KR950001304B1 - Semiconductor device isolation method - Google Patents
Semiconductor device isolation method Download PDFInfo
- Publication number
- KR950001304B1 KR950001304B1 KR92000883A KR920000883A KR950001304B1 KR 950001304 B1 KR950001304 B1 KR 950001304B1 KR 92000883 A KR92000883 A KR 92000883A KR 920000883 A KR920000883 A KR 920000883A KR 950001304 B1 KR950001304 B1 KR 950001304B1
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- forming
- film
- trench
- substrate
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Local Oxidation Of Silicon (AREA)
- Element Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR92000883A KR950001304B1 (en) | 1992-01-22 | 1992-01-22 | Semiconductor device isolation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR92000883A KR950001304B1 (en) | 1992-01-22 | 1992-01-22 | Semiconductor device isolation method |
Publications (2)
Publication Number | Publication Date |
---|---|
KR930017145A KR930017145A (ko) | 1993-08-30 |
KR950001304B1 true KR950001304B1 (en) | 1995-02-15 |
Family
ID=19328185
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR92000883A KR950001304B1 (en) | 1992-01-22 | 1992-01-22 | Semiconductor device isolation method |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950001304B1 (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR19990060829A (ko) * | 1997-12-31 | 1999-07-26 | 김영환 | 반도체 소자의 소자 분리막 형성 방법 |
KR100849079B1 (ko) * | 2002-06-28 | 2008-07-30 | 매그나칩 반도체 유한회사 | 반도체소자의 소자분리방법 |
-
1992
- 1992-01-22 KR KR92000883A patent/KR950001304B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR930017145A (ko) | 1993-08-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
G160 | Decision to publish patent application | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20060105 Year of fee payment: 12 |
|
LAPS | Lapse due to unpaid annual fee |