KR960005927A - 웨이퍼 캐리어 - Google Patents

웨이퍼 캐리어 Download PDF

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Publication number
KR960005927A
KR960005927A KR1019950020892A KR19950020892A KR960005927A KR 960005927 A KR960005927 A KR 960005927A KR 1019950020892 A KR1019950020892 A KR 1019950020892A KR 19950020892 A KR19950020892 A KR 19950020892A KR 960005927 A KR960005927 A KR 960005927A
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KR
South Korea
Prior art keywords
wafer carrier
main body
body portion
carrier
sidewalls
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KR1019950020892A
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English (en)
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KR100343421B1 (ko
Inventor
제이. 믹켈슨 커크
Original Assignee
스탠 게이어
플루오로웨어, 아이엔시.
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Application filed by 스탠 게이어, 플루오로웨어, 아이엔시. filed Critical 스탠 게이어
Publication of KR960005927A publication Critical patent/KR960005927A/ko
Application granted granted Critical
Publication of KR100343421B1 publication Critical patent/KR100343421B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67366—Closed carriers characterised by materials, roughness, coatings or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67396—Closed carriers characterised by the presence of antistatic elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/922—Static electricity metal bleed-off metallic stock
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/1352—Polymer or resin containing [i.e., natural or synthetic]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249924—Noninterengaged fiber-containing paper-free web or sheet which is not of specified porosity
    • Y10T428/24994—Fiber embedded in or on the surface of a polymeric matrix
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913—Rod, strand, filament or fiber
    • Y10T428/2918—Rod, strand, filament or fiber including free carbon or carbide or therewith [not as steel]

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

대단한 저 입자 발생 특성을 가진 치수적으로 안정하며 정전기 소산성인, 반도체 웨이퍼들이나 자기 기억장치 디스크들 용의 캐리어의 개시이다. 캐리어는 대향하는 측벽들과 접속벽들을 가지고 있고, 측벽들은 디스크들이나 웨이퍼들의 축방향 배열을 위한 슬롯들을 구성하는 리브들을 가지고 있다. 측벽들, 리브들, 및 단벽들은 모두 일체이며, 또, 12중량% 내지 25중량%의 단소섬유 충전제를 가진 사출성형의 폴리부틸 테레프탈레이트(PBT)로 형성돼 있다.

Description

웨이퍼 캐리어
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 반도체 웨이퍼의 캐리어이다.
제2도는 자기 디스크를 적하하는 데 적합한 세 부분의 적하 캐리어이다.
제3도는 제1도에 보인 따위의 분체부를 보지하는, 캐리어의 부분으로서의 봉입물(enclosure)이다.

Claims (15)

  1. 웨이퍼를 보지하는 적어도 하나의 슬롯을 가진 웨이퍼 캐리어로서, 그 캐리어는 탄소섬유로 충전된 폴리부틸 테레프탈레이트로 형성된 웨이퍼 캐리어.
  2. 제1항에 있어서, 폴리부틸 테레프탈레이트의 탄소섬유의 비율이 12 내지 25중량 퍼센트의 범위인 웨이퍼 캐리어.
  3. 제2항에 있어서, 탄소섬유들이 있으며 대부분의 섬유는 혼합전의 종횡비가 100 : 1 이상인, 웨이퍼 캐리어.
  4. 제1항에 있어서, 리브들이 있는 한 쌍의 측벽과, 한 쌍의 접속벽을 더 함유하고, 그 리브들이 복수의 슬롯을 구성하며, 측벽들과, 단벽들, 및 리브들은 모두가 일체로 웨이퍼 캐리어.
  5. 제4항에 있어서, 측벽들, 접속벽들, 및 리브들은 주본체부의 주요부분이고, 그 주 본체부는 상기 개방이며 또 웨이퍼 캐리어는 개방 상부의 뚜껑을 더 함유하는, 웨이퍼 캐리어.
  6. 제4항에 있어서, 측벽들, 접속벽들, 및 리브들은 주본체부의 주요부분이고, 그 주 본체부는 저부개방이며 웨이퍼 캐리어는 개방 저부의 밑뚜껑을 더 함유하는, 웨이퍼 캐리어.
  7. 제1항에 있어서, 폴리부틸 테레프탈레이트는 탄성중합체의 폴리에스터를 더 함유하는, 웨이퍼 캐리어.
  8. 제4항에 있어서, 측벽들과 단벽들은 주 본체부의 주요부분이고, 또 캐리어는 05내지 1012옴/스퀘어의 범위의 표면 저항률에 충분한 탄소섬유를 가진 폴리부틸 테레프탈레이트로 제조된 개방가능의 봉입물을 더 함유하는 웨이퍼 캐리어.
  9. 웨이퍼를 보지하는 적어도 하나의 슬롯을 가진 사출 성형의 웨이퍼 캐리어로서, 그 캐리어는 105내지 1010옴/스퀘어의 범위의 표면 저항률에 충분한 탄소섬유로 충전된 폴리부틸 테레프탈레이트로 형성된 웨이퍼 캐리어.
  10. 제9항에 있어서, 탄소섬유들은 재단 탄소섬유인 웨이퍼 캐리어.
  11. 제9항에 있어서, 한 쌍의 측벽, 그 측벽들을 연결하는 한 쌍의 단벽, 측벽들에 형성된 복수의 슬롯을 더 함유하며, 측벽들과 단벽들은 모두 일체인 웨이퍼 캐리어.
  12. 제11항에 있어서, 측벽들과 단벽들은 주 본체부의 주요부분이고, 그 주 본체부는 상부 개방이며, 또 웨이퍼 캐리어는 개방 상부의 뚜껑을 더 함유하는, 웨이퍼 캐리어.
  13. 제11항에 있어서, 측벽들, 접속벽들, 및 리브들은 주본체부의 주요부분이고, 그 주본체부는 저부 개방이며, 또 웨이퍼 캐리어는 개방 저부의 밑뚜껑을 더 함유하는, 웨이퍼 캐리어.
  14. 제11항에 있어서, 측벽들과 단벽들은 주본체부의 주요부분이고, 또 캐리어는 105내지 1012옴/스퀘어의 범위의 표면 저항률에 충분한 탄소섬유를 가진 폴리부틸 테레프탈레이트로 제조된 개방가능의 봉입물을 더 함유하며 그 봉입물은 주본체부를 받아들이는 크기인, 웨이퍼 캐리어.
  15. 제11항에 있어서, 폴리부틸 테레프탈레이트는 탄성중합체 폴리에스터 첨가제를 가지는 웨이퍼 캐리어.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950020892A 1994-07-15 1995-07-15 웨이퍼 캐리어 KR100343421B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US27550294A 1994-07-15 1994-07-15
US08/275,502 1994-07-15

Publications (2)

Publication Number Publication Date
KR960005927A true KR960005927A (ko) 1996-02-23
KR100343421B1 KR100343421B1 (ko) 2002-12-02

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Application Number Title Priority Date Filing Date
KR1019950020892A KR100343421B1 (ko) 1994-07-15 1995-07-15 웨이퍼 캐리어

Country Status (6)

Country Link
US (1) US5780127A (ko)
EP (1) EP0692817B1 (ko)
JP (1) JPH0888266A (ko)
KR (1) KR100343421B1 (ko)
CN (1) CN1121645A (ko)
DE (1) DE69500752T2 (ko)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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Also Published As

Publication number Publication date
DE69500752D1 (de) 1997-10-30
JPH0888266A (ja) 1996-04-02
EP0692817B1 (en) 1997-09-24
CN1121645A (zh) 1996-05-01
EP0692817A1 (en) 1996-01-17
DE69500752T2 (de) 1998-03-12
KR100343421B1 (ko) 2002-12-02
US5780127A (en) 1998-07-14

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