KR940008664U - 반도체 웨이퍼 세정장치 - Google Patents

반도체 웨이퍼 세정장치

Info

Publication number
KR940008664U
KR940008664U KR2019920018082U KR920018082U KR940008664U KR 940008664 U KR940008664 U KR 940008664U KR 2019920018082 U KR2019920018082 U KR 2019920018082U KR 920018082 U KR920018082 U KR 920018082U KR 940008664 U KR940008664 U KR 940008664U
Authority
KR
South Korea
Prior art keywords
cleaning device
semiconductor wafer
wafer cleaning
semiconductor
wafer
Prior art date
Application number
KR2019920018082U
Other languages
English (en)
Other versions
KR960000312Y1 (ko
Inventor
이만순
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR92018082U priority Critical patent/KR960000312Y1/ko
Publication of KR940008664U publication Critical patent/KR940008664U/ko
Application granted granted Critical
Publication of KR960000312Y1 publication Critical patent/KR960000312Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR92018082U 1992-09-23 1992-09-23 반도체 웨이퍼 세정장치 KR960000312Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR92018082U KR960000312Y1 (ko) 1992-09-23 1992-09-23 반도체 웨이퍼 세정장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR92018082U KR960000312Y1 (ko) 1992-09-23 1992-09-23 반도체 웨이퍼 세정장치

Publications (2)

Publication Number Publication Date
KR940008664U true KR940008664U (ko) 1994-04-21
KR960000312Y1 KR960000312Y1 (ko) 1996-01-05

Family

ID=19340517

Family Applications (1)

Application Number Title Priority Date Filing Date
KR92018082U KR960000312Y1 (ko) 1992-09-23 1992-09-23 반도체 웨이퍼 세정장치

Country Status (1)

Country Link
KR (1) KR960000312Y1 (ko)

Also Published As

Publication number Publication date
KR960000312Y1 (ko) 1996-01-05

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