KR920006572B1 - 웨이퍼 지지용치구 및 이 치구를 사용하는 감압기상 성장방법 - Google Patents

웨이퍼 지지용치구 및 이 치구를 사용하는 감압기상 성장방법 Download PDF

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Publication number
KR920006572B1
KR920006572B1 KR1019890012753A KR890012753A KR920006572B1 KR 920006572 B1 KR920006572 B1 KR 920006572B1 KR 1019890012753 A KR1019890012753 A KR 1019890012753A KR 890012753 A KR890012753 A KR 890012753A KR 920006572 B1 KR920006572 B1 KR 920006572B1
Authority
KR
South Korea
Prior art keywords
wafer
ring
shaped jig
jig
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR1019890012753A
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English (en)
Korean (ko)
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KR910007098A (ko
Inventor
요오지 다까기
Original Assignee
도오요꼬 가가꾸 가부시끼가이샤
마고시 고오지
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 도오요꼬 가가꾸 가부시끼가이샤, 마고시 고오지 filed Critical 도오요꼬 가가꾸 가부시끼가이샤
Publication of KR910007098A publication Critical patent/KR910007098A/ko
Application granted granted Critical
Publication of KR920006572B1 publication Critical patent/KR920006572B1/ko
Expired legal-status Critical Current

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    • H01L21/203—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Chemical Vapour Deposition (AREA)
KR1019890012753A 1989-03-20 1989-09-04 웨이퍼 지지용치구 및 이 치구를 사용하는 감압기상 성장방법 Expired KR920006572B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1989030891U JP2537563Y2 (ja) 1989-03-20 1989-03-20 縦型減圧気相成長装置
JP1-30891 1989-03-20

Publications (2)

Publication Number Publication Date
KR910007098A KR910007098A (ko) 1991-04-30
KR920006572B1 true KR920006572B1 (ko) 1992-08-08

Family

ID=31256340

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1019890012753A Expired KR920006572B1 (ko) 1989-03-20 1989-09-04 웨이퍼 지지용치구 및 이 치구를 사용하는 감압기상 성장방법
KR1019890017771A Withdrawn KR900015261A (ko) 1989-03-20 1989-12-01 웨이퍼 지지용치구 및 이 치구를 사용하는 감압기상 성장방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1019890017771A Withdrawn KR900015261A (ko) 1989-03-20 1989-12-01 웨이퍼 지지용치구 및 이 치구를 사용하는 감압기상 성장방법

Country Status (2)

Country Link
JP (1) JP2537563Y2 (enrdf_load_stackoverflow)
KR (2) KR920006572B1 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100481829B1 (ko) * 1997-05-30 2005-07-04 삼성전자주식회사 반도체스퍼터링설비의웨이퍼홀더링실드
JP3368852B2 (ja) * 1998-11-27 2003-01-20 株式会社村田製作所 積層パターンの形成方法
EP1091391A1 (de) * 1999-10-05 2001-04-11 SICO Produktions- und Handelsges.m.b.H. Haltevorrichtung für Halbleiterscheiben
JP4526683B2 (ja) * 2000-10-31 2010-08-18 株式会社山形信越石英 石英ガラス製ウェーハ支持治具及びその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6089282U (ja) * 1983-11-28 1985-06-19 沖電気工業株式会社 気相成長用サセプタ−
JPH0715138Y2 (ja) * 1986-02-07 1995-04-10 信越石英株式会社 縦型収納治具
JPS62142839U (enrdf_load_stackoverflow) * 1986-03-04 1987-09-09

Also Published As

Publication number Publication date
KR900015261A (ko) 1990-10-26
JPH02122431U (enrdf_load_stackoverflow) 1990-10-08
JP2537563Y2 (ja) 1997-06-04
KR910007098A (ko) 1991-04-30

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