KR960025389U - 반도체 제조장비의 패키지 오 정렬 검지장치 - Google Patents

반도체 제조장비의 패키지 오 정렬 검지장치

Info

Publication number
KR960025389U
KR960025389U KR2019940035253U KR19940035253U KR960025389U KR 960025389 U KR960025389 U KR 960025389U KR 2019940035253 U KR2019940035253 U KR 2019940035253U KR 19940035253 U KR19940035253 U KR 19940035253U KR 960025389 U KR960025389 U KR 960025389U
Authority
KR
South Korea
Prior art keywords
misalignment
semiconductor
detection device
package
misalignment detection
Prior art date
Application number
KR2019940035253U
Other languages
English (en)
Other versions
KR0117626Y1 (ko
Inventor
이규호
Original Assignee
아남산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 아남산업 주식회사 filed Critical 아남산업 주식회사
Priority to KR2019940035253U priority Critical patent/KR0117626Y1/ko
Publication of KR960025389U publication Critical patent/KR960025389U/ko
Application granted granted Critical
Publication of KR0117626Y1 publication Critical patent/KR0117626Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Lead Frames For Integrated Circuits (AREA)
KR2019940035253U 1994-12-23 1994-12-23 반도체 제조장비의 패키지 오 정렬 검지장치 KR0117626Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940035253U KR0117626Y1 (ko) 1994-12-23 1994-12-23 반도체 제조장비의 패키지 오 정렬 검지장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940035253U KR0117626Y1 (ko) 1994-12-23 1994-12-23 반도체 제조장비의 패키지 오 정렬 검지장치

Publications (2)

Publication Number Publication Date
KR960025389U true KR960025389U (ko) 1996-07-22
KR0117626Y1 KR0117626Y1 (ko) 1998-06-01

Family

ID=19402367

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940035253U KR0117626Y1 (ko) 1994-12-23 1994-12-23 반도체 제조장비의 패키지 오 정렬 검지장치

Country Status (1)

Country Link
KR (1) KR0117626Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040016638A (ko) * 2002-08-19 2004-02-25 삼성전자주식회사 절단/절곡 장치의 리드 프레임 스트립 겹침 검출 장치

Also Published As

Publication number Publication date
KR0117626Y1 (ko) 1998-06-01

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
LAPS Lapse due to unpaid annual fee