KR960025430U - 스테이지 경사 보상이 가능한 웨이퍼 척 장치 - Google Patents

스테이지 경사 보상이 가능한 웨이퍼 척 장치

Info

Publication number
KR960025430U
KR960025430U KR2019940036818U KR19940036818U KR960025430U KR 960025430 U KR960025430 U KR 960025430U KR 2019940036818 U KR2019940036818 U KR 2019940036818U KR 19940036818 U KR19940036818 U KR 19940036818U KR 960025430 U KR960025430 U KR 960025430U
Authority
KR
South Korea
Prior art keywords
wafer chuck
chuck device
tilt compensation
stage tilt
stage
Prior art date
Application number
KR2019940036818U
Other languages
English (en)
Other versions
KR200177258Y1 (ko
Inventor
정해영
Original Assignee
현대반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체주식회사 filed Critical 현대반도체주식회사
Priority to KR2019940036818U priority Critical patent/KR200177258Y1/ko
Publication of KR960025430U publication Critical patent/KR960025430U/ko
Application granted granted Critical
Publication of KR200177258Y1 publication Critical patent/KR200177258Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR2019940036818U 1994-12-28 1994-12-28 스테이지 경사 보상이 가능한 웨이퍼 척 장치 KR200177258Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940036818U KR200177258Y1 (ko) 1994-12-28 1994-12-28 스테이지 경사 보상이 가능한 웨이퍼 척 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940036818U KR200177258Y1 (ko) 1994-12-28 1994-12-28 스테이지 경사 보상이 가능한 웨이퍼 척 장치

Publications (2)

Publication Number Publication Date
KR960025430U true KR960025430U (ko) 1996-07-22
KR200177258Y1 KR200177258Y1 (ko) 2000-04-15

Family

ID=19403547

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940036818U KR200177258Y1 (ko) 1994-12-28 1994-12-28 스테이지 경사 보상이 가능한 웨이퍼 척 장치

Country Status (1)

Country Link
KR (1) KR200177258Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030092801A (ko) * 2002-05-31 2003-12-06 (주)넥스트인스트루먼트 디스플레이 패널의 척 유니트

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030092801A (ko) * 2002-05-31 2003-12-06 (주)넥스트인스트루먼트 디스플레이 패널의 척 유니트

Also Published As

Publication number Publication date
KR200177258Y1 (ko) 2000-04-15

Similar Documents

Publication Publication Date Title
KR960012421A (ko) 웨이퍼 지지 보우트
KR960025430U (ko) 스테이지 경사 보상이 가능한 웨이퍼 척 장치
KR960015613U (ko) 웨이퍼 척
KR940023533U (ko) 웨이퍼 척의 구조
KR960006359U (ko) 웨이퍼 홀딩 척
DE59500634D1 (de) Schnellwechselfutter mit Längenausgleichsvorrichtung
KR970046599U (ko) 웨이퍼척
KR960012675U (ko) 웨이퍼 척
KR960019141U (ko) 파티클 방지용 웨이퍼 척
KR960015619U (ko) 웨이퍼 고정용 지지구조
KR950009600U (ko) 액정표시소자 흡착 고정용 진공척
KR940023573U (ko) 웨이퍼 척
KR950015663U (ko) 웨이퍼 척
KR950028690U (ko) 위상변환이 가능한 웨이퍼 마운트 척
KR960019145U (ko) 웨이퍼 스핀 척
KR970064208U (ko) 웨이퍼 척
KR970003265U (ko) 웨이퍼 척
KR970011211U (ko) 웨이퍼 척
KR960035622U (ko) 웨이퍼 척
KR950015664U (ko) 웨이퍼고정장치
KR960025437U (ko) 웨이퍼 홀딩용 페데스탈
KR960019144U (ko) 진공 웨이퍼 척
KR960025432U (ko) 웨이퍼 홀딩장치
KR960006354U (ko) 웨이퍼 고정 장치
KR960025450U (ko) 웨이퍼 정렬 장치

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20090102

Year of fee payment: 10

EXPY Expiration of term