KR970018192A - Semiconductor Etching Device with Anode Electrode - Google Patents
Semiconductor Etching Device with Anode Electrode Download PDFInfo
- Publication number
- KR970018192A KR970018192A KR1019950029508A KR19950029508A KR970018192A KR 970018192 A KR970018192 A KR 970018192A KR 1019950029508 A KR1019950029508 A KR 1019950029508A KR 19950029508 A KR19950029508 A KR 19950029508A KR 970018192 A KR970018192 A KR 970018192A
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- KR
- South Korea
- Prior art keywords
- anode electrode
- semiconductor etching
- etching apparatus
- etching device
- semiconductor
- Prior art date
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- Drying Of Semiconductors (AREA)
Abstract
어노우드 전극을 갖는 반도체 식각장치가 개시되어 있다. 본 발명은 반도체 식각장치에 있어서, 가장자리에 알루미늄 산화막이 형성된 홈을 갖는 어노우드 전극을 구비하여, 상기 어노우드 전극의 중앙부분에 웨이퍼를 올려놓고 식각 공정을 실시하기 위하여 플라즈마를 형성시킬 때 상기 어노우드 전극이 노출되지 않도록 함으로써, 다중합체의 발생을 억제시키는 것을 특징으로 하는 반도체 식각장치를 제공한다.A semiconductor etching apparatus having an anode electrode is disclosed. The present invention provides a semiconductor etching apparatus comprising an anode electrode having a groove having an aluminum oxide film formed at an edge thereof, and placing the wafer on the center portion of the anode wood and forming a plasma to perform an etching process. By preventing the wood electrode from being exposed, there is provided a semiconductor etching apparatus characterized by suppressing the generation of the polypolymer.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2도는 본 발명에 의한 어노우드 전극을 도시한 단면도이다.2 is a cross-sectional view showing an anode electrode according to the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950029508A KR970018192A (en) | 1995-09-11 | 1995-09-11 | Semiconductor Etching Device with Anode Electrode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950029508A KR970018192A (en) | 1995-09-11 | 1995-09-11 | Semiconductor Etching Device with Anode Electrode |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970018192A true KR970018192A (en) | 1997-04-30 |
Family
ID=66596507
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950029508A KR970018192A (en) | 1995-09-11 | 1995-09-11 | Semiconductor Etching Device with Anode Electrode |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970018192A (en) |
-
1995
- 1995-09-11 KR KR1019950029508A patent/KR970018192A/en not_active Application Discontinuation
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