KR940008068A - 멀티칩 모듈 조립 방법 및 장치 - Google Patents
멀티칩 모듈 조립 방법 및 장치 Download PDFInfo
- Publication number
- KR940008068A KR940008068A KR1019930017599A KR930017599A KR940008068A KR 940008068 A KR940008068 A KR 940008068A KR 1019930017599 A KR1019930017599 A KR 1019930017599A KR 930017599 A KR930017599 A KR 930017599A KR 940008068 A KR940008068 A KR 940008068A
- Authority
- KR
- South Korea
- Prior art keywords
- assembly method
- module assembly
- multichip module
- multichip
- module
- Prior art date
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/06—Solder feeding devices; Solder melting pans
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4867—Applying pastes or inks, e.g. screen printing
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3485—Applying solder paste, slurry or powder
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/113—Manufacturing methods by local deposition of the material of the bump connector
- H01L2224/1131—Manufacturing methods by local deposition of the material of the bump connector in liquid form
- H01L2224/1132—Screen printing, i.e. using a stencil
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/741—Apparatus for manufacturing means for bonding, e.g. connectors
- H01L2224/742—Apparatus for manufacturing bump connectors
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- H—ELECTRICITY
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- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8119—Arrangement of the bump connectors prior to mounting
- H01L2224/81192—Arrangement of the bump connectors prior to mounting wherein the bump connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/818—Bonding techniques
- H01L2224/81801—Soldering or alloying
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
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- H01L2924/01006—Carbon [C]
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- H01L2924/01014—Silicon [Si]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/01033—Arsenic [As]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/0105—Tin [Sn]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/01051—Antimony [Sb]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/01078—Platinum [Pt]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/014—Solder alloys
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
- H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19041—Component type being a capacitor
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19043—Component type being a resistor
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/30107—Inductance
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10621—Components characterised by their electrical contacts
- H05K2201/10674—Flip chip
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/04—Soldering or other types of metallurgic bonding
- H05K2203/048—Self-alignment during soldering; Terminals, pads or shape of solder adapted therefor
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1216—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by screen printing or stencil printing
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
- H05K3/3431—Leadless components
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
- H05K3/3431—Leadless components
- H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3463—Solder compositions in relation to features of the printed circuit board or the mounting process
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Mechanical Engineering (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Wire Bonding (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/940,157 US6077725A (en) | 1992-09-03 | 1992-09-03 | Method for assembling multichip modules |
US940,157 | 1992-09-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR940008068A true KR940008068A (ko) | 1994-04-28 |
KR100265190B1 KR100265190B1 (ko) | 2000-09-15 |
Family
ID=25474342
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930017599A KR100265190B1 (ko) | 1992-09-03 | 1993-09-03 | 멀티칩 모듈 조립 방법 및 장치 |
Country Status (5)
Country | Link |
---|---|
US (2) | US6077725A (ko) |
EP (1) | EP0586243B2 (ko) |
JP (1) | JPH06188290A (ko) |
KR (1) | KR100265190B1 (ko) |
DE (1) | DE69309197T3 (ko) |
Families Citing this family (58)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6227436B1 (en) | 1990-02-19 | 2001-05-08 | Hitachi, Ltd. | Method of fabricating an electronic circuit device and apparatus for performing the method |
US6471115B1 (en) | 1990-02-19 | 2002-10-29 | Hitachi, Ltd. | Process for manufacturing electronic circuit devices |
US5865365A (en) * | 1991-02-19 | 1999-02-02 | Hitachi, Ltd. | Method of fabricating an electronic circuit device |
JP3348528B2 (ja) * | 1994-07-20 | 2002-11-20 | 富士通株式会社 | 半導体装置の製造方法と半導体装置及び電子回路装置の製造方法と電子回路装置 |
US5842626A (en) * | 1995-03-31 | 1998-12-01 | Intel Corporation | Method for coupling surface mounted capacitors to semiconductor packages |
US5872051A (en) * | 1995-08-02 | 1999-02-16 | International Business Machines Corporation | Process for transferring material to semiconductor chip conductive pads using a transfer substrate |
DE59611449D1 (de) * | 1995-09-08 | 2007-12-20 | Fraunhofer Ges Forschung | Verfahren und vorrichtung zum testen eines chips |
US5886877A (en) * | 1995-10-13 | 1999-03-23 | Meiko Electronics Co., Ltd. | Circuit board, manufacturing method therefor, and bump-type contact head and semiconductor component packaging module using the circuit board |
US7166495B2 (en) * | 1996-02-20 | 2007-01-23 | Micron Technology, Inc. | Method of fabricating a multi-die semiconductor package assembly |
US5696031A (en) * | 1996-11-20 | 1997-12-09 | Micron Technology, Inc. | Device and method for stacking wire-bonded integrated circuit dice on flip-chip bonded integrated circuit dice |
JPH1013007A (ja) * | 1996-03-29 | 1998-01-16 | Ngk Spark Plug Co Ltd | 半田バンプを有する配線基板及びその製造方法及び平坦化治具 |
EP0824301A3 (en) * | 1996-08-09 | 1999-08-11 | Hitachi, Ltd. | Printed circuit board, IC card, and manufacturing method thereof |
DE19634646A1 (de) | 1996-08-27 | 1998-03-05 | Pac Tech Gmbh | Verfahren zur selektiven Belotung |
US6383891B1 (en) | 1996-11-06 | 2002-05-07 | Niigata Seimitsu Co., Ltd. | Method for forming bump and semiconductor device |
KR100368946B1 (ko) * | 1996-11-06 | 2003-01-24 | 니이가타 세이미츄 가부시끼가이샤 | 범프의 형성방법 및 반도체 장치 |
US5957370A (en) * | 1997-01-10 | 1999-09-28 | Integrated Device Technology, Inc. | Plating process for fine pitch die in wafer form |
DE19729587A1 (de) * | 1997-07-10 | 1999-01-14 | Siemens Ag | Verfahren zum Aufbringen von Lot auf Anschlußflächen einer Leiterplatte, Verfahren zur Herstellung eines mit Lot beschichteten Trägers für ein derartiges Verfahren sowie ein derartiger Träger |
US6441487B2 (en) | 1997-10-20 | 2002-08-27 | Flip Chip Technologies, L.L.C. | Chip scale package using large ductile solder balls |
US6225205B1 (en) * | 1998-01-22 | 2001-05-01 | Ricoh Microelectronics Company, Ltd. | Method of forming bump electrodes |
US6103549A (en) * | 1998-03-17 | 2000-08-15 | Advanced Micro Devices, Inc. | No clean flux for flip chip assembly |
US6664628B2 (en) * | 1998-07-13 | 2003-12-16 | Formfactor, Inc. | Electronic component overlapping dice of unsingulated semiconductor wafer |
US6528890B1 (en) | 1998-12-01 | 2003-03-04 | Micron Technology, Inc. | Circuit, method of adhering an integrated circuit device to a substrate, and method of forming a circuit |
US6274937B1 (en) | 1999-02-01 | 2001-08-14 | Micron Technology, Inc. | Silicon multi-chip module packaging with integrated passive components and method of making |
JP3828673B2 (ja) * | 1999-02-23 | 2006-10-04 | ローム株式会社 | 半導体装置 |
US6281576B1 (en) * | 1999-06-16 | 2001-08-28 | International Business Machines Corporation | Method of fabricating structure for chip micro-joining |
US6278181B1 (en) | 1999-06-28 | 2001-08-21 | Advanced Micro Devices, Inc. | Stacked multi-chip modules using C4 interconnect technology having improved thermal management |
US6249136B1 (en) | 1999-06-28 | 2001-06-19 | Advanced Micro Devices, Inc. | Bottom side C4 bumps for integrated circuits |
US6430058B1 (en) | 1999-12-02 | 2002-08-06 | Intel Corporation | Integrated circuit package |
US20020076910A1 (en) | 1999-12-15 | 2002-06-20 | Pace Benedict G. | High density electronic interconnection |
US6413849B1 (en) | 1999-12-28 | 2002-07-02 | Intel Corporation | Integrated circuit package with surface mounted pins on an organic substrate and method of fabrication therefor |
US6437436B2 (en) | 2000-01-20 | 2002-08-20 | Ang Technologies Inc. | Integrated circuit chip package with test points |
US7057292B1 (en) | 2000-05-19 | 2006-06-06 | Flipchip International, Llc | Solder bar for high power flip chips |
US6521486B1 (en) * | 2000-08-24 | 2003-02-18 | Advanced Micro Devices, Inc. | Method and system to reduce switching signal noise on a device and a device as result thereof |
US6333253B1 (en) * | 2000-08-24 | 2001-12-25 | Advanced Micro Devices, Inc. | Pattern-block flux deposition |
US6578755B1 (en) | 2000-09-22 | 2003-06-17 | Flip Chip Technologies, L.L.C. | Polymer collar for solder bumps |
GB2380964B (en) * | 2001-09-04 | 2005-01-12 | Multicore Solders Ltd | Lead-free solder paste |
JP2003133366A (ja) * | 2001-10-25 | 2003-05-09 | Texas Instr Japan Ltd | 半導体装置及びその製造方法 |
US20040000704A1 (en) * | 2002-07-01 | 2004-01-01 | George Tsao | Process for grid array assembly and electronic device made thereby |
US6933597B1 (en) * | 2002-07-09 | 2005-08-23 | National Semiconductor Corporation | Spacer with passive components for use in multi-chip modules |
US20040012094A1 (en) * | 2002-07-18 | 2004-01-22 | Harper Timothy V. | Flip-chip integrated circuit package and method of assembly |
US6659512B1 (en) | 2002-07-18 | 2003-12-09 | Hewlett-Packard Development Company, L.P. | Integrated circuit package employing flip-chip technology and method of assembly |
TWI220304B (en) * | 2003-06-20 | 2004-08-11 | Advanced Semiconductor Eng | Flip-chip package substrate and flip-chip bonding process thereof |
US8390126B2 (en) * | 2003-10-03 | 2013-03-05 | Motorola Mobility Llc | Method and arrangement for reduced thermal stress between substrates |
US7331500B2 (en) * | 2004-06-25 | 2008-02-19 | Intel Corporation | Solder bumps formation using solder paste with shape retaining attribute |
US7405093B2 (en) | 2004-08-18 | 2008-07-29 | Cree, Inc. | Methods of assembly for a semiconductor light emitting device package |
US7413110B2 (en) * | 2005-02-16 | 2008-08-19 | Motorola, Inc. | Method for reducing stress between substrates of differing materials |
US7233060B2 (en) * | 2005-02-23 | 2007-06-19 | Kingpak Technology Inc. | Module card structure |
US8703543B2 (en) * | 2009-07-14 | 2014-04-22 | Honeywell International Inc. | Vertical sensor assembly method |
US8482125B2 (en) | 2010-07-16 | 2013-07-09 | Qualcomm Incorporated | Conductive sidewall for microbumps |
US8514386B2 (en) * | 2011-05-25 | 2013-08-20 | International Business Machines Corporation | Technique for verifying the microstructure of lead-free interconnects in semiconductor assemblies |
US20130153645A1 (en) * | 2011-11-17 | 2013-06-20 | Princeton Lightwave, Inc. | Process for Hybrid Integration of Focal Plane Arrays |
US9704780B2 (en) | 2012-12-11 | 2017-07-11 | STATS ChipPAC, Pte. Ltd. | Semiconductor device and method of forming low profile fan-out package with vertical interconnection units |
US9240331B2 (en) | 2012-12-20 | 2016-01-19 | Stats Chippac, Ltd. | Semiconductor device and method of making bumpless flipchip interconnect structures |
US9245770B2 (en) | 2012-12-20 | 2016-01-26 | Stats Chippac, Ltd. | Semiconductor device and method of simultaneous molding and thermalcompression bonding |
US9287204B2 (en) | 2012-12-20 | 2016-03-15 | Stats Chippac, Ltd. | Semiconductor device and method of bonding semiconductor die to substrate in reconstituted wafer form |
JP6320066B2 (ja) * | 2014-02-13 | 2018-05-09 | イビデン株式会社 | ボール搭載用マスクおよびボール搭載装置 |
JP6367084B2 (ja) | 2014-10-30 | 2018-08-01 | 株式会社東芝 | 半導体チップの接合方法及び半導体チップの接合装置 |
CN112366181B (zh) * | 2020-10-28 | 2022-04-12 | 西安微电子技术研究所 | 一种若干个多芯片/硅转接板组件的倒装焊叠层组装方法 |
Family Cites Families (60)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3716907A (en) * | 1970-11-20 | 1973-02-20 | Harris Intertype Corp | Method of fabrication of semiconductor device package |
US3763550A (en) * | 1970-12-03 | 1973-10-09 | Gen Motors Corp | Geometry for a pnp silicon transistor with overlay contacts |
JPS5279773A (en) * | 1975-12-26 | 1977-07-05 | Seiko Epson Corp | Bonding method of ic |
US4067104A (en) * | 1977-02-24 | 1978-01-10 | Rockwell International Corporation | Method of fabricating an array of flexible metallic interconnects for coupling microelectronics components |
JPS5618454A (en) * | 1979-07-25 | 1981-02-21 | Hitachi Ltd | Hybrid integrated circuit |
FR2492164B1 (fr) * | 1980-10-15 | 1987-01-23 | Radiotechnique Compelec | Procede de realisation simultanee de liaisons electriques multiples, notamment pour le raccordement electrique d'une micro-plaquette de semiconducteurs |
JPS58102533A (ja) * | 1981-12-14 | 1983-06-18 | Mitsubishi Electric Corp | 混成集積回路装置の製造方法 |
JPS59111338A (ja) * | 1982-12-16 | 1984-06-27 | Matsushita Electric Ind Co Ltd | 回路基板への半導体素子の接着方法 |
JPS607139A (ja) * | 1983-06-24 | 1985-01-14 | Matsushita Electric Ind Co Ltd | ボンデイング方法 |
JPS6046039A (ja) * | 1983-08-23 | 1985-03-12 | Sharp Corp | 半導体素子のボンデング方法 |
FR2567709B1 (fr) * | 1984-07-11 | 1990-11-09 | Nec Corp | Ensemble a paillette comprenant un substrat de cablage multi-couche |
US4509994A (en) * | 1984-09-04 | 1985-04-09 | Mcdonnell Douglas Corporation | Solder composition for high-density circuits |
US4654752A (en) * | 1984-12-04 | 1987-03-31 | Kyle James C | Terminal assembly and method of making terminal assembly |
US4609729A (en) * | 1985-04-03 | 1986-09-02 | The Dow Chemical Company | Organosoluble C3 -C4 hydroxyalkyl ethyl cellulose ethers |
US4784310A (en) * | 1986-03-24 | 1988-11-15 | General Motors Corporation | Method for screen printing solder paste onto a substrate with device premounted thereon |
US4878611A (en) * | 1986-05-30 | 1989-11-07 | American Telephone And Telegraph Company, At&T Bell Laboratories | Process for controlling solder joint geometry when surface mounting a leadless integrated circuit package on a substrate |
FR2604029B1 (fr) * | 1986-09-16 | 1994-08-05 | Toshiba Kk | Puce de circuit integre possedant des bornes de sortie ameliorees |
JPS63132795A (ja) * | 1986-11-25 | 1988-06-04 | Asahi Chem Ind Co Ltd | ハンダフラツクス |
GB8628916D0 (en) * | 1986-12-03 | 1987-01-07 | Multicore Solders Ltd | Solder composition |
US4942140A (en) * | 1987-03-25 | 1990-07-17 | Mitsubishi Denki Kabushiki Kaisha | Method of packaging semiconductor device |
JPS6459944A (en) * | 1987-08-31 | 1989-03-07 | Fuji Xerox Co Ltd | Mounting method for electronic component |
US4872261A (en) * | 1987-12-11 | 1989-10-10 | Digital Equipment Corporation | Method of and apparatus for surface mounting electronic components onto a printed wiring board |
US4898117A (en) * | 1988-04-15 | 1990-02-06 | International Business Machines Corporation | Solder deposition system |
JPH01273326A (ja) * | 1988-04-25 | 1989-11-01 | Matsushita Electric Works Ltd | 半導体装置の製法 |
US5032543A (en) * | 1988-06-17 | 1991-07-16 | Massachusetts Institute Of Technology | Coplanar packaging techniques for multichip circuits |
JPH0290529A (ja) * | 1988-09-28 | 1990-03-30 | Hitachi Ltd | 半導体装置の製造方法 |
JPH02133937A (ja) * | 1988-11-15 | 1990-05-23 | Alps Electric Co Ltd | Icのベアチップ実装方法 |
US5001542A (en) * | 1988-12-05 | 1991-03-19 | Hitachi Chemical Company | Composition for circuit connection, method for connection using the same, and connected structure of semiconductor chips |
WO1990007792A1 (en) * | 1989-01-03 | 1990-07-12 | Motorola, Inc. | Method of making high density solder bumps and a substrate socket for high density solder bumps |
US5024372A (en) * | 1989-01-03 | 1991-06-18 | Motorola, Inc. | Method of making high density solder bumps and a substrate socket for high density solder bumps |
US5046415A (en) * | 1989-01-06 | 1991-09-10 | Motorola, Inc. | Composite stencil for screen printing |
GB8900381D0 (en) * | 1989-01-09 | 1989-03-08 | Cookson Group Plc | Flux composition |
JPH02188936A (ja) * | 1989-01-17 | 1990-07-25 | Seiko Epson Corp | 半導体装置及びその製造方法 |
FR2646558B1 (fr) * | 1989-04-26 | 1994-04-01 | Commissariat A Energie Atomique | Procede et machine d'interconnexion de composants electriques par elements de soudure |
JPH0366139A (ja) * | 1989-08-04 | 1991-03-20 | Murata Mfg Co Ltd | 半導体チップの実装方法 |
US4991000A (en) * | 1989-08-31 | 1991-02-05 | Bone Robert L | Vertically interconnected integrated circuit chip system |
US5074947A (en) * | 1989-12-18 | 1991-12-24 | Epoxy Technology, Inc. | Flip chip technology using electrically conductive polymers and dielectrics |
JPH03222340A (ja) * | 1990-01-26 | 1991-10-01 | Matsushita Electric Works Ltd | 半導体装置実装用回路基板 |
JPH03273655A (ja) * | 1990-03-22 | 1991-12-04 | Nec Corp | 混成集積回路装置 |
JP2821229B2 (ja) * | 1990-03-30 | 1998-11-05 | 株式会社日立製作所 | 電子回路装置 |
JPH043992A (ja) * | 1990-04-20 | 1992-01-08 | Nec Corp | 半田印刷方法 |
JPH046841A (ja) * | 1990-04-24 | 1992-01-10 | Matsushita Electric Works Ltd | 半導体装置の実装構造 |
US5071359A (en) * | 1990-04-27 | 1991-12-10 | Rogers Corporation | Array connector |
JPH0429338A (ja) * | 1990-05-24 | 1992-01-31 | Nippon Mektron Ltd | Icの搭載用回路基板及びその搭載方法 |
US5009724A (en) * | 1990-07-02 | 1991-04-23 | At&T Bell Laboratories | Soldering flux and method of its use in fabricating and assembling circuit boards |
US5223033A (en) * | 1990-07-02 | 1993-06-29 | Cookson Group Plc | Paste formulations for use in the electronics industry |
ZA915965B (en) * | 1990-07-30 | 1992-04-29 | South Africa Ind Dev Corp | Attaching integrated circuits to circuit boards |
US5088189A (en) * | 1990-08-31 | 1992-02-18 | Federated Fry Metals | Electronic manufacturing process |
US5130768A (en) * | 1990-12-07 | 1992-07-14 | Digital Equipment Corporation | Compact, high-density packaging apparatus for high performance semiconductor devices |
JPH04220192A (ja) * | 1990-12-14 | 1992-08-11 | Senju Metal Ind Co Ltd | 低残渣はんだペースト |
US5109320A (en) * | 1990-12-24 | 1992-04-28 | Westinghouse Electric Corp. | System for connecting integrated circuit dies to a printed wiring board |
US5150832A (en) * | 1991-06-28 | 1992-09-29 | At&T Bell Laboratories | Solder paste |
US5315241A (en) * | 1991-09-18 | 1994-05-24 | Sgs-Thomson Microelectronics, Inc. | Method for testing integrated circuits |
US5245750A (en) * | 1992-02-28 | 1993-09-21 | Hughes Aircraft Company | Method of connecting a spaced ic chip to a conductor and the article thereby obtained |
JP3215424B2 (ja) * | 1992-03-24 | 2001-10-09 | ユニシス・コーポレイション | 微細自己整合特性を有する集積回路モジュール |
US5246880A (en) * | 1992-04-27 | 1993-09-21 | Eastman Kodak Company | Method for creating substrate electrodes for flip chip and other applications |
US5197655A (en) * | 1992-06-05 | 1993-03-30 | International Business Machines Corporation | Fine pitch solder application |
US5313366A (en) * | 1992-08-12 | 1994-05-17 | International Business Machines Corporation | Direct chip attach module (DCAM) |
US5261593A (en) * | 1992-08-19 | 1993-11-16 | Sheldahl, Inc. | Direct application of unpackaged integrated circuit to flexible printed circuit |
US5346118A (en) * | 1993-09-28 | 1994-09-13 | At&T Bell Laboratories | Surface mount solder assembly of leadless integrated circuit packages to substrates |
-
1992
- 1992-09-03 US US07/940,157 patent/US6077725A/en not_active Expired - Lifetime
-
1993
- 1993-09-01 DE DE69309197T patent/DE69309197T3/de not_active Expired - Fee Related
- 1993-09-01 EP EP93306917A patent/EP0586243B2/en not_active Expired - Lifetime
- 1993-09-03 JP JP5219499A patent/JPH06188290A/ja active Pending
- 1993-09-03 KR KR1019930017599A patent/KR100265190B1/ko not_active IP Right Cessation
-
1995
- 1995-06-07 US US08/479,587 patent/US5564617A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH06188290A (ja) | 1994-07-08 |
EP0586243A1 (en) | 1994-03-09 |
DE69309197T2 (de) | 1997-10-16 |
DE69309197D1 (de) | 1997-04-30 |
EP0586243B1 (en) | 1997-03-26 |
KR100265190B1 (ko) | 2000-09-15 |
DE69309197T3 (de) | 2001-03-22 |
EP0586243B2 (en) | 2000-11-15 |
US6077725A (en) | 2000-06-20 |
US5564617A (en) | 1996-10-15 |
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