KR960006351U - 웨이퍼 카세트의 안착장치 - Google Patents

웨이퍼 카세트의 안착장치

Info

Publication number
KR960006351U
KR960006351U KR2019940016826U KR19940016826U KR960006351U KR 960006351 U KR960006351 U KR 960006351U KR 2019940016826 U KR2019940016826 U KR 2019940016826U KR 19940016826 U KR19940016826 U KR 19940016826U KR 960006351 U KR960006351 U KR 960006351U
Authority
KR
South Korea
Prior art keywords
wafer cassette
seating device
cassette seating
wafer
seating
Prior art date
Application number
KR2019940016826U
Other languages
English (en)
Other versions
KR0113531Y1 (ko
Inventor
유해산
김용표
지재풍
곽성호
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940016826U priority Critical patent/KR0113531Y1/ko
Publication of KR960006351U publication Critical patent/KR960006351U/ko
Application granted granted Critical
Publication of KR0113531Y1 publication Critical patent/KR0113531Y1/ko

Links

KR2019940016826U 1994-07-07 1994-07-07 웨이퍼 카세트의 안착장치 KR0113531Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940016826U KR0113531Y1 (ko) 1994-07-07 1994-07-07 웨이퍼 카세트의 안착장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940016826U KR0113531Y1 (ko) 1994-07-07 1994-07-07 웨이퍼 카세트의 안착장치

Publications (2)

Publication Number Publication Date
KR960006351U true KR960006351U (ko) 1996-02-17
KR0113531Y1 KR0113531Y1 (ko) 1998-04-16

Family

ID=19387874

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940016826U KR0113531Y1 (ko) 1994-07-07 1994-07-07 웨이퍼 카세트의 안착장치

Country Status (1)

Country Link
KR (1) KR0113531Y1 (ko)

Also Published As

Publication number Publication date
KR0113531Y1 (ko) 1998-04-16

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