KR970072262A - Wafer Clamp - Google Patents
Wafer Clamp Download PDFInfo
- Publication number
- KR970072262A KR970072262A KR1019960009710A KR19960009710A KR970072262A KR 970072262 A KR970072262 A KR 970072262A KR 1019960009710 A KR1019960009710 A KR 1019960009710A KR 19960009710 A KR19960009710 A KR 19960009710A KR 970072262 A KR970072262 A KR 970072262A
- Authority
- KR
- South Korea
- Prior art keywords
- clamp
- wafer
- wafer clamp
- finger
- length
- Prior art date
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
돌출 길이의 가변성을 가지며, 탈착이 가능한 클램프 핑거를 구비한 웨이퍼 클램프에 대하여 기재되어 있다. 이는 웨이퍼 클램프의 몸체로부터 돌출된 클램프 핑거의 길이를 조절할 수 있도록 홈이 형성되어 있는 웨이퍼 클램프 몸체를 구비하는 것을 특징으로 하는 웨이퍼 클램프를 제공한다. 이로써, 종래의 웨이퍼 클램프가 갖는 문제, 즉 웨이퍼를 클램핑하면서 그 위치를 바꿀 수 없기 때문에 웨이퍼에 손상을 주는 문제를 해결할 수 있으며, 결과적으로 설비의 안정화를 이룰 수 있으며, 클램프 핑거만을 분리할 수 있음으로써 장비 수명을 연장시킬 수 있는 효과가 있다.Discloses a wafer clamp having a clamp finger capable of detachment with variable protrusion length. The present invention provides a wafer clamp comprising a wafer clamp body having a groove formed therein to adjust a length of a clamp finger protruding from a body of the wafer clamp. Thus, it is possible to solve the problem of the conventional wafer clamp, that is, the problem of damaging the wafer due to the fact that the position can not be changed while clamping the wafer, and as a result, the apparatus can be stabilized and only the clamp finger can be separated So that the equipment life can be prolonged.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.
제2도는 본 발명에 의한 웨이퍼 클램프의 일 실시예를 설명하기 위하여 개략적으로 도시한 도면이다.FIG. 2 is a schematic view for explaining an embodiment of a wafer clamp according to the present invention.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960009710A KR970072262A (en) | 1996-04-01 | 1996-04-01 | Wafer Clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960009710A KR970072262A (en) | 1996-04-01 | 1996-04-01 | Wafer Clamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR970072262A true KR970072262A (en) | 1997-11-07 |
Family
ID=66222892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019960009710A KR970072262A (en) | 1996-04-01 | 1996-04-01 | Wafer Clamp |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR970072262A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100560641B1 (en) * | 1999-11-09 | 2006-03-16 | 삼성전자주식회사 | Wafer finger of tape laminating apparatus for semiconductor manufacturing process |
-
1996
- 1996-04-01 KR KR1019960009710A patent/KR970072262A/en not_active Application Discontinuation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100560641B1 (en) * | 1999-11-09 | 2006-03-16 | 삼성전자주식회사 | Wafer finger of tape laminating apparatus for semiconductor manufacturing process |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WITN | Withdrawal due to no request for examination |