KR960030304A - 쇼트아크형 카드뮴 방전램프 - Google Patents

쇼트아크형 카드뮴 방전램프 Download PDF

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Publication number
KR960030304A
KR960030304A KR1019960001049A KR19960001049A KR960030304A KR 960030304 A KR960030304 A KR 960030304A KR 1019960001049 A KR1019960001049 A KR 1019960001049A KR 19960001049 A KR19960001049 A KR 19960001049A KR 960030304 A KR960030304 A KR 960030304A
Authority
KR
South Korea
Prior art keywords
discharge lamp
arc type
short arc
cadmium
normal lighting
Prior art date
Application number
KR1019960001049A
Other languages
English (en)
Inventor
아키야스 야마구치
유키오 야스다
히로미츠 마츠노
다츠시 이가라시
Original Assignee
다나카 아키히로
우시오덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다나카 아키히로, 우시오덴키 가부시키가이샤 filed Critical 다나카 아키히로
Publication of KR960030304A publication Critical patent/KR960030304A/ko

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/84—Lamps with discharge constricted by high pressure
    • H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Discharge Lamp (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

본 발명은 파장 214±2nm의 선스펙트럼을 높은 출력에서 발광할 수 있는 카드뮴 방전램프에 관한 것으로써, 본 발명은 온도제어된 발광관(1) 중에 근접하여 대향배치된 한쌍의 전극(2)(3)을 가지며, 이 발광관(1) 내에는 크세논, 크립톤, 아르곤, 네온에서 선택된 적어도 하나의 회가스와, 정상점등시에 있어서의 압력이 2~13.7KPa의 범위가 되는 금속카드뮴이 봉입되어 있고, 정상점등시의 방전전류를 J(A), 정상점등시의 카드뮴 압력을 P(KPa)라고 할 때, J/P가 1.4~75의 범위에서 점등되는 것을 특징으로 하는 쇼트아크형 카드뮴 방전램프이다.

Description

쇼트아크형 카드뮴 방전램프
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 쇼트아크형 카드뮴 방전램프 설명도이다. 제2도는 쇼트아크형 카드뮴 방전램프의 점등회로이다. 제3도는 J/P와 파장 214nm±2nm의 발광효율 관계를 나타낸 설명도이다. 제8도는 회가스의 봉입량과 파장 214±2nm 광의 발광강도의 관계를 나타낸 설명도이다.

Claims (3)

  1. 온도제어되는 발광관내에 근접하여 대향배치된 한쌍의 전극을 가지며, 이 발광관내에는 크세논, 크립톤, 아르곤, 네온에서 선택된 적어도 하나의 회가스와, 정상점등시에 있어서의 압력이 2~13.7KPa의 범위가 되는 금속카드뮴이 봉입되어 있고, 정상점등시의 방전전류를 J(A), 정상점등시의 카드뮴 압력을 P(KPa)라고 할때, J/P가 1.4~75의 범위에서 점등되는 것을 특징으로 하는 쇼트아크형 카드뮴 방전램프.
  2. 제1항에 있어서, 상기 회가스는 실온에서의 압력이 30KPa~3MPa의 범위에서 봉입되는 것을 특징으로 하는 쇼트아크형 카드뮴 방전램프.
  3. 제1항에 있어서, 상기 발광관내에는 실질적으로 발광에 기여하는 수은은 봉입되어 있지 않은 것을 특징으로 하는 쇼트아크형 카드뮴 방전램프.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960001049A 1995-01-20 1996-01-18 쇼트아크형 카드뮴 방전램프 KR960030304A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP95-24461 1995-01-20
JP7024461A JPH08195186A (ja) 1995-01-20 1995-01-20 ショートアーク型カドミウム希ガス放電ランプ

Publications (1)

Publication Number Publication Date
KR960030304A true KR960030304A (ko) 1996-08-17

Family

ID=12138817

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960001049A KR960030304A (ko) 1995-01-20 1996-01-18 쇼트아크형 카드뮴 방전램프

Country Status (4)

Country Link
US (1) US5739636A (ko)
EP (1) EP0723283A3 (ko)
JP (1) JPH08195186A (ko)
KR (1) KR960030304A (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2277088A1 (en) * 1997-01-10 1998-07-16 Ion Laser Technology, Inc. High pressure arc lamp with internal reflector and applications therefor
JP2003130801A (ja) * 2001-10-22 2003-05-08 Ushio Inc 蛍光体の検査方法および装置
JP4100599B2 (ja) * 2002-04-05 2008-06-11 ウシオ電機株式会社 超高圧水銀ランプ
CN105738037A (zh) * 2016-02-01 2016-07-06 武汉新芯集成电路制造有限公司 一种等离子反应腔体的渗漏检测方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5510757A (en) * 1978-07-11 1980-01-25 Ushio Inc Short arc type cadmium rare gas discharge lamp
JPH0750152A (ja) * 1993-08-03 1995-02-21 Ushio Inc ショートアーク型カドミウム・希ガス放電ランプ
JPH0750154A (ja) * 1993-08-03 1995-02-21 Ushio Inc ショートアーク型カドミウム・希ガス放電ランプ
JPH087835A (ja) * 1994-06-21 1996-01-12 Ushio Inc 半導体露光用放電ランプ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3234421A (en) * 1961-01-23 1966-02-08 Gen Electric Metallic halide electric discharge lamps
JP3020397B2 (ja) * 1992-11-20 2000-03-15 ウシオ電機株式会社 ショートアーク型カドミウム希ガス放電ランプおよびこれを搭載した投影露光装置
JP2775694B2 (ja) * 1993-05-07 1998-07-16 ウシオ電機株式会社 放電ランプ
DE69402641T2 (de) * 1993-08-03 1997-08-21 Ushiodenki K K Cadmiumentladungslampe
JPH0845479A (ja) * 1994-07-29 1996-02-16 Ushio Inc 金属蒸気放電ランプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5510757A (en) * 1978-07-11 1980-01-25 Ushio Inc Short arc type cadmium rare gas discharge lamp
JPH0750152A (ja) * 1993-08-03 1995-02-21 Ushio Inc ショートアーク型カドミウム・希ガス放電ランプ
JPH0750154A (ja) * 1993-08-03 1995-02-21 Ushio Inc ショートアーク型カドミウム・希ガス放電ランプ
JPH087835A (ja) * 1994-06-21 1996-01-12 Ushio Inc 半導体露光用放電ランプ

Also Published As

Publication number Publication date
US5739636A (en) 1998-04-14
EP0723283A3 (en) 1998-06-03
EP0723283A2 (en) 1996-07-24
JPH08195186A (ja) 1996-07-30

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E601 Decision to refuse application