KR950024255A - 반도체장치의 저압 화학기상 증착방법 - Google Patents

반도체장치의 저압 화학기상 증착방법 Download PDF

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Publication number
KR950024255A
KR950024255A KR1019940000168A KR19940000168A KR950024255A KR 950024255 A KR950024255 A KR 950024255A KR 1019940000168 A KR1019940000168 A KR 1019940000168A KR 19940000168 A KR19940000168 A KR 19940000168A KR 950024255 A KR950024255 A KR 950024255A
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South Korea
Prior art keywords
vapor deposition
low pressure
chemical vapor
pressure chemical
gas
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KR1019940000168A
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English (en)
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KR0118865B1 (ko
Inventor
양희식
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문정환
금성일렉트론 주식회사
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Priority to KR1019940000168A priority Critical patent/KR0118865B1/ko
Publication of KR950024255A publication Critical patent/KR950024255A/ko
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Publication of KR0118865B1 publication Critical patent/KR0118865B1/ko

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

본 발명은 반도체장치의 저압 화학기상증착(LPCVD)방법에 관한 것으로서, 특히 헬륨가스를 사용하여 장비 내부에서 성장하는 자연산화막의 성장을 억제토록 하는 반도체장치의 저압 화학기상증착방법에 관한 것이다.
이를 위하여 펌핑라인(5), 반응실인 외부튜브(3) 및 내부튜브(4), 웨이퍼가 안치되는 수납부(9), 반응가스가 유입되는 제1 및 제2가스도입구(1)(2)를 포함하는 저압 화학기상증착 장비를 사용하여 튜브 내부에서 웨이퍼상에 필름을 형성하는 반도체장치의 저압 화학기상증착 방법에 있어서, 상기 내부튜브(4)의 소정부위에 불활성가스가 주입되는 제3가스도입구(7)를 설치하고, 상기 웨이퍼가 안치된 수납부(9)가 상승되기 전에 상기 제3가스도입구(7)를 통해 튜브내부로 불활성가스를 유입시켜 잔존하는 산소를 제거하여 자연성장하는 산화막을 억제시키도록 한 것이다.

Description

반도체장치의 저압 화학기상 증착방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명에 따른 반도체장치의 저압 화학기상증착장비의 구조도.

Claims (2)

  1. 펌핑라인(5), 반응실인 외부튜브(3) 및 내부튜브(4), 웨이퍼가 안치되는 수납부(9), 반응가스가 유입되는 제1 및 제2가스도입구(1)(2)를 포함하는 저압 화학기상증착 장비를 사용하여 튜브내부에서 웨이퍼상에 필름을 형성하는 반도체장치의 저압 화학기상증착 방법에 있어서, 상기 내부튜브(4)내로 불활성가스가 주입되는 제3가스도입구(7)를 설치하고, 상기 웨이퍼가 안치된 수납부(9)가 상승되기 전에 상기 제3가스도입구(7)를 통해 튜브내부로 불활성가스를 유입시켜 잔존하는 산소를 제거하여 자연성장하는 산화막을 억제시키도록 한 것을 특징으로 하는 반도체장치의 저압 화학기상증착방법.
  2. 제1항에 있어서 상기 불활성가스는, 분자량이 가장작은 헬륨가스를 사용한 것을 특징으로 하는 반도체장치의 저압 화학기상증착방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019940000168A 1994-01-16 1994-01-16 반도체장치의 저압 화학기상증착방법 KR0118865B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019940000168A KR0118865B1 (ko) 1994-01-16 1994-01-16 반도체장치의 저압 화학기상증착방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940000168A KR0118865B1 (ko) 1994-01-16 1994-01-16 반도체장치의 저압 화학기상증착방법

Publications (2)

Publication Number Publication Date
KR950024255A true KR950024255A (ko) 1995-08-21
KR0118865B1 KR0118865B1 (ko) 1997-09-30

Family

ID=19375347

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940000168A KR0118865B1 (ko) 1994-01-16 1994-01-16 반도체장치의 저압 화학기상증착방법

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KR (1) KR0118865B1 (ko)

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Publication number Publication date
KR0118865B1 (ko) 1997-09-30

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