdrawal due to no request for examination |