KR980005786A - Polysilicon etching device - Google Patents
Polysilicon etching device Download PDFInfo
- Publication number
- KR980005786A KR980005786A KR1019960023908A KR19960023908A KR980005786A KR 980005786 A KR980005786 A KR 980005786A KR 1019960023908 A KR1019960023908 A KR 1019960023908A KR 19960023908 A KR19960023908 A KR 19960023908A KR 980005786 A KR980005786 A KR 980005786A
- Authority
- KR
- South Korea
- Prior art keywords
- polysilicon etching
- etching device
- polysilicon
- edge
- etching
- Prior art date
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- Drying Of Semiconductors (AREA)
- Weting (AREA)
Abstract
폴리실리콘 식각 공정시 에이퍼를 고정하는 클램프(Clamp:의 가장자리에서 식각율이 감소하는 것을 막기 위한 폴리실리콘 식각 장치에 관한 것으로, 에이퍼의 가장자리중 적어도 세 포인트와 접촉하는 클램프를 구비하는 것을 특징으로 한다.A polysilicon etching apparatus for preventing a decrease in etching rate at an edge of a clamp during a polysilicon etching process. It is done.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제2a도 및 제2b도는 본 발명에 의한 폴리싶리콘 식각 장치의클램프를 위와 정면에서 본 모양을 나타낸 단면도이다.2a and 2b is a cross-sectional view showing a top view and a front view of the clamp of the poly whercon etching apparatus according to the present invention.
제2c도는 본 발명에 의한 폴리실리콘 식각 공정시 에이퍼의 위치에 따른 식각율을 나타낸 그래프이다.Figure 2c is a graph showing the etching rate according to the position of the aper during the polysilicon etching process according to the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960023908A KR980005786A (en) | 1996-06-26 | 1996-06-26 | Polysilicon etching device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960023908A KR980005786A (en) | 1996-06-26 | 1996-06-26 | Polysilicon etching device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR980005786A true KR980005786A (en) | 1998-03-30 |
Family
ID=66288419
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960023908A KR980005786A (en) | 1996-06-26 | 1996-06-26 | Polysilicon etching device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR980005786A (en) |
-
1996
- 1996-06-26 KR KR1019960023908A patent/KR980005786A/en not_active Application Discontinuation
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Legal Events
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WITN | Withdrawal due to no request for examination |