KR940022676U - 저압화학 기상증착 반응로 배기계의 가스부산물 트랩장치 - Google Patents

저압화학 기상증착 반응로 배기계의 가스부산물 트랩장치

Info

Publication number
KR940022676U
KR940022676U KR2019930003480U KR930003480U KR940022676U KR 940022676 U KR940022676 U KR 940022676U KR 2019930003480 U KR2019930003480 U KR 2019930003480U KR 930003480 U KR930003480 U KR 930003480U KR 940022676 U KR940022676 U KR 940022676U
Authority
KR
South Korea
Prior art keywords
low
vapor deposition
chemical vapor
furnace gas
pressure chemical
Prior art date
Application number
KR2019930003480U
Other languages
English (en)
Other versions
KR950007543Y1 (ko
Inventor
최상숙
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR2019930003480U priority Critical patent/KR950007543Y1/ko
Publication of KR940022676U publication Critical patent/KR940022676U/ko
Application granted granted Critical
Publication of KR950007543Y1 publication Critical patent/KR950007543Y1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4408—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber by purging residual gases from the reaction chamber or gas lines

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
KR2019930003480U 1993-03-10 1993-03-10 저압화학 기상증착 반응로 배기계의 가스부산물 트랩장치 KR950007543Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930003480U KR950007543Y1 (ko) 1993-03-10 1993-03-10 저압화학 기상증착 반응로 배기계의 가스부산물 트랩장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930003480U KR950007543Y1 (ko) 1993-03-10 1993-03-10 저압화학 기상증착 반응로 배기계의 가스부산물 트랩장치

Publications (2)

Publication Number Publication Date
KR940022676U true KR940022676U (ko) 1994-10-20
KR950007543Y1 KR950007543Y1 (ko) 1995-09-13

Family

ID=19351835

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930003480U KR950007543Y1 (ko) 1993-03-10 1993-03-10 저압화학 기상증착 반응로 배기계의 가스부산물 트랩장치

Country Status (1)

Country Link
KR (1) KR950007543Y1 (ko)

Also Published As

Publication number Publication date
KR950007543Y1 (ko) 1995-09-13

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