KR940020145A - 방전셀 및 그 제조방법 - Google Patents

방전셀 및 그 제조방법 Download PDF

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KR940020145A
KR940020145A KR1019940003165A KR19940003165A KR940020145A KR 940020145 A KR940020145 A KR 940020145A KR 1019940003165 A KR1019940003165 A KR 1019940003165A KR 19940003165 A KR19940003165 A KR 19940003165A KR 940020145 A KR940020145 A KR 940020145A
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discharge electrode
discharge
insulator
electrode
discharge cell
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KR1019940003165A
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KR100318022B1 (ko
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시게끼 미야자끼
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오가 노리오
소니 가부시기가이샤
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/13334—Plasma addressed liquid crystal cells [PALC]
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
    • G09G3/3611—Control of matrices with row and column drivers
    • G09G3/3648—Control of matrices with row and column drivers using an active matrix
    • G09G3/3662—Control of matrices with row and column drivers using an active matrix using plasma-addressed liquid crystal displays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/10—AC-PDPs with at least one main electrode being out of contact with the plasma
    • H01J11/16—AC-PDPs with at least one main electrode being out of contact with the plasma with main electrodes provided inside or on the side face of the spacers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/20—Constructional details
    • H01J11/34—Vessels, containers or parts thereof, e.g. substrates
    • H01J11/36—Spacers, barriers, ribs, partitions or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/38—Cold-cathode tubes
    • H01J17/48—Cold-cathode tubes with more than one cathode or anode, e.g. sequence-discharge tube, counting tube, dekatron
    • H01J17/485—Plasma addressed liquid crystal displays [PALC]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
    • H01J9/142—Manufacture of electrodes or electrode systems of non-emitting electrodes of shadow-masks for colour television tubes
    • H01J9/146—Surface treatment, e.g. blackening, coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • H01J9/242—Spacers between faceplate and backplate
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133374—Constructional arrangements; Manufacturing methods for displaying permanent signs or marks

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Optics & Photonics (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Liquid Crystal (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Abstract

방전셀의 방전전극 표면상태에 기인하는 방전불량을 억제한다.
방전셀(2)은 한쪽의 기판(8)과, 그 표면에 인쇄소성된 방전전극(9)과, 이 한쪽의 기판(8)에 대해 소정의 공간(11)을 통해 접합된 다른 쪽의 기판(3)과, 이 공간(11)에 봉입된 이온화가능한 가스로 구성되어 있다. 방전전극(9)은 절연물이 제거된 청정한 표면을 가지는 동시에, 면방향 및 깊이방향에 걸쳐서 균일한 조성을 가진다. 양기판(3), (8)의 사이에 배리어리브(10)가 개재되어 있으며, 방전전극(9)의 일부와 겹치도록 인쇄 소성되어 있다. 그리고, 배리어리브(10)에 의해 피복되어 있지 않은 방전전극(9)의 노출된 부분으로부터 플라스마방전의 방해로 되는 절연물이 제거되어 있다.

Description

방전셀 및 그 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 관한 방전셀이 내장된 프랄스마어드레스 액정표시장치를 나타낸 모식적인 단면도.
제2도는 본 발명에 관한 방전셀의 방전전극패턴을 나타낸 모식적인 사시도.
제3도는 방전전극의 스퍼터에칭에 사용되는 처리장치를 나타낸 모식도.
제7도는 본 발명에 관한 방전전극의 AES 댑스프로파일을 나타낸 그래프.
제8도는 본 발명에 관한 방전전극의 조성을 나타낸 그래프.

Claims (11)

  1. 한쪽의 기판과, 그 표면에 인쇄소성된 방전전극과, 이 한족의 기판에 대해 소정의 공간을 통해 접합된 다른 쪽의 기판과, 이 공간에 봉입된 이온화가능한 가스를 구비한 방전셀로서, 상기 방전전극은 절연물이 제거된 청정한 표면을 가지는 동시에, 면방향 및 깊이방향에 걸쳐서 균일한 조성을 가지는 것을 특징으로 하는 방전셀.
  2. 제1항에 있어서, 양기판의 사이에 개재하고 또한 방전전극의 일부와 겹치도록 인쇄소성된 배리어리브를 구비하는 동시에, 이 방전전극의 노출된 잔부(殘部)로부터 절연물이 제거되어 있는 것을 특징으로 하는 방전셀.
  3. 한쪽의 기판의 표면에 방전전극을 인쇄소성하는 소성공정과, 이 방전전극의 표면을 청정화하여 절연물을 제거하여 표면과 내부에서 조성을 균일하게 하는 청정화공정과, 이 한쪽의 기판에 대해 소정의 공간을 통해 다른 쪽의 기판을 접합하여 이 공간에 이온화가능한 가스를 봉입하는 조립공정을 포함하는 것을 특징으로 하는 방전셀의 제조방법.
  4. 제3항에 있어서, 상기 청정화공정은 스퍼터에칭으로 방전전극 표면의 절연물을 제거하는 공정인 것을 특징으로 하는 방전셀의 제조방법.
  5. 제3항에 있어서, 상기 청정화공정은 활성가스 플라스마를 방전전극 포면에 작용시켜서 절연물을 분해제거하는 공정인 것을 특징으로 하는 방전셀의 제조방법.
  6. 제3항에 있어서, 상기 청정화공정은 샌드블라스트 또는 연마에 의해 방전 전극 표면의 절연물을 기계적으로 제거하는 공정인 것을 특징으로 하는 방전셀의 제조방법.
  7. 제3항에 있어서, 상기 청정화공정은 웨트에칭에 의해 방전전극 표면의 절연물을 화학적으로 제거하는 공정인 것을 특징으로 하는 방전셀의 제조방법.
  8. 제3항에 있어서, 상기 청정화공정은 소정의 포메이션가스 분위기하에서 방전전극 자체에 전압을 인가하여 에이징을 행함으로써 절연물을 제거하는 공정인 것을 특징으로 하는 방전셀의 제조방법.
  9. 제3항에 있어서, 상기 소성공정은 도전페이스트 및 절연페이스트를 중첩인쇄한 후, 동시에 소성하여 방전전극 및 배리어리브를 형성하는 공정인 것을 특징으로 하는 방전셀의 제조방법.
  10. 열신호전극을 구비하여 액정이 봉입된 액정셀과, 행방향전극을 구비하여 이온화가능한 가스가 봉입된 방전셀을 서로 적층한 플랫패널구조를 가진 플라스마어드레스 액정표시장치에 있어서, 상기 방전전극은 절연물이 제거된 청정한 표면을 가지는 동시에, 면방향 및 깊이방향에 걸쳐서 균일한 조서을 가지는 것을 특징으로 하는 플라스마어드레스 액정표시장치.
  11. 제10항에 있어서, 이 방전셀내에는 방전전극의 일부와 겹치도록 인쇄소성 된 배리어리브가 형성되어 있는 동시에, 이 방전전극의 노출된 잔부로부터 절연물이 제거되어 있는 것을 특징으로 하는 플라스마어드레스 액정표시장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019940003165A 1993-02-24 1994-02-23 방전셀및그제조방법 KR100318022B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5966793 1993-02-24
JP93-59,667 1993-02-24

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Publication Number Publication Date
KR940020145A true KR940020145A (ko) 1994-09-15
KR100318022B1 KR100318022B1 (ko) 2002-08-27

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US (1) US5667705A (ko)
EP (1) EP0613165B1 (ko)
KR (1) KR100318022B1 (ko)
DE (1) DE69403115T2 (ko)

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KR100596364B1 (ko) * 2004-05-31 2006-07-03 주식회사 엘지화학 감광성 수지 조성물 및 이를 이용하여 제조된 액정표시소자
KR100844375B1 (ko) 2007-01-16 2008-07-07 (주)아이씨디 알에프 차폐 구조를 갖는 플라즈마 처리 장치

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KR100318022B1 (ko) 2002-08-27
EP0613165B1 (en) 1997-05-14
DE69403115T2 (de) 1997-12-18
EP0613165A1 (en) 1994-08-31
DE69403115D1 (de) 1997-06-19
US5667705A (en) 1997-09-16

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