KR910006251B1 - 압전 소자(piezo Electric Device) - Google Patents

압전 소자(piezo Electric Device) Download PDF

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Publication number
KR910006251B1
KR910006251B1 KR1019870003219A KR870003219A KR910006251B1 KR 910006251 B1 KR910006251 B1 KR 910006251B1 KR 1019870003219 A KR1019870003219 A KR 1019870003219A KR 870003219 A KR870003219 A KR 870003219A KR 910006251 B1 KR910006251 B1 KR 910006251B1
Authority
KR
South Korea
Prior art keywords
piezoelectric
elements
piezoelectric ceramic
ceramic elements
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR1019870003219A
Other languages
English (en)
Korean (ko)
Other versions
KR870010641A (ko
Inventor
가츠노리 요꼬야마
유끼오 사토오
슌죠오 시마이
Original Assignee
도오시바 쎄라믹스 가부시끼가이샤
히요시 쥰이치
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP61078289A external-priority patent/JPS62235789A/ja
Priority claimed from JP61160842A external-priority patent/JPS6317574A/ja
Priority claimed from JP61251850A external-priority patent/JPS63107469A/ja
Application filed by 도오시바 쎄라믹스 가부시끼가이샤, 히요시 쥰이치 filed Critical 도오시바 쎄라믹스 가부시끼가이샤
Publication of KR870010641A publication Critical patent/KR870010641A/ko
Application granted granted Critical
Publication of KR910006251B1 publication Critical patent/KR910006251B1/ko
Expired legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0603—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a piezoelectric bender, e.g. bimorph
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Jigging Conveyors (AREA)
KR1019870003219A 1986-04-07 1987-04-04 압전 소자(piezo Electric Device) Expired KR910006251B1 (ko)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP61078289A JPS62235789A (ja) 1986-04-07 1986-04-07 圧電バイモルフ素子
JP61-78289 1986-04-07
JP78289 1986-04-07
JP61160842A JPS6317574A (ja) 1986-07-10 1986-07-10 圧電バイモルフ素子
JP61-160842 1986-07-10
JP160842 1986-07-10
JP251850 1986-10-24
JP61-251850 1986-10-24
JP61251850A JPS63107469A (ja) 1986-10-24 1986-10-24 圧電素子

Publications (2)

Publication Number Publication Date
KR870010641A KR870010641A (ko) 1987-11-30
KR910006251B1 true KR910006251B1 (ko) 1991-08-17

Family

ID=27302665

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019870003219A Expired KR910006251B1 (ko) 1986-04-07 1987-04-04 압전 소자(piezo Electric Device)

Country Status (5)

Country Link
US (2) US4769570A (enExample)
KR (1) KR910006251B1 (enExample)
CA (1) CA1278088C (enExample)
DE (1) DE3711388A1 (enExample)
GB (3) GB2189933B (enExample)

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KR920002110B1 (ko) * 1988-02-03 1992-03-12 요시다 고오교오 가부시키가이샤 압전 구동형 진동 발생기와 압전 구동형 진동식 부품 이송장치
US5338997A (en) * 1988-04-29 1994-08-16 Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Micromanipulator for moving objects
JPH02138501A (ja) * 1988-11-17 1990-05-28 Smc Corp ノズルフラッパ機構
EP0408306B1 (en) * 1989-07-11 1996-05-01 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film
US5210455A (en) * 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
DE4025436A1 (de) * 1990-08-10 1992-02-13 Siemens Ag Kontaktierung eines piezoelektrischen biegewandlers
US5404067A (en) * 1990-08-10 1995-04-04 Siemens Aktiengesellschaft Bonded piezoelectric bending transducer and process for producing the same
DE69223096T2 (de) * 1991-07-18 1998-05-28 Ngk Insulators Ltd Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid
JPH05218517A (ja) * 1992-02-06 1993-08-27 Murata Mfg Co Ltd 圧電バイモルフ型アクチュエータ
JP2665106B2 (ja) * 1992-03-17 1997-10-22 日本碍子株式会社 圧電／電歪膜型素子
JP3106044B2 (ja) * 1992-12-04 2000-11-06 日本碍子株式会社 アクチュエータ及びそれを用いたインクジェットプリントヘッド
JP3120260B2 (ja) 1992-12-26 2000-12-25 日本碍子株式会社 圧電／電歪膜型素子
US5653537A (en) * 1995-03-17 1997-08-05 Ircon, Inc. Non-contacting infrared temperature thermometer detector apparatus
DE19520796A1 (de) * 1995-06-07 1996-12-12 Siemens Ag Piezoelektrischer Biegewandler
JP3432974B2 (ja) * 1995-10-13 2003-08-04 日本碍子株式会社 圧電／電歪膜型素子
DE19648726C2 (de) * 1996-11-12 2003-03-27 Piezosystem Jena Gmbh Piezoelektrisches Antriebselement
US5812270A (en) * 1997-09-17 1998-09-22 Ircon, Inc. Window contamination detector
DE10005934B4 (de) * 2000-02-13 2004-06-03 Bühner, Kurt Schwingfördersystem mit Piezoantrieb
DE10005933B4 (de) * 2000-02-13 2004-01-15 Bühner und Schaible GmbH Schwingfördersystem
DE10028271B4 (de) * 2000-06-13 2004-06-03 Bühner, Kurt Biegeelement für ein Schwingfördersystem mit Piezoantrieb
DE10210207B4 (de) * 2001-03-01 2009-08-13 Bühner, Kurt Biegeelemente für Schwingfördersystem mit Piezoantrieb
DE10309994B4 (de) * 2002-03-01 2005-11-03 Bühner, Kurt PKF-Elemente für Schwingfördersystem mit Piezoantrieb
JP2005099549A (ja) * 2003-09-26 2005-04-14 Olympus Corp 振動波リニアモータ
GB0323920D0 (en) * 2003-10-11 2003-11-12 Johnson Electric Sa Electric motor
GB0414652D0 (en) 2004-06-30 2004-08-04 New Transducers Ltd Transducer or actuator
DE102004055996A1 (de) * 2004-11-19 2006-05-24 Stefan Eickenberg Biegeaktuator
CN100344417C (zh) * 2005-06-29 2007-10-24 上海大学 基于双晶压电薄膜的微型直线驱动器
ATE517050T1 (de) * 2007-07-06 2011-08-15 Feintool Ip Ag Vibrationslinearförderer
DE102007031639B4 (de) * 2007-07-06 2010-07-22 Feintool International Holding Vibrationslinearförderer
DE102007043263A1 (de) * 2007-09-11 2009-04-02 Siemens Ag Informationswandler und Verfahren zu seiner Herstellung
KR100956076B1 (ko) * 2008-10-02 2010-05-07 한국과학기술연구원 나선형 구조를 가지는 고효율 압전 에너지 하베스터
WO2010149199A1 (en) * 2009-06-22 2010-12-29 Piezomotor Uppsala Ab Electromechanical motor
KR101278405B1 (ko) * 2011-03-23 2013-06-24 삼성전기주식회사 압전 진동 모듈 및 이를 채용한 터치스크린
CN102283617B (zh) * 2011-06-29 2014-01-08 南京航空航天大学 基于压电双晶片悬臂梁结构的超声吸尘器及其方法
TW201403294A (zh) * 2012-06-04 2014-01-16 Compal Electronics Inc 電子裝置
US10607642B2 (en) 2013-03-18 2020-03-31 Magnecomp Corporation Multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension
US9741376B1 (en) 2013-03-18 2017-08-22 Magnecomp Corporation Multi-layer PZT microactuator having a poled but inactive PZT constraining layer
US9117468B1 (en) 2013-03-18 2015-08-25 Magnecomp Corporation Hard drive suspension microactuator with restraining layer for control of bending
US11205449B2 (en) 2013-03-18 2021-12-21 Magnecomp Corporation Multi-layer PZT microacuator with active PZT constraining layers for a DSA suspension
US9330694B1 (en) 2013-03-18 2016-05-03 Magnecomp Corporation HDD microactuator having reverse poling and active restraining layer
US9330698B1 (en) 2013-03-18 2016-05-03 Magnecomp Corporation DSA suspension having multi-layer PZT microactuator with active PZT constraining layers
US9070394B1 (en) 2013-03-18 2015-06-30 Magnecomp Corporation Suspension microactuator with wrap-around electrode on inactive constraining layer
US10128431B1 (en) 2015-06-20 2018-11-13 Magnecomp Corporation Method of manufacturing a multi-layer PZT microactuator using wafer-level processing
CN110002176B (zh) * 2018-12-17 2023-12-22 浙江大学台州研究院 一种石英晶片的散播式送料装置
CN117284706B (zh) * 2023-09-12 2025-11-18 南京航空航天大学 一种旋转式惯性驱动压电振动送料装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2479926A (en) * 1947-10-11 1949-08-23 Brush Dev Co Electrotransducer and method of making same
US2633543A (en) * 1948-04-19 1953-03-31 Gulton Mfg Corp Bimorph element
NL251123A (enExample) * 1960-02-06
US3163783A (en) * 1963-06-10 1964-12-29 Gulton Ind Inc High capacity transducer unit
US3447217A (en) * 1964-02-05 1969-06-03 Hitachi Ltd Method of producing ceramic piezoelectric vibrator
DE2211750A1 (de) * 1972-03-10 1973-09-13 Braun Ag Piezoelektrischer schwingantrieb
CH607336A5 (enExample) * 1975-09-22 1978-12-15 Siemens Ag
JPS6048112B2 (ja) * 1979-05-02 1985-10-25 ソニー株式会社 電気・機械変換素子
US4443729A (en) * 1981-06-22 1984-04-17 Rockwell International Corporation Piezoceramic bender element having an electrode arrangement suppressing signal development in mount region
US4431935A (en) * 1981-09-15 1984-02-14 Rockwell International Corporation Sensor structure incorporating multiple piezoelectric generators
NL8105502A (nl) * 1981-12-08 1983-07-01 Philips Nv Werkwijze voor het vervaardigen van een piezo-elektrische inrichting alsmede een inrichting vervaardigd volgens deze werkwijze.
JPS59126690A (ja) * 1983-01-11 1984-07-21 Nec Home Electronics Ltd アクチエイタ用圧電振動子
JPS6066882A (ja) * 1983-09-22 1985-04-17 Murata Mfg Co Ltd 圧電変位素子およびその分極方法
JPH0658978B2 (ja) * 1984-05-21 1994-08-03 株式会社村田製作所 圧電変位素子
DE3425290A1 (de) * 1984-07-10 1986-01-16 Atlas Fahrzeugtechnik GmbH, 5980 Werdohl Piezokeramische ventilplatte und verfahren zu deren herstellung

Also Published As

Publication number Publication date
US4769570A (en) 1988-09-06
US4862030A (en) 1989-08-29
GB2225896B (en) 1990-10-03
GB8924681D0 (en) 1989-12-20
KR870010641A (ko) 1987-11-30
GB2225896A (en) 1990-06-13
DE3711388C2 (enExample) 1991-06-06
CA1278088C (en) 1990-12-18
GB2189933A (en) 1987-11-04
GB2189933B (en) 1990-10-03
DE3711388A1 (de) 1987-10-08
GB8927681D0 (en) 1990-02-07
GB8707981D0 (en) 1987-05-07

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