KR920018847A - Bi-Sr-Ca-Cu-O계 초전도 박막과 그의 제조방법 - Google Patents
Bi-Sr-Ca-Cu-O계 초전도 박막과 그의 제조방법 Download PDFInfo
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- KR920018847A KR920018847A KR1019920004150A KR920004150A KR920018847A KR 920018847 A KR920018847 A KR 920018847A KR 1019920004150 A KR1019920004150 A KR 1019920004150A KR 920004150 A KR920004150 A KR 920004150A KR 920018847 A KR920018847 A KR 920018847A
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- Prior art keywords
- thin film
- superconducting thin
- unit cells
- atom
- based superconducting
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- 239000010409 thin film Substances 0.000 title claims description 8
- 229910015901 Bi-Sr-Ca-Cu-O Inorganic materials 0.000 title claims description 6
- 238000004519 manufacturing process Methods 0.000 title claims 2
- 238000000034 method Methods 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 4
- 229910052797 bismuth Inorganic materials 0.000 claims 3
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims 3
- 229910052712 strontium Inorganic materials 0.000 claims 3
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims 3
- 229910014454 Ca-Cu Inorganic materials 0.000 claims 1
- 229910004247 CaCu Inorganic materials 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/80—Constructional details
- H10N60/85—Superconducting active materials
- H10N60/855—Ceramic superconductors
- H10N60/857—Ceramic superconductors comprising copper oxide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/002—Controlling or regulating
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/22—Complex oxides
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/22—Complex oxides
- C30B29/225—Complex oxides based on rare earth copper oxides, e.g. high T-superconductors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
- H10N60/0381—Processes for depositing or forming copper oxide superconductor layers by evaporation, e.g. MBE
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
- Y10S505/73—Vacuum treating or coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
- Y10S505/742—Annealing
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명의 방법에 의한 원자층 제어상태하에서 기판에 형성된 Bi-Sr-Ca-Cu-O계 초전도 박막의 개략 단면도.
제3도는 Bi-Sr-Ca-Cu-O계 초전도 박막의 임계전류밀도와 자기장세기(megnetic field intensity)의 관계를 도시한 그래프.
Claims (4)
- 두 개의 반쪽 단위 셀(helf-unit cell)들을 페로브스키트(Perovskite) 구조층을 형성하고, 상기 반쪽 단위 셀들 사이에 놓여있는 스트론튬(Sr)과 비스무스(Bi)는 원자층 제어 레벨 능력을 갖는 MBE공정 또는 MO-MBE공정을 사용하여 산화 작용없이 각각 석출되어짐을 특징으로 하는 Bi-Sr-Ca-Cu-O계 초전도 박막의 제조방법.
- 제1항에 있어서, 상기 반쪽 단위 셀들의 CuO원자층 사이에는 하나의 실제금속스트론튬(Sr)원자층과 두개의 실제금속 비스무스(Bi)원자층이 놓여짐을 특징으로 하는 Bi-Sr-Ca-Cu-O계 초전도 박막의 제조방법.
- 두 개의 반쪽 단위 셀들은 페로브스키트 구조층을 형성하고, 상기 반쪽단위 셀들의 CuO원자층 사이에는 하나의 실제금속스크론튬(Sr)원자층과 두개의 실제금속 비스무스(Bi)원자층이 놓여짐을 특징으로 하는 Bi-Sr-Ca-Cu-O계 초전도 박막.
- 제3항에 있어서, 상기 초전도 박막은 Bi2SR2CaCu2Ox(2-2-1-2)로 이루어짐을 특징으로 하는 Bi-Sr-Ca-Cu-O계 초전도 박막.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP91-51049 | 1991-03-15 | ||
JP3051049A JPH04285012A (ja) | 1991-03-15 | 1991-03-15 | 酸化物超伝導体薄膜の形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR920018847A true KR920018847A (ko) | 1992-10-22 |
KR960000947B1 KR960000947B1 (ko) | 1996-01-15 |
Family
ID=12875949
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019920004150A KR960000947B1 (ko) | 1991-03-15 | 1992-03-13 | Bi-Sr-Ca-Cu-O계 초전도 박막과 그의 제조방법 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5300484A (ko) |
EP (1) | EP0505112B1 (ko) |
JP (1) | JPH04285012A (ko) |
KR (1) | KR960000947B1 (ko) |
DE (1) | DE69201384D1 (ko) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0461592B1 (en) * | 1990-06-11 | 1996-09-04 | Mitsubishi Chemical Corporation | Thin film Josephson device |
JP3435966B2 (ja) | 1996-03-13 | 2003-08-11 | 株式会社日立製作所 | 強誘電体素子とその製造方法 |
JP2939530B2 (ja) * | 1996-11-29 | 1999-08-25 | 工業技術院長 | ビスマスを構成元素に含む多元系酸化物薄膜の結晶成長法 |
JP2958455B1 (ja) * | 1998-03-27 | 1999-10-06 | 工業技術院長 | 酸化物薄膜の結晶成長方法 |
JP5100313B2 (ja) * | 2007-10-31 | 2012-12-19 | 株式会社東芝 | 酸化ランタン化合物の製造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0292958B1 (en) * | 1987-05-26 | 1993-12-29 | Sumitomo Electric Industries Limited | Method for preparing thin film of compound oxide superconductor |
CA1313335C (en) * | 1987-08-24 | 1993-02-02 | Keizo Harada | Process for preparing a thin film of superconducting compound oxide |
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1991
- 1991-03-15 JP JP3051049A patent/JPH04285012A/ja not_active Withdrawn
-
1992
- 1992-03-13 DE DE69201384T patent/DE69201384D1/de not_active Expired - Lifetime
- 1992-03-13 US US07/851,200 patent/US5300484A/en not_active Expired - Fee Related
- 1992-03-13 EP EP92302190A patent/EP0505112B1/en not_active Expired - Lifetime
- 1992-03-13 KR KR1019920004150A patent/KR960000947B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR960000947B1 (ko) | 1996-01-15 |
EP0505112A1 (en) | 1992-09-23 |
EP0505112B1 (en) | 1995-02-15 |
US5300484A (en) | 1994-04-05 |
JPH04285012A (ja) | 1992-10-09 |
DE69201384D1 (de) | 1995-03-23 |
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