KR970052849U - 웨이퍼카세트의 위치고정장치 - Google Patents

웨이퍼카세트의 위치고정장치

Info

Publication number
KR970052849U
KR970052849U KR2019960002383U KR19960002383U KR970052849U KR 970052849 U KR970052849 U KR 970052849U KR 2019960002383 U KR2019960002383 U KR 2019960002383U KR 19960002383 U KR19960002383 U KR 19960002383U KR 970052849 U KR970052849 U KR 970052849U
Authority
KR
South Korea
Prior art keywords
positioning device
wafer cassette
cassette positioning
wafer
positioning
Prior art date
Application number
KR2019960002383U
Other languages
English (en)
Other versions
KR200151330Y1 (ko
Inventor
김민수
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=19450574&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR970052849(U) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR2019960002383U priority Critical patent/KR200151330Y1/ko
Publication of KR970052849U publication Critical patent/KR970052849U/ko
Application granted granted Critical
Publication of KR200151330Y1 publication Critical patent/KR200151330Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019960002383U 1996-02-15 1996-02-15 웨이퍼카세트의 위치고정장치 KR200151330Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960002383U KR200151330Y1 (ko) 1996-02-15 1996-02-15 웨이퍼카세트의 위치고정장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960002383U KR200151330Y1 (ko) 1996-02-15 1996-02-15 웨이퍼카세트의 위치고정장치

Publications (2)

Publication Number Publication Date
KR970052849U true KR970052849U (ko) 1997-09-08
KR200151330Y1 KR200151330Y1 (ko) 1999-07-15

Family

ID=19450574

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960002383U KR200151330Y1 (ko) 1996-02-15 1996-02-15 웨이퍼카세트의 위치고정장치

Country Status (1)

Country Link
KR (1) KR200151330Y1 (ko)

Also Published As

Publication number Publication date
KR200151330Y1 (ko) 1999-07-15

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