DE69005877D1 - Poliervorrichtung. - Google Patents

Poliervorrichtung.

Info

Publication number
DE69005877D1
DE69005877D1 DE90107332T DE69005877T DE69005877D1 DE 69005877 D1 DE69005877 D1 DE 69005877D1 DE 90107332 T DE90107332 T DE 90107332T DE 69005877 T DE69005877 T DE 69005877T DE 69005877 D1 DE69005877 D1 DE 69005877D1
Authority
DE
Germany
Prior art keywords
polishing device
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE90107332T
Other languages
English (en)
Other versions
DE69005877T2 (de
Inventor
Hiroshi Takamatsu
Katsunobu Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of DE69005877D1 publication Critical patent/DE69005877D1/de
Application granted granted Critical
Publication of DE69005877T2 publication Critical patent/DE69005877T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/015—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor of television picture tube viewing panels, headlight reflectors or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
DE69005877T 1989-04-19 1990-04-18 Poliervorrichtung. Expired - Fee Related DE69005877T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1097560A JP2977203B2 (ja) 1989-04-19 1989-04-19 研磨装置

Publications (2)

Publication Number Publication Date
DE69005877D1 true DE69005877D1 (de) 1994-02-24
DE69005877T2 DE69005877T2 (de) 1994-05-19

Family

ID=14195621

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69005877T Expired - Fee Related DE69005877T2 (de) 1989-04-19 1990-04-18 Poliervorrichtung.

Country Status (5)

Country Link
US (1) US5054244A (de)
EP (1) EP0393615B1 (de)
JP (1) JP2977203B2 (de)
KR (1) KR920003195B1 (de)
DE (1) DE69005877T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2827540B2 (ja) * 1991-03-11 1998-11-25 松下電器産業株式会社 研磨スピンドル
JP2682260B2 (ja) * 1991-05-09 1997-11-26 松下電器産業株式会社 微小研磨方法及び微小研磨工具
US5445996A (en) * 1992-05-26 1995-08-29 Kabushiki Kaisha Toshiba Method for planarizing a semiconductor device having a amorphous layer
US5441437A (en) * 1993-02-18 1995-08-15 Hulstedt; Bryan A. Compliant constant-force follower device for surface finishing tool
DE4335980C2 (de) * 1993-10-21 1998-09-10 Wacker Siltronic Halbleitermat Verfahren zum Positionieren einer Werkstückhalterung
DE4407148C2 (de) * 1994-03-04 1995-12-14 Univ Schiller Jena Anordnung zur Formkorrektur von Werkzeugen für das Läppen und Polieren
WO1996041700A1 (en) * 1995-06-13 1996-12-27 Diamond Tech, Incorporated Power tool driving systems
JPH0966475A (ja) * 1995-06-13 1997-03-11 Diamond Tech Inc 動力工具駆動システム
JP2780703B2 (ja) * 1996-06-28 1998-07-30 日本電気株式会社 液晶パネルクリーニング装置
US5816895A (en) * 1997-01-17 1998-10-06 Tokyo Seimitsu Co., Ltd. Surface grinding method and apparatus
DE19710601C2 (de) * 1997-03-14 1999-05-20 Univ Magdeburg Tech Bewegungsgenerator
US5938503A (en) * 1997-11-25 1999-08-17 Edo Western Corporation Active centering apparatus with imbedded shear load sensor and actuator
US6257957B1 (en) 1999-12-01 2001-07-10 Gerber Coburn Optical Inc. Tactile feedback system
US8690638B2 (en) * 2010-10-07 2014-04-08 Apple Inc. Curved plastic object and systems and methods for deburring the same
US20220176515A1 (en) * 2020-12-03 2022-06-09 Changxin Memory Technologies, Inc. Force measurement system
CN114603482B (zh) * 2020-12-03 2023-03-21 长鑫存储技术有限公司 压力检测系统及压力检测方法
WO2023101842A1 (en) * 2021-11-30 2023-06-08 Corning Incorporated Localized polishing fixture and processes of using the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112876A (en) * 1976-03-19 1977-09-21 Kanto Koki Automatic profile milling machine
US4179004A (en) * 1978-02-15 1979-12-18 National Controls, Inc. Force multiplying load cell
DE2950881C2 (de) * 1979-12-18 1983-06-01 Fa. Peter Wolters, 2370 Rendsburg Steuereinrichtung für den Bearbeitungsdruck an Läpp-, Hon- und Schleißmaschinen
US4686440A (en) * 1985-03-11 1987-08-11 Yotaro Hatamura Fine positioning device
JPH074765B2 (ja) * 1986-03-03 1995-01-25 長尾 高明 曲面加工装置

Also Published As

Publication number Publication date
EP0393615A1 (de) 1990-10-24
JPH02279275A (ja) 1990-11-15
US5054244A (en) 1991-10-08
KR900015852A (ko) 1990-11-10
KR920003195B1 (ko) 1992-04-24
EP0393615B1 (de) 1994-01-12
DE69005877T2 (de) 1994-05-19
JP2977203B2 (ja) 1999-11-15

Similar Documents

Publication Publication Date Title
DE68912261D1 (de) Poliervorrichtung.
DE69011285T2 (de) Reinigungsvorrichtung.
DE58905270D1 (de) Verbindungsvorrichtung.
DE69012707T2 (de) Fixiervorrichtung.
DE69008111T2 (de) Reinigungsvorrichtung.
NO902303D0 (no) Apparatholder.
DE69018750T2 (de) Positioniervorrichtung.
NO904875D0 (no) Apparatholder.
DE69204422D1 (de) Schleifvorrichtung.
DE69003269T2 (de) Fixiervorrichtung.
DE69004449T2 (de) Reinigungsgerät.
DE69005877D1 (de) Poliervorrichtung.
DE69012754D1 (de) Fixiervorrichtung.
DE69017632D1 (de) Auftragevorrichtung.
ES1009123Y (es) Aparato gimnastico-recreativo.
DE59009225D1 (de) Positioniereinrichtung.
NO890446D0 (no) Forskalingsanordning.
DE69015243T2 (de) Anschlussvorrichtung.
DE3888200D1 (de) Mahlvorrichtung.
IT8982540A0 (it) Dispositivo per battitura.
DE69010978T2 (de) Ausrichtvorrichtung.
DE69020621D1 (de) Kontaktvorrichtung.
DE69009802D1 (de) Selbstkassierendes Gerät.
IT216456Z2 (it) Dispositivo antiabbagliante.
NO904609L (no) Filament-vikleinnretning.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee