KR960016485B1 - Transistor structure - Google Patents

Transistor structure Download PDF

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Publication number
KR960016485B1
KR960016485B1 KR93015798A KR930015798A KR960016485B1 KR 960016485 B1 KR960016485 B1 KR 960016485B1 KR 93015798 A KR93015798 A KR 93015798A KR 930015798 A KR930015798 A KR 930015798A KR 960016485 B1 KR960016485 B1 KR 960016485B1
Authority
KR
South Korea
Prior art keywords
side wall
source region
region
beside
wall insulator
Prior art date
Application number
KR93015798A
Other languages
Korean (ko)
Other versions
KR950007091A (en
Inventor
Hyun-Sang Hwang
Original Assignee
Lg Semicon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lg Semicon Co Ltd filed Critical Lg Semicon Co Ltd
Priority to KR93015798A priority Critical patent/KR960016485B1/en
Publication of KR950007091A publication Critical patent/KR950007091A/en
Application granted granted Critical
Publication of KR960016485B1 publication Critical patent/KR960016485B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Thin Film Transistor (AREA)

Abstract

a gate oxide film(4) and a gate electrode(5) formed on an active region of a p-type semiconductor substrate(1); side wall insulators(8a,8b) formed as wide as the side wall insulator(8b) on the side of the gate electrode(5); an LDD region(7a) which is formed by neighboring on a source region(10) below the side wall insulator(8b) beside a drain with a lightly doping of n-type impurity; and a Halo region(14) which is formed in the same junction depth as the source region(9) by being contacted to the source region(9) below the side wall insulator(8a) beside the source region(9) with a lightly doping p-type impurity.
KR93015798A 1993-08-16 1993-08-16 Transistor structure KR960016485B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR93015798A KR960016485B1 (en) 1993-08-16 1993-08-16 Transistor structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR93015798A KR960016485B1 (en) 1993-08-16 1993-08-16 Transistor structure

Publications (2)

Publication Number Publication Date
KR950007091A KR950007091A (en) 1995-03-21
KR960016485B1 true KR960016485B1 (en) 1996-12-12

Family

ID=19361305

Family Applications (1)

Application Number Title Priority Date Filing Date
KR93015798A KR960016485B1 (en) 1993-08-16 1993-08-16 Transistor structure

Country Status (1)

Country Link
KR (1) KR960016485B1 (en)

Also Published As

Publication number Publication date
KR950007091A (en) 1995-03-21

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