KR930020179A - 얇은 필름 간섭 필터 및 그의 생산 방법 - Google Patents
얇은 필름 간섭 필터 및 그의 생산 방법 Download PDFInfo
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- KR930020179A KR930020179A KR1019930003113A KR930003113A KR930020179A KR 930020179 A KR930020179 A KR 930020179A KR 1019930003113 A KR1019930003113 A KR 1019930003113A KR 930003113 A KR930003113 A KR 930003113A KR 930020179 A KR930020179 A KR 930020179A
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- dielectric layer
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- interference filter
- thin film
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- 239000010409 thin film Substances 0.000 title claims description 19
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract 13
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract 13
- 229910052751 metal Inorganic materials 0.000 claims abstract 12
- 239000002184 metal Substances 0.000 claims abstract 12
- 239000002131 composite material Substances 0.000 claims abstract 10
- -1 hafnium nitride Chemical class 0.000 claims abstract 9
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 claims abstract 9
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims abstract 5
- 229910052735 hafnium Inorganic materials 0.000 claims abstract 5
- 229910052710 silicon Inorganic materials 0.000 claims 5
- 239000010703 silicon Substances 0.000 claims 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 4
- 150000004767 nitrides Chemical class 0.000 claims 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 2
- 229910052804 chromium Inorganic materials 0.000 claims 2
- 239000011651 chromium Substances 0.000 claims 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 2
- 229910052737 gold Inorganic materials 0.000 claims 2
- 239000010931 gold Substances 0.000 claims 2
- 230000007935 neutral effect Effects 0.000 claims 2
- 229910052759 nickel Inorganic materials 0.000 claims 2
- 229910052697 platinum Inorganic materials 0.000 claims 2
- 238000004544 sputter deposition Methods 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 1
- 238000013459 approach Methods 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 239000003989 dielectric material Substances 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- 230000002285 radioactive effect Effects 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 abstract 4
- 239000012790 adhesive layer Substances 0.000 abstract 1
- 230000006911 nucleation Effects 0.000 abstract 1
- 238000010899 nucleation Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
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- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
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- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3652—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/281—Interference filters designed for the infrared light
- G02B5/282—Interference filters designed for the infrared light reflecting for infrared and transparent for visible light, e.g. heat reflectors, laser protection
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- C03C2217/40—Coatings comprising at least one inhomogeneous layer
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- C03C2217/00—Coatings on glass
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- Surface Treatment Of Glass (AREA)
Abstract
입사 태양광의 많은 분량을 반사하는 한편 가시광선의 원하는 분량을 투과할 수 있는 적외선 반사 간섭 필터가 제공된다. 필터는 먼저 유전층, 그다음 부분적으로 반사성인 금속 층, 및 마지막으로 외부보호 유전층으로 코우팅된 투명한 지지체로 구성된다. 게다가, 각 금속-유전 접촉면 사이에 접착을 용이하게 하고 화학 및 기계적 내성을 개선하는 핵 형성 또는 접착제 층을 부착한다. 간섭 필터는 내구성이고 전영역의 광학 및 전기적 특성을 제공하도록 개질할수 있다. 유전층은 질화 지르코늄, 질화 티타늄, 및/또는 질화 하프늄과 함께 질화 규소로 구성되는 복합 필름으로 구성될 수 있다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1a도는 본 발명에 따라 생산된 5층 고안물인 얇은-필름 간섭 필터의 단면도이다.
제2도는 음극 조리물의 단면도이다.
Claims (18)
- 투명한 지지체 ; 대략 2.0 내지 2.7범위내의 굴절율을 갖는 첫번째 실질적으로 투명한 유전층 ; 첫번째 금속 프로코우트 층 ; 부분적으로 반사성인 금속 층 ; 두번째 프리코우트 층 ; 두번째 프리코우트 층 ; 두번째 프리코우트 층 ; 및 두번째 실질적으로 투명한 유전층으로 구성되는, 실질적으로 중성의 가시광선 반사 색을 갖는 얇은 필름 간섭 필터.
- 제1항에 있어서, 상기 첫번째 유전층이 산화 티타늄으로 구성되는 얇은 필름 간섭 필터.
- 제1항에 있어서, 상기 첫번째 유전층이 질화 규소로 구성되는 얇은 필름 간섭 필터.
- 제1항에 있어서, 상기 첫번째 유전층이 질화 규소 및 질화 지르코늄으로 구성되는 복합재료인 얇은 필름 간섭 필터.
- 제1항에 있어서, 상기 첫번째 유전층이 질화지르코늄, 질화 티타늄, 및 질화 하프늄으로 구성된 군으로 부터 선택된 하나 이상의 다른 질화물 및 질화 규소로 구성되는 복합재료이고, 대략 60-95중량%의 질화규소를 함유하는 얇은 필름 간섭 필터.
- 제2항에 있어서, 상기 두번째 유전층이 질화 규소로 구성되며, 첫번째 유전층이 대략 200-500Å 범위의 두께를 갖고 두번째 유전층이 대략 350-500Å 범위의 두께를 갖는 얇은 필름 간섭 필터.
- 제2항에 있어서, 상기 두번째 유전층이 질화규소 및 질화지르코늄으로 구성된 복합재료이며, 첫번째 유전층이 대략 200-500Å 범위의 두께를 갖고 두번째 유전층이 대략 300-500Å 범위의 두께를 갖는 얇은 필름 간섭 필터.
- 제2항에 있어서, 상기 두번째 유전층이 질화 지르코늄, 질화티타늄, 및 질화 하프늄으로 구성된 군으로 부터 선택된 하나 이상의 다른 질화물 및 질화 규소로 구성되는 복합재료이고, 대략 60-95중량%의 질화규소를 함유하며, 첫번째 유전층이 대략 200-500Å 범위의 두께를 갖고 두번째 유전층이 대략 300-500Å 범위의 두께를 갖는 얇은 필름 간섭 필터.
- 제3항에 있어서, 상기 두번째 유전층이 질화규소로 구성되며, 첫번째 유전층이 대략 200-500Å 범위의 두께를 갖고 두번째 유전층이 대략 350-500Å 범위의 두께를 갖는 얇은 필름 간섭 필터.
- 제3항에 있어서, 상기 두번째 유전층이 질화 규소 및 질화 지르코늄으로 구성되는 복합재료이며, 첫번째 유전층이 대략 200-500Å 범위의 두께를 갖고 두번째 유전층이 대략 300-500Å 범위의 두께를 갖는 얇은 필름 간섭 필터.
- 제3항에 있어서, 상기 두번째 유전층이 질화 지르코늄, 질화 티타늄, 및 질화 하프늄으로 구성된 군으로부터 선택된 하나 이상의 다른 질화물 및 질화 규소로 구성되는 복합재료이고, 대략 60-95중량%의 질화규소를 함유하며, 첫번째 유전층이 대략 200-500Å 범위의 두께를 갖고 두번째 유전층이 대략 300-500Å 범위의 두께를 갖는 얇은 필름 간섭 필터.
- 제5항에 있어서, 상기 두번째 유전층이 질화 규소로 구성되며, 첫번째 유전층이 대략 200-500Å 범위의 두께를 갖고 두번째 유전층이 대략 350-500Å 범위의 두께를 갖는 얇은 필름 간섭 필터.
- 제5항에 있어서, 상기 두번째 유전층이 질화규소 및 질화 지르코늄으로 구성되는 복합재료이며, 첫번째 유전층이 대략 200-500Å 범위의 두께를 갖고 두번째 유전층이 대략 300-500Å 범위의 두께를 갖는 얇은 필름 간섭 필터.
- 제5항에 있어서, 상기 두번째 유전층이 질화 지르코늄, 질화 티타늄, 및 질화 하프늄으로 구성된 군으로부터 선택된 하나 이상의 다른 질화물 및 질화 규소로 구성되는 복합재료이고, 대략 60-95중량%의 질화 규소를 함유하며, 첫번째 유전층이 대략 200-500Å 범위의 두께를 갖고 두번째 유전층이 대략 300-500Å 범위의 두께를 갖는 얇은 필름 간섭 필터.
- 제8, 11, 또는 14항중 어느 한 항에 있어서, 하나 또는 둘다의 금속 프리코우트 층이 니켈, 크롬, 텅스텐, 및 백금으로 구성된 군으로부터 선택된 금속으로 부터 형성되고, 상기 부분적으로 방사성인 금속 층이 은, 금, 구리 및 백금으로 구성도니 군으로부터 선택된 금속로부터 형성되는 얇은 필름 간섭 필터.
- 제15항에 있어서, 하나 또는 둘다의 프리코우트 층이 금속 필름이며, 이때, 금속 요소가 대략 80-95중량%의 니켈 및 5-20%의 크롬으로 구성되는 얇은 필름 간섭 필터.
- 차례로, 대략 2.0-2.7 범위내의 굴절율을 갖는 첫번째 실질적으로 투명한 유전층을 지지체 상에 반동적으로 스퍼터링하고; 첫번째 금소 프리코우트 층을 부착시키고; 부분적으로 반사성인 금속 층을 부착시키고; 두번째 금속 프리코우트 층을 부착시키고; 및 두번째 실질적으로 투명한 유전층을 상기 금속 프리코우트 층상에 반동적으로 스퍼터링하는 단계들로 구성되는, 투명한 지지체 상에 실질적으로 중성의 가시광선 반사 색을 갖는, 내구성인 얇은 필름 간섭 필터를 생산하는 방법.
- 제17항에 있어서, 상기 두번째 유전층을 반동적으로 스퍼터링하는 단계들이 규소로 코우팅된 회전가능한 타겟을 갖고 상기 지지체에 대해 직각으로부터 대략 30°내지 80°의 각도로 배치된 자기 장치를 갖는 원통형 마그네트론을 제공하고; 지지체가 타겟에 접근할때 타켓으로부터 반동적으로 스퍼터링된 유전 물질이 지지체 상에 집중되도록 회전가능한 타겟을 향하여 상기 지지체를 옮기는 단계들로 구성되는 내구성 간섭 필터의 생산 방법.※ 참고사항 : 최초 출원된 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US84622492A | 1992-03-04 | 1992-03-04 | |
| US7/846,224 | 1992-03-04 |
Publications (1)
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|---|---|
| KR930020179A true KR930020179A (ko) | 1993-10-19 |
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Family Applications (1)
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| KR1019930003113A KR930020179A (ko) | 1992-03-04 | 1993-03-03 | 얇은 필름 간섭 필터 및 그의 생산 방법 |
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| Country | Link |
|---|---|
| EP (1) | EP0560534A1 (ko) |
| JP (1) | JPH063523A (ko) |
| KR (1) | KR930020179A (ko) |
| AU (1) | AU657014B2 (ko) |
| CA (1) | CA2084537A1 (ko) |
| FI (1) | FI930941A (ko) |
| MX (1) | MX9300283A (ko) |
| NO (1) | NO924849L (ko) |
| TW (1) | TW221703B (ko) |
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| CA2120875C (en) * | 1993-04-28 | 1999-07-06 | The Boc Group, Inc. | Durable low-emissivity solar control thin film coating |
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| US5514476A (en) * | 1994-12-15 | 1996-05-07 | Guardian Industries Corp. | Low-E glass coating system and insulating glass units made therefrom |
| AU680786B2 (en) * | 1995-06-07 | 1997-08-07 | Guardian Industries Corporation | Heat treatable, durable, IR-reflecting sputter-coated glasses and method of making same |
| DE19520843A1 (de) * | 1995-06-08 | 1996-12-12 | Leybold Ag | Scheibe aus durchscheinendem Werkstoff sowie Verfahren zu ihrer Herstellung |
| US5770321A (en) * | 1995-11-02 | 1998-06-23 | Guardian Industries Corp. | Neutral, high visible, durable low-e glass coating system and insulating glass units made therefrom |
| US6316111B1 (en) * | 1996-03-01 | 2001-11-13 | Cardinal Cg Company | Heat-emperable coated glass article |
| US6132881A (en) * | 1997-09-16 | 2000-10-17 | Guardian Industries Corp. | High light transmission, low-E sputter coated layer systems and insulated glass units made therefrom |
| US6592996B1 (en) | 1998-02-06 | 2003-07-15 | Nippon Sheet Glass Co., Ltd. | Solar-shading light-transmissive panel and solar-shading multi-layer light-transmissive panel using same |
| JPH11228185A (ja) * | 1998-02-06 | 1999-08-24 | Nippon Sheet Glass Co Ltd | 日射遮蔽性透光板およびこれを用いた日射遮蔽性複層透光板 |
| JP3721507B2 (ja) | 1998-11-24 | 2005-11-30 | Ｊｆｅスチール株式会社 | バリ取り方法およびその装置 |
| FR2795745B1 (fr) | 1999-06-30 | 2001-08-03 | Saint Gobain Vitrage | Procede de depot d'une couche a base de tungstene et/ou de molybdene sur un substrat verrier, ceramique ou vitroceramique, et substrat ainsi revetu |
| US6514620B1 (en) * | 1999-12-06 | 2003-02-04 | Guardian Industries Corp. | Matchable low-E I G units and laminates and methods of making same |
| US6707610B1 (en) * | 2002-09-20 | 2004-03-16 | Huper Optik International Pte Ltd | Reducing the susceptibility of titanium nitride optical layers to crack |
| CN1324332C (zh) * | 2004-06-14 | 2007-07-04 | 元太科技工业股份有限公司 | 彩色滤光片 |
| AU2007335232B2 (en) * | 2006-12-19 | 2012-12-06 | Ellex Medical Pty Ltd | Beam blocking and combining optic |
| US7655313B2 (en) | 2007-03-15 | 2010-02-02 | Guardian Industries Corp. | Low-E coated articles and methods of making same |
| JP4858650B2 (ja) * | 2010-03-02 | 2012-01-18 | ソニー株式会社 | 光学体、窓材、建具および日射遮蔽装置 |
| FR2988387B1 (fr) | 2012-03-21 | 2017-06-16 | Saint Gobain | Vitrage de controle solaire |
| TWI549811B (zh) * | 2013-07-23 | 2016-09-21 | 大立光電股份有限公司 | 紅外線濾光元件 |
| FR3054892A1 (fr) * | 2016-08-02 | 2018-02-09 | Saint Gobain | Substrat muni d'un empilement a proprietes thermiques comportant au moins une couche comprenant du nitrure de silicium-zirconium enrichi en zirconium, son utilisation et sa fabrication. |
| US10138159B2 (en) | 2017-03-09 | 2018-11-27 | Guardian Glass, LLC | Coated article having low-E coating with IR reflecting layer(s) and high index nitrided dielectric film having multiple layers |
| JP7171211B2 (ja) * | 2017-03-30 | 2022-11-15 | 日東電工株式会社 | 遮熱断熱基板 |
| WO2018181433A1 (ja) * | 2017-03-30 | 2018-10-04 | 日東電工株式会社 | 遮熱断熱基板 |
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| US5069968A (en) * | 1990-12-20 | 1991-12-03 | Ford Motor Company | Laminated glazing unit having improved interfacial adhesion |
-
1992
- 1992-12-03 TW TW081109700A patent/TW221703B/zh active
- 1992-12-04 AU AU29890/92A patent/AU657014B2/en not_active Ceased
- 1992-12-04 CA CA002084537A patent/CA2084537A1/en not_active Abandoned
- 1992-12-15 NO NO92924849A patent/NO924849L/no unknown
-
1993
- 1993-01-20 MX MX9300283A patent/MX9300283A/es not_active IP Right Cessation
- 1993-03-01 JP JP5039876A patent/JPH063523A/ja active Pending
- 1993-03-03 KR KR1019930003113A patent/KR930020179A/ko not_active Application Discontinuation
- 1993-03-03 FI FI930941A patent/FI930941A/fi not_active Application Discontinuation
- 1993-03-04 EP EP93301635A patent/EP0560534A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| AU657014B2 (en) | 1995-02-23 |
| EP0560534A1 (en) | 1993-09-15 |
| FI930941A (fi) | 1993-09-05 |
| FI930941A0 (fi) | 1993-03-03 |
| JPH063523A (ja) | 1994-01-14 |
| AU2989092A (en) | 1993-09-09 |
| MX9300283A (es) | 1993-09-01 |
| NO924849L (no) | 1993-09-06 |
| NO924849D0 (no) | 1992-12-15 |
| CA2084537A1 (en) | 1993-09-05 |
| TW221703B (ko) | 1994-03-11 |
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