KR900011006A - 반도체 기억소자의 제조방법 - Google Patents

반도체 기억소자의 제조방법

Info

Publication number
KR900011006A
KR900011006A KR1019880016529A KR880016529A KR900011006A KR 900011006 A KR900011006 A KR 900011006A KR 1019880016529 A KR1019880016529 A KR 1019880016529A KR 880016529 A KR880016529 A KR 880016529A KR 900011006 A KR900011006 A KR 900011006A
Authority
KR
South Korea
Prior art keywords
semiconductor memory
memory element
manufacturing semiconductor
manufacturing
semiconductor
Prior art date
Application number
KR1019880016529A
Other languages
English (en)
Other versions
KR910007019B1 (ko
Inventor
안태혁
최수한
신윤승
Original Assignee
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자 주식회사 filed Critical 삼성전자 주식회사
Priority to KR1019880016529A priority Critical patent/KR910007019B1/ko
Publication of KR900011006A publication Critical patent/KR900011006A/ko
Application granted granted Critical
Publication of KR910007019B1 publication Critical patent/KR910007019B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate
    • H10B12/0387—Making the trench

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Memories (AREA)
KR1019880016529A 1988-12-12 1988-12-12 반도체 기억소자의 제조방법 KR910007019B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019880016529A KR910007019B1 (ko) 1988-12-12 1988-12-12 반도체 기억소자의 제조방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019880016529A KR910007019B1 (ko) 1988-12-12 1988-12-12 반도체 기억소자의 제조방법

Publications (2)

Publication Number Publication Date
KR900011006A true KR900011006A (ko) 1990-07-11
KR910007019B1 KR910007019B1 (ko) 1991-09-14

Family

ID=19280064

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880016529A KR910007019B1 (ko) 1988-12-12 1988-12-12 반도체 기억소자의 제조방법

Country Status (1)

Country Link
KR (1) KR910007019B1 (ko)

Also Published As

Publication number Publication date
KR910007019B1 (ko) 1991-09-14

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