KR960012576B1 - 알루미늄 합금배선막의 성능평가 방법 - Google Patents

알루미늄 합금배선막의 성능평가 방법 Download PDF

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Publication number
KR960012576B1
KR960012576B1 KR1019920006771A KR920006771A KR960012576B1 KR 960012576 B1 KR960012576 B1 KR 960012576B1 KR 1019920006771 A KR1019920006771 A KR 1019920006771A KR 920006771 A KR920006771 A KR 920006771A KR 960012576 B1 KR960012576 B1 KR 960012576B1
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KR
South Korea
Prior art keywords
film
aluminum alloy
hardness
substrate
evaluated
Prior art date
Application number
KR1019920006771A
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English (en)
Korean (ko)
Other versions
KR920020669A (ko
Inventor
도시아끼 나까가와
히사까주 미야따께
Original Assignee
샤프 가부시끼가이샤
쓰지 하루오
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Application filed by 샤프 가부시끼가이샤, 쓰지 하루오 filed Critical 샤프 가부시끼가이샤
Publication of KR920020669A publication Critical patent/KR920020669A/ko
Application granted granted Critical
Publication of KR960012576B1 publication Critical patent/KR960012576B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/40—Investigating hardness or rebound hardness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/20—Metals
    • G01N33/208—Coatings, e.g. platings

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  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
KR1019920006771A 1991-04-24 1992-04-22 알루미늄 합금배선막의 성능평가 방법 KR960012576B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP1991-094353 1991-04-24
JP91-094353 1991-04-24
JP3094353A JP2672197B2 (ja) 1991-04-24 1991-04-24 金属配線膜の性能評価方法

Publications (2)

Publication Number Publication Date
KR920020669A KR920020669A (ko) 1992-11-21
KR960012576B1 true KR960012576B1 (ko) 1996-09-23

Family

ID=14107924

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920006771A KR960012576B1 (ko) 1991-04-24 1992-04-22 알루미늄 합금배선막의 성능평가 방법

Country Status (3)

Country Link
US (1) US5299450A (ja)
JP (1) JP2672197B2 (ja)
KR (1) KR960012576B1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7642605B2 (en) 2004-02-10 2010-01-05 Mitsubishi Denki Kabushiki Kaisha Semiconductor device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5517860A (en) * 1995-02-03 1996-05-21 E. I. Du Pont De Nemours And Company Film testing
US7395722B2 (en) * 2005-11-21 2008-07-08 E.I. Du Pont De Nemours And Company Mechanical property measurement of thin films by micro plane-strain compression

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2735304A (en) * 1956-02-21 toppfb haw
US2564519A (en) * 1944-03-08 1951-08-14 Bergsman Enar Borje Micro-hardness tester
US2568713A (en) * 1949-04-06 1951-09-25 Brenner Abner Instrument for use in determining the stress in an electrodeposit
US3003352A (en) * 1957-08-12 1961-10-10 Ziegler Rolf Testing method for ascertaining the saturation value of grey cast iron
DE2735340C2 (de) * 1977-08-05 1982-06-03 W.C. Heraeus Gmbh, 6450 Hanau Verfahren zur Messung der Härte (Mischhärte) von dünnen Schichten
US4419885A (en) * 1982-05-18 1983-12-13 Rockwell International Corporation Method of verifying the stress rolling of a metallic rim
JPS6091237A (ja) * 1983-10-26 1985-05-22 Hitachi Ltd 薄膜の硬度試験方法および装置
JPS62132145A (ja) * 1985-12-04 1987-06-15 Mitsubishi Cable Ind Ltd 電線被覆の劣化判定方法
SU1359715A1 (ru) * 1986-06-11 1987-12-15 Одесский государственный университет им.И.И.Мечникова Способ контрол качества резисторов
US4791807A (en) * 1986-11-04 1988-12-20 Oechsle S John Apparatus for determining the relative hardness and abrasion resistance of industrial film coatings and linings
JPS63311734A (ja) * 1987-06-15 1988-12-20 Matsushita Electronics Corp 金属配線膜の評価方法
JP2675411B2 (ja) * 1989-02-16 1997-11-12 三洋電機株式会社 半導体集積回路の製造方法
US5175115A (en) * 1990-02-15 1992-12-29 Kabushiki Kaisha Toshiba Method of controlling metal thin film formation conditions

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7642605B2 (en) 2004-02-10 2010-01-05 Mitsubishi Denki Kabushiki Kaisha Semiconductor device

Also Published As

Publication number Publication date
JP2672197B2 (ja) 1997-11-05
US5299450A (en) 1994-04-05
KR920020669A (ko) 1992-11-21
JPH04324656A (ja) 1992-11-13

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