KR940005702B1 - 웨이퍼 이재구(Wafer 移載具) - Google Patents

웨이퍼 이재구(Wafer 移載具) Download PDF

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Publication number
KR940005702B1
KR940005702B1 KR1019860002754A KR860002754A KR940005702B1 KR 940005702 B1 KR940005702 B1 KR 940005702B1 KR 1019860002754 A KR1019860002754 A KR 1019860002754A KR 860002754 A KR860002754 A KR 860002754A KR 940005702 B1 KR940005702 B1 KR 940005702B1
Authority
KR
South Korea
Prior art keywords
wafer
holding
semiconductor
boat
semiconductor wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019860002754A
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English (en)
Korean (ko)
Other versions
KR860008593A (ko
Inventor
료오스께 사또오
Original Assignee
쏘니 가부시기가이샤
오오가 노리오
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 쏘니 가부시기가이샤, 오오가 노리오 filed Critical 쏘니 가부시기가이샤
Publication of KR860008593A publication Critical patent/KR860008593A/ko
Application granted granted Critical
Publication of KR940005702B1 publication Critical patent/KR940005702B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/15—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S294/00—Handling: hand and hoist-line implements
    • Y10S294/902—Gripping element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
    • Y10S414/138—Wafers positioned vertically within cassette
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
KR1019860002754A 1985-04-22 1986-04-11 웨이퍼 이재구(Wafer 移載具) Expired - Fee Related KR940005702B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP60085953A JPS61244040A (ja) 1985-04-22 1985-04-22 ウエハ移載具
JP85953 1985-04-22
JP85-85953 1985-04-22

Publications (2)

Publication Number Publication Date
KR860008593A KR860008593A (ko) 1986-11-17
KR940005702B1 true KR940005702B1 (ko) 1994-06-23

Family

ID=13873117

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019860002754A Expired - Fee Related KR940005702B1 (ko) 1985-04-22 1986-04-11 웨이퍼 이재구(Wafer 移載具)

Country Status (3)

Country Link
US (1) US4801168A (enExample)
JP (1) JPS61244040A (enExample)
KR (1) KR940005702B1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0646647B2 (ja) * 1988-03-11 1994-06-15 株式会社東芝 半導体ウェハのピッチ切換え装置
US5125784A (en) * 1988-03-11 1992-06-30 Tel Sagami Limited Wafers transfer device
US5203666A (en) * 1988-05-18 1993-04-20 Fleetwood Systems, Inc. Automatic tray loading, unloading and storage system
IT1228105B (it) * 1988-12-20 1991-05-28 Sgs Thomson Microelectronics Pinza per la movimentazione, vantaggiosamente robotizzata, di una o piu' fette di silicio e/o di un supporto di tali fette
JP3348936B2 (ja) * 1993-10-21 2002-11-20 東京エレクトロン株式会社 縦型熱処理装置
JP3125199B2 (ja) * 1993-03-18 2001-01-15 東京エレクトロン株式会社 縦型熱処理装置
US5458688A (en) * 1993-03-09 1995-10-17 Tokyo Electron Kabushiki Kaisha Heat treatment boat
JP2758558B2 (ja) * 1993-12-10 1998-05-28 信越半導体株式会社 ウェーハハンドリング装置
KR100226489B1 (ko) * 1996-12-28 1999-10-15 김영환 웨이퍼 지지 및 이송 기구
US6073828A (en) * 1998-06-30 2000-06-13 Lam Research Corporation End effector for substrate handling and method for making the same
NL1014472C2 (nl) 2000-02-23 2001-08-24 Fico Bv Inrichting, samenstel en werkwijze voor het bewerken van elektronische componenten.
EP1219397A1 (en) * 2000-12-27 2002-07-03 Optical Technologies Italia S.p.A. Method and apparatus for loading, unloading and transferring semiconductor bars
KR20020076819A (ko) * 2001-03-30 2002-10-11 (주)케이.씨.텍 기판을 파지하는 장치 및 이를 갖는 핸들링 장치
KR100420124B1 (ko) * 2001-12-05 2004-03-02 삼성전자주식회사 부품 교체를 위한 공구
KR100949502B1 (ko) 2005-06-20 2010-03-24 엘지디스플레이 주식회사 액정표시장치 제조 공정용 기판 반송장치
JP5681412B2 (ja) * 2010-08-27 2015-03-11 川崎重工業株式会社 板状部材収納用ラック、板状部材移載設備、及び板状部材収納方法
US8783747B2 (en) * 2011-07-08 2014-07-22 Ajou University Industry-Academic Cooperation Foundation Laminate structure generator, and stacking method and apparatus for secondary cell including the same

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4023691A (en) * 1975-09-15 1977-05-17 United States Fused Quartz Company, Inc. Method of transferring semi-conductor discs by a hinged transfer carrier
GB2049616B (en) * 1979-05-22 1982-12-22 Marconi Co Ltd Manipulator mechanisms
US4466766A (en) * 1981-05-20 1984-08-21 Ruska Instrument Corporation Transfer apparatus
SU1096191A1 (ru) * 1982-11-24 1984-06-07 Московский Лесотехнический Институт Грейфер В.С.Наймана системы МЛТИ
US4573851A (en) * 1983-05-18 1986-03-04 Microglass, Inc. Semiconductor wafer transfer apparatus and method
US4568234A (en) * 1983-05-23 1986-02-04 Asq Boats, Inc. Wafer transfer apparatus
US4611966A (en) * 1984-05-30 1986-09-16 Johnson Lester R Apparatus for transferring semiconductor wafers

Also Published As

Publication number Publication date
US4801168A (en) 1989-01-31
JPH0577181B2 (enExample) 1993-10-26
KR860008593A (ko) 1986-11-17
JPS61244040A (ja) 1986-10-30

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