KR900015852A - 연마장치 - Google Patents

연마장치 Download PDF

Info

Publication number
KR900015852A
KR900015852A KR1019900005581A KR900005581A KR900015852A KR 900015852 A KR900015852 A KR 900015852A KR 1019900005581 A KR1019900005581 A KR 1019900005581A KR 900005581 A KR900005581 A KR 900005581A KR 900015852 A KR900015852 A KR 900015852A
Authority
KR
South Korea
Prior art keywords
polishing
pressure
microscopically
tool
oscillates
Prior art date
Application number
KR1019900005581A
Other languages
English (en)
Other versions
KR920003195B1 (ko
Inventor
히로시 다까마쓰
가쓰노부 우에다
Original Assignee
아오이 죠이찌
가부시끼가이샤 도시바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 아오이 죠이찌, 가부시끼가이샤 도시바 filed Critical 아오이 죠이찌
Publication of KR900015852A publication Critical patent/KR900015852A/ko
Application granted granted Critical
Publication of KR920003195B1 publication Critical patent/KR920003195B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/015—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor of television picture tube viewing panels, headlight reflectors or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

내용 없음.

Description

연마장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 관한 연마장치의 한 실시예를 나타낸 구성도,
제2도는 동 장치의 작용을 설명하기 위한 도면,
제3도는 본 발명 장치를 그라인딩 장치에 적용시킨 경우의 구성도이다.

Claims (1)

  1. 작업의 진행에 따라서 좌표수치를 리드하여 연마공구(13)의 위치를 제어하여 피연마재(10)를 연마하는 수치제어의 연마장치에 있어서, 전술한 피연마재(10)를 재치하고 또한 전술한 연마공구(13)의 피연마재(10)에 연마 압력을 가하는 방향에 대마여 평행으로 미동하는 미소구동 테이블(15)과 이 미소구동 테이블(15)을 미동시키는 미동기구(17)(18)(19)(21)(26)와 전술한 피연마재(10)에 가해지는 연마공구(13)의 연마압력을 검출하는 압력검출수단(17)(18)(19)(20)(21)과 이 압력 검출수단(17)(18)(19)(20)(21)에서 검출된 연마압력에 따라서 미동기구(17)(18)(19)(21)(26)를 미동시키는 연마압력 제어수단(22)을 구비한 것을 특징으로 하는 연마장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019900005581A 1989-04-19 1990-04-18 연마장치 KR920003195B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP01-097560 1989-04-19
JP1097560A JP2977203B2 (ja) 1989-04-19 1989-04-19 研磨装置
JP??1-97560 1989-04-19

Publications (2)

Publication Number Publication Date
KR900015852A true KR900015852A (ko) 1990-11-10
KR920003195B1 KR920003195B1 (ko) 1992-04-24

Family

ID=14195621

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900005581A KR920003195B1 (ko) 1989-04-19 1990-04-18 연마장치

Country Status (5)

Country Link
US (1) US5054244A (ko)
EP (1) EP0393615B1 (ko)
JP (1) JP2977203B2 (ko)
KR (1) KR920003195B1 (ko)
DE (1) DE69005877T2 (ko)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2827540B2 (ja) * 1991-03-11 1998-11-25 松下電器産業株式会社 研磨スピンドル
JP2682260B2 (ja) * 1991-05-09 1997-11-26 松下電器産業株式会社 微小研磨方法及び微小研磨工具
US5445996A (en) * 1992-05-26 1995-08-29 Kabushiki Kaisha Toshiba Method for planarizing a semiconductor device having a amorphous layer
US5441437A (en) * 1993-02-18 1995-08-15 Hulstedt; Bryan A. Compliant constant-force follower device for surface finishing tool
DE4335980C2 (de) * 1993-10-21 1998-09-10 Wacker Siltronic Halbleitermat Verfahren zum Positionieren einer Werkstückhalterung
DE4407148C2 (de) * 1994-03-04 1995-12-14 Univ Schiller Jena Anordnung zur Formkorrektur von Werkzeugen für das Läppen und Polieren
JPH0966475A (ja) * 1995-06-13 1997-03-11 Diamond Tech Inc 動力工具駆動システム
DE69627329T2 (de) * 1995-06-13 2004-04-08 Diamond Tech, Inc., Rocklin Antriebsvorrichtungen für elektrische kraftwerkzeuge
JP2780703B2 (ja) * 1996-06-28 1998-07-30 日本電気株式会社 液晶パネルクリーニング装置
US5816895A (en) * 1997-01-17 1998-10-06 Tokyo Seimitsu Co., Ltd. Surface grinding method and apparatus
DE19710601C2 (de) * 1997-03-14 1999-05-20 Univ Magdeburg Tech Bewegungsgenerator
US5938503A (en) * 1997-11-25 1999-08-17 Edo Western Corporation Active centering apparatus with imbedded shear load sensor and actuator
US6257957B1 (en) * 1999-12-01 2001-07-10 Gerber Coburn Optical Inc. Tactile feedback system
US8690638B2 (en) * 2010-10-07 2014-04-08 Apple Inc. Curved plastic object and systems and methods for deburring the same
US20220176515A1 (en) * 2020-12-03 2022-06-09 Changxin Memory Technologies, Inc. Force measurement system
CN114603482B (zh) * 2020-12-03 2023-03-21 长鑫存储技术有限公司 压力检测系统及压力检测方法
WO2023101842A1 (en) * 2021-11-30 2023-06-08 Corning Incorporated Localized polishing fixture and processes of using the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112876A (en) * 1976-03-19 1977-09-21 Kanto Koki Automatic profile milling machine
US4179004A (en) * 1978-02-15 1979-12-18 National Controls, Inc. Force multiplying load cell
DE2950881C2 (de) * 1979-12-18 1983-06-01 Fa. Peter Wolters, 2370 Rendsburg Steuereinrichtung für den Bearbeitungsdruck an Läpp-, Hon- und Schleißmaschinen
US4686440A (en) * 1985-03-11 1987-08-11 Yotaro Hatamura Fine positioning device
JPH074765B2 (ja) * 1986-03-03 1995-01-25 長尾 高明 曲面加工装置

Also Published As

Publication number Publication date
EP0393615B1 (en) 1994-01-12
US5054244A (en) 1991-10-08
JP2977203B2 (ja) 1999-11-15
DE69005877T2 (de) 1994-05-19
DE69005877D1 (de) 1994-02-24
KR920003195B1 (ko) 1992-04-24
JPH02279275A (ja) 1990-11-15
EP0393615A1 (en) 1990-10-24

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