KR910019738A - 슬라이싱머신의 절단방법 - Google Patents

슬라이싱머신의 절단방법 Download PDF

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Publication number
KR910019738A
KR910019738A KR1019910007448A KR910007448A KR910019738A KR 910019738 A KR910019738 A KR 910019738A KR 1019910007448 A KR1019910007448 A KR 1019910007448A KR 910007448 A KR910007448 A KR 910007448A KR 910019738 A KR910019738 A KR 910019738A
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KR
South Korea
Prior art keywords
cutting
changing
axial direction
blade
rotating blade
Prior art date
Application number
KR1019910007448A
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English (en)
Other versions
KR970009143B1 (ko
Inventor
이찌로 카타야마
요시오 카모시따
Original Assignee
카루베 쇼자부로
가부시키가이샤 토쿄 세이미쯔
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by 카루베 쇼자부로, 가부시키가이샤 토쿄 세이미쯔 filed Critical 카루베 쇼자부로
Publication of KR910019738A publication Critical patent/KR910019738A/ko
Application granted granted Critical
Publication of KR970009143B1 publication Critical patent/KR970009143B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D5/00—Planing or slotting machines cutting otherwise than by relative movement of the tool and workpiece in a straight line
    • B23D5/02—Planing or slotting machines cutting otherwise than by relative movement of the tool and workpiece in a straight line involving rotary and straight-line movements only, e.g. for cutting helical grooves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/028—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a ring blade having an inside cutting edge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D47/00—Sawing machines or sawing devices working with circular saw blades, characterised only by constructional features of particular parts
    • B23D47/005—Vibration-damping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D59/00—Accessories specially designed for sawing machines or sawing devices
    • B23D59/001—Measuring or control devices, e.g. for automatic control of work feed pressure on band saw blade
    • B23D59/002—Measuring or control devices, e.g. for automatic control of work feed pressure on band saw blade for the position of the saw blade
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S125/00—Stone working
    • Y10S125/901—Stone working forming piezoelectric crystals
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00—Cutting
    • Y10T83/141—With means to monitor and control operation [e.g., self-regulating means]
    • Y10T83/148—Including means to correct the sensed operation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

내용 없음

Description

슬라이싱머신의 절단방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 슬라이싱머신의 절단방법을 설명하기 위한 슬라이싱머신의 개략도,제2도는 제1도의 평면도.

Claims (9)

  1. 도우넛형 회전 블레이드의 내주칼로서 결정 인고트를 박편형으로 절단하는 슬라이싱머신에 있어서; 절단을 개시하기 전에 회전 블레이드에 축방향의 힘을 미리 가하여 회전 블레이드를 축방향으로 변위 시키는 고정과;이렇게 형성된 상태에서 결정 인고트의 절단을 수행하는 공정을 포함한 슬라이싱머신의 절단방법.
  2. 제1항에 있어서; 상기의 회전 블레이드를 축방향으로 변화시키는 공정시에 회전 블레이드는 에어 압력에 의해 축방향으로 변위되어 위치 제어됨을 특징으로 하는 슬라이싱머신의 절단방법.
  3. 제2항에 있어서, 상기의 회전 블레이드를 축방향으로 변화시키는 공정시에 회전 블레이드의 축방향 변위는 에어압력을 변화시켜 수행됨을 특징으로 하는 슬라이싱머신의 절단방법.
  4. 제3항에 있어서,상기의 회전 블레이드를 축방향으로 변화시키는 공정시에 에어압력의 변화는 에어압력조정장치에 의해 수행됨을 특징으로 하는 슬라이싱머신의 절단방법.
  5. 제2항에 있어서, 상기의 회전 블레이드를 축방향으로 변화시키는 공정시에 회전 블레이드의 축방향변위는 에어패드로부터 회전블레이드에 분출되는 에어압력이 일정한 에어패드와 회전 블레이드간의 간격을 변화 시킴으로써 수행됨을 특징으로 하는 슬라이싱머신의 절단방법.
  6. 제5항에 있어서, 상기의 회전 블레이드를 축방향으로 변화시키는 공정시에 에어패드는 판 스프링에 의해 슬라이싱 머신 본체에 지지된 캔틸레버비임의 선단에 설치되고,상기 에어패드와 회전 블레이드간의 간격변화는 캔틸레이버비임을 따라 추를 이동시켜 수행되을 특징으로 하는 슬라이싱머신의 절단방법.
  7. 제5항에 있어서, 상기의 회전 블레이드를 축방향으로 변화시키는 공정시에 에어패드는 슬라이싱 본체에 지지된 캔틸레버비임의 선단에 있는 에어패드 구동기구에 의해 설치되고, 상기 에어패드 구동기구는 에어패드를 회전블레이드에 대해 진퇴이동시켜 상기 에어패드와 회전 블레이드간의 간격 변화를 수행함을 특징으로 하는 슬라이싱머신의 절단방법.
  8. 제1항에 있어서, 상기 회전블레이드를 축방향으로 변화시키는 공정시에 회전블레이드의 축방향변위를 검출하는 블레이드 센서를 설치하여 절단을 개시하기전의 회전블레이드의 변위를 기준 위치로 절단중에 블레이드가 기준위치에 위치되도록 상기의 회전블레이드를 위치제어시키을 특징으로 하는 슬라이싱머신의 절단방법.
  9. 제2항에 있어서, 상기의 회전블레이드를 축방향으로 변화시키는 공정시에 예정된 절단곡선을 따라 회전블레이드가 위치제어됨을 특징으로 하는 슬라이싱머신의 절단방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019910007448A 1990-05-10 1991-05-08 슬라이싱머신의 절단방법 KR970009143B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP12037090 1990-05-10
JP2-120370 1990-05-10
JP6032991A JP2505930B2 (ja) 1990-05-10 1991-03-25 スライシングマシンの切断方法
JP3-060329 1991-03-25

Publications (2)

Publication Number Publication Date
KR910019738A true KR910019738A (ko) 1991-12-19
KR970009143B1 KR970009143B1 (ko) 1997-06-07

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Application Number Title Priority Date Filing Date
KR1019910007448A KR970009143B1 (ko) 1990-05-10 1991-05-08 슬라이싱머신의 절단방법

Country Status (5)

Country Link
US (2) US5174270A (ko)
EP (2) EP0456223B1 (ko)
JP (1) JP2505930B2 (ko)
KR (1) KR970009143B1 (ko)
DE (2) DE69104766T2 (ko)

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JPH05318460A (ja) * 1992-05-25 1993-12-03 Tokyo Seimitsu Co Ltd 半導体ウエハのスライシング方法
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JP2979870B2 (ja) * 1992-11-27 1999-11-15 信越半導体株式会社 半導体インゴットのコーン状端部切除方法
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Also Published As

Publication number Publication date
DE69104766T2 (de) 1995-03-02
DE69133239D1 (de) 2003-05-22
KR970009143B1 (ko) 1997-06-07
EP0610967A2 (en) 1994-08-17
EP0456223B1 (en) 1994-10-26
EP0456223A1 (en) 1991-11-13
EP0610967B1 (en) 2003-04-16
US5174270A (en) 1992-12-29
JPH04211909A (ja) 1992-08-03
DE69133239T2 (de) 2003-10-30
EP0610967A3 (en) 1995-08-02
US5287843A (en) 1994-02-22
DE69104766D1 (de) 1994-12-01
JP2505930B2 (ja) 1996-06-12

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