KR910019276A - 박막저항체를 갖는 전자회로소자 및 그 제조방법 - Google Patents
박막저항체를 갖는 전자회로소자 및 그 제조방법 Download PDFInfo
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- KR910019276A KR910019276A KR1019910006404A KR910006404A KR910019276A KR 910019276 A KR910019276 A KR 910019276A KR 1019910006404 A KR1019910006404 A KR 1019910006404A KR 910006404 A KR910006404 A KR 910006404A KR 910019276 A KR910019276 A KR 910019276A
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- film resistor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/006—Thin film resistors
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0688—Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/64—Impedance arrangements
- H01L23/647—Resistive arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01014—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01019—Potassium [K]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Non-Adjustable Resistors (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Electronic Switches (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1 도는 본 발명의 회로 기판을 구성하는 박막저항체의 1실시예의 금속원자의 마이크로클러스 터영역 구조를 도식적으로 도시한 개념도, 제 2 도는 본 발명의 박막저항체의 1실시예에 대한 X선 회절패턴의 예를 도시한 그래프, 제 7 도는 본 발명의 박막저항체를 형성하기 위한 성막 장치의 구조를 도시한 개념도, 제 9 도는 본 발명의 영역 박막저항체를 사용한 발열 저항체 기판의 1실시예의 구조를 도시한 사시도.
Claims (20)
- 적어도 1개의 박막저항체와 이것을 지지하기 위한 기판을 갖는 전자회로에 있어서, 상기 박막저항체는 1종류의 원자를 주로 포함하고, 전기 전도성을 갖는 제 1 의 영역과 2종류의 원자로 이루어지는 화합물을 주로 포함하여 전기절연성을 나타내는 제 2 의 영역을 가지며, 상기 제 1 의 영역은 제 2 의 영역내에 산재하며, 또한 그 평균 입자 지름이 2nm내지 20nm의 범위인 전자회로소자.
- 특허청구의 범위 제 1 항에 있어서, 제 1 의 영역을 구성하는 원자는 Cr인 전자회로 소자.
- 특허청구의 범위 제 1 항에 있어서, 제 2 의 영역을 구성하는 2종류의 원자로 이루어지는 화합물은 Si와 O의 화합물인 전자회로소자.
- 특허청구의 범위 제 2 항에 있어서, 제 2 의 영역을 구성하는 2종류의 원자로 이루어지는 화합물은 SiO2인 전자회로소자.
- 특허청구의 범위 제 1 항에 있어서, 절연막을 또 가지며, 이 절연막은 그것이 마련되는 면을 피복해서 배치되는 전자회로소자.
- 특허청구의 범위 제 5 항에 있어서, 상기 절연막 위에 박막저항체가 마련되는 전자회로소자.
- 특허청구의 범위 제 6 항에 있어서, 도체막을 또 가지며, 이 도체막은 상기 절연막 위에 마련되는 전자회로소자.
- 특허청구의 범위 제 5 항에 있어서, 상기 절연막 위에 상기 박막 저항체 및 도체막을 마련한 것을 적층단위로하여 이것을 여러개 단위적충한 전자회로소자.
- 특허청구의 범위 제 8 항에 있어서, 상기 각 절연막에 스루홀을 갖는 전자회로소자.
- 특허청구의 범위 제 1 항에 있어서, 박막 저항체는 동일 기판 위에 여러개 병렬해서 마련되는 전자회로소자.
- 특허청구의 범위 제 10항에 있어서, 각 박막저항체는 그 양끝에 전극이 마련되어 발열소자를 구성하는 전자회로소자.
- 특허청구의 범위 제 11항에 있어서, 각 박막저항체는 제 1 의 영역을 구성하는 원자가 Cr이고, 제 2 의 영역을 구성하는 2종류의 원자로 이루어지는 화합물이 SiO2인 전자회로소자.
- 특허청구의 범위 제 12항에 있어서, 각 박막저항체의 양끝과 전극 사이에 전극을 구성하는 도체가 박막저항체내에 확산하는 것을 방지하기 위한 장벽 막을 갖는 전자회로소자.
- 기판위에 스피터링으로 성막하고, 이것을 패터닝해서 저항막으로 하는 전자회로소자의 제조방법에 있어서, Cr과 SiO2를 포함하는 타게트를 스피터링해서 성막하고, 성막후 350℃이상의 온도에서 열처리하는 전자회로소자의 제조방법.
- 특허청구의 범위 제 14항에 있어서, 타게트는 Cr과 SiO2가 혼합한 것의 소결체인 전자회로 소자의제조방법.
- 특허청구의 범위 제 14항에 있어서, 타게트는 Cr판위에 SiO2판을 부분적으로 배치한 전자회로소자의 제조 방법.
- 특허청구의 범위 제 14항에 있어서, 타게트의 표면의 Cr과 SiO2의 존재비를 변경해서 박막저항체의 비저항을 변화시키는 전자회로소자의 제조방법.
- 특허청구의 범위 제 13항에 있어서, 박막저항체가 감열기록헤드의 발열소자로써 사용되는 전자회로소자.
- 적어도 1개의 박막저항체와 이것을 지지하기 위한 기판을 갖는 전자회로소자에 있어서, 상기 박막저항체는 Cr을 갖는 제 1 의 영역과 SiO2를 갖는 제 2 의 영역을 가지며, 상기 제 1 의 영역은 제 2 의 영역내에 산재하며, 또한 그 평균입자지름이 2nm을 넘는 전자회로소자.
- 특허청구의 범위 제 19항에 있어서, Cr원자가 비정질의 마이크로클러스 비영역을 형성하고, SiO2가 비정질 구조영역을 형성하고 있는 전자회로소자.※ 참고사항 : 최초출원내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2-107758 | 1990-04-24 | ||
JP10775890 | 1990-04-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR910019276A true KR910019276A (ko) | 1991-11-30 |
KR960005321B1 KR960005321B1 (ko) | 1996-04-23 |
Family
ID=14467242
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019910006404A KR960005321B1 (ko) | 1990-04-24 | 1991-04-22 | 박막저항체를 갖는 전자회로소자 및 그 제조방법 |
Country Status (4)
Country | Link |
---|---|
US (1) | US5218335A (ko) |
JP (1) | JPH04218901A (ko) |
KR (1) | KR960005321B1 (ko) |
DE (1) | DE4113372C2 (ko) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0736881B1 (de) * | 1995-03-09 | 2000-05-24 | Philips Patentverwaltung GmbH | Elektrisches Widerstandsbauelement mit CrSi-Widerstandsschicht |
US6208234B1 (en) * | 1998-04-29 | 2001-03-27 | Morton International | Resistors for electronic packaging |
WO2001093283A1 (en) * | 2000-06-02 | 2001-12-06 | Koninklijke Philips Electronics N.V. | Passive component |
US8680443B2 (en) | 2004-01-06 | 2014-03-25 | Watlow Electric Manufacturing Company | Combined material layering technologies for electric heaters |
US11393752B2 (en) | 2019-03-20 | 2022-07-19 | Rohm Co., Ltd. | Electronic component |
JP7440212B2 (ja) * | 2019-03-27 | 2024-02-28 | ローム株式会社 | 薄膜抵抗およびその製造方法、ならびに、薄膜抵抗を備えた電子部品 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE271044C (ko) * | ||||
FR2008121A1 (en) * | 1968-05-09 | 1970-01-16 | Monsanto Co | Thin film resistances |
SE364591B (ko) * | 1968-11-19 | 1974-02-25 | Western Electric Co | |
US4010312A (en) * | 1975-01-23 | 1977-03-01 | Rca Corporation | High resistance cermet film and method of making the same |
DE2724498C2 (de) * | 1977-05-31 | 1982-06-03 | Siemens AG, 1000 Berlin und 8000 München | Elektrischer Schichtwiderstand und Verfahren zu seiner Herstellung |
DE2833919C2 (de) * | 1978-08-02 | 1982-06-09 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur Herstellung von elektrischen Schichtschaltungen auf Kunststoffolien |
JPS56130374A (en) * | 1980-03-19 | 1981-10-13 | Hitachi Ltd | Thermal head |
JPS5884401A (ja) * | 1981-11-13 | 1983-05-20 | 株式会社日立製作所 | 抵抗体 |
JPS6256160A (ja) * | 1985-09-06 | 1987-03-11 | Mitsubishi Electric Corp | サ−マルヘツド |
JPS6256159A (ja) * | 1985-09-06 | 1987-03-11 | Toshiba Corp | サ−マルヘツド |
JPS62119272A (ja) * | 1985-11-19 | 1987-05-30 | Mitsubishi Petrochem Co Ltd | 樹脂抵抗体 |
US5068756A (en) * | 1989-02-16 | 1991-11-26 | Texas Instruments Incorporated | Integrated circuit composed of group III-V compound field effect and bipolar semiconductors |
-
1991
- 1991-04-22 KR KR1019910006404A patent/KR960005321B1/ko not_active IP Right Cessation
- 1991-04-23 JP JP3091989A patent/JPH04218901A/ja active Pending
- 1991-04-24 US US07/690,350 patent/US5218335A/en not_active Expired - Lifetime
- 1991-04-24 DE DE4113372A patent/DE4113372C2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR960005321B1 (ko) | 1996-04-23 |
US5218335A (en) | 1993-06-08 |
DE4113372C2 (de) | 2000-07-27 |
DE4113372A1 (de) | 1991-10-31 |
JPH04218901A (ja) | 1992-08-10 |
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