KR960026395A - Method for forming conductive layer of semiconductor device - Google Patents
Method for forming conductive layer of semiconductor device Download PDFInfo
- Publication number
- KR960026395A KR960026395A KR1019940038566A KR19940038566A KR960026395A KR 960026395 A KR960026395 A KR 960026395A KR 1019940038566 A KR1019940038566 A KR 1019940038566A KR 19940038566 A KR19940038566 A KR 19940038566A KR 960026395 A KR960026395 A KR 960026395A
- Authority
- KR
- South Korea
- Prior art keywords
- conductive layer
- semiconductor device
- forming
- forming conductive
- layer
- Prior art date
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Abstract
본 발명은 반도체 소자의 도전층 형성방법에 관한 것으로, 티타늄나이트라이드층과 폴리층으로 이루어진 도전층을 형성하므로써 접착력과 콘덕턴스(conduct-ance)를 증가시킬 수 있는 반도체 소자의 도전층 형성방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a conductive layer of a semiconductor device. The present invention relates to a method for forming a conductive layer of a semiconductor device capable of increasing adhesion and conductance by forming a conductive layer made of a titanium nitride layer and a poly layer. It is about.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제1A 내지 제1C도는 본 발명에 따른 반도체 소자의 도전층 형성방법을 설명하기 위한 단면도.1A to 1C are cross-sectional views for explaining a method for forming a conductive layer of a semiconductor device according to the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940038566A KR960026395A (en) | 1994-12-29 | 1994-12-29 | Method for forming conductive layer of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940038566A KR960026395A (en) | 1994-12-29 | 1994-12-29 | Method for forming conductive layer of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960026395A true KR960026395A (en) | 1996-07-22 |
Family
ID=66770012
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940038566A KR960026395A (en) | 1994-12-29 | 1994-12-29 | Method for forming conductive layer of semiconductor device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960026395A (en) |
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1994
- 1994-12-29 KR KR1019940038566A patent/KR960026395A/en not_active Application Discontinuation
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WITN | Withdrawal due to no request for examination |