KR920015439A - Metal contact manufacturing method of semiconductor device - Google Patents
Metal contact manufacturing method of semiconductor device Download PDFInfo
- Publication number
- KR920015439A KR920015439A KR1019910000578A KR910000578A KR920015439A KR 920015439 A KR920015439 A KR 920015439A KR 1019910000578 A KR1019910000578 A KR 1019910000578A KR 910000578 A KR910000578 A KR 910000578A KR 920015439 A KR920015439 A KR 920015439A
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor device
- metal contact
- oxide film
- contact manufacturing
- manufacturing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
내용 없음No content
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2도는 본 발명의 공정단면도.2 is a cross-sectional view of the process of the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910000578A KR0179008B1 (en) | 1991-01-15 | 1991-01-15 | Method of manufacturing metal contact |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910000578A KR0179008B1 (en) | 1991-01-15 | 1991-01-15 | Method of manufacturing metal contact |
Publications (2)
Publication Number | Publication Date |
---|---|
KR920015439A true KR920015439A (en) | 1992-08-26 |
KR0179008B1 KR0179008B1 (en) | 1999-04-15 |
Family
ID=19309847
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019910000578A KR0179008B1 (en) | 1991-01-15 | 1991-01-15 | Method of manufacturing metal contact |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0179008B1 (en) |
-
1991
- 1991-01-15 KR KR1019910000578A patent/KR0179008B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0179008B1 (en) | 1999-04-15 |
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Legal Events
Date | Code | Title | Description |
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A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20051021 Year of fee payment: 8 |
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LAPS | Lapse due to unpaid annual fee |