KR910005426A - Iii-v족 반도체펠렛 - Google Patents

Iii-v족 반도체펠렛

Info

Publication number
KR910005426A
KR910005426A KR1019900011882A KR900011882A KR910005426A KR 910005426 A KR910005426 A KR 910005426A KR 1019900011882 A KR1019900011882 A KR 1019900011882A KR 900011882 A KR900011882 A KR 900011882A KR 910005426 A KR910005426 A KR 910005426A
Authority
KR
South Korea
Prior art keywords
iii
semiconductor pellet
pellet
semiconductor
Prior art date
Application number
KR1019900011882A
Other languages
English (en)
Other versions
KR940002763B1 (ko
Inventor
가즈히코 이노우에
Original Assignee
가부시키가이샤 도시바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 도시바 filed Critical 가부시키가이샤 도시바
Publication of KR910005426A publication Critical patent/KR910005426A/ko
Application granted granted Critical
Publication of KR940002763B1 publication Critical patent/KR940002763B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Dicing (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
KR1019900011882A 1989-08-02 1990-08-02 Iii-v족 반도체펠렛 KR940002763B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP01-200773 1989-08-02
JP1200773A JPH0365599A (ja) 1989-08-02 1989-08-02 ３―５族半導体ペレット

Publications (2)

Publication Number Publication Date
KR910005426A true KR910005426A (ko) 1991-03-30
KR940002763B1 KR940002763B1 (ko) 1994-04-02

Family

ID=16429940

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900011882A KR940002763B1 (ko) 1989-08-02 1990-08-02 Iii-v족 반도체펠렛

Country Status (2)

Country Link
JP (1) JPH0365599A (ko)
KR (1) KR940002763B1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5182233A (en) * 1989-08-02 1993-01-26 Kabushiki Kaisha Toshiba Compound semiconductor pellet, and method for dicing compound semiconductor wafer
JP6433644B2 (ja) * 2013-06-07 2018-12-05 シーメンス アクチエンゲゼルシヤフトＳｉｅｍｅｎｓ Ａｋｔｉｅｎｇｅｓｅｌｌｓｃｈａｆｔ 半導体ウェハのダイシング方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57123900A (en) * 1981-01-26 1982-08-02 Toshiba Corp Cutting method of gallium phosphide crystal substrate
JPS57128086A (en) * 1981-01-30 1982-08-09 Toshiba Corp Magneto-electric transducer element
JPS57128087A (en) * 1981-01-30 1982-08-09 Toshiba Corp Magneto-electric transducer element

Also Published As

Publication number Publication date
JPH0529640B2 (ko) 1993-05-06
KR940002763B1 (ko) 1994-04-02
JPH0365599A (ja) 1991-03-20

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
G160 Decision to publish patent application
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20100330

Year of fee payment: 17

EXPY Expiration of term