KR900002578B1 - 프린트 기판 페턴 검사방법 및 그 장치 - Google Patents

프린트 기판 페턴 검사방법 및 그 장치 Download PDF

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Publication number
KR900002578B1
KR900002578B1 KR1019860007707A KR860007707A KR900002578B1 KR 900002578 B1 KR900002578 B1 KR 900002578B1 KR 1019860007707 A KR1019860007707 A KR 1019860007707A KR 860007707 A KR860007707 A KR 860007707A KR 900002578 B1 KR900002578 B1 KR 900002578B1
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KR
South Korea
Prior art keywords
pattern
light
camera
light source
circuit board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR1019860007707A
Other languages
English (en)
Korean (ko)
Other versions
KR870004389A (ko
Inventor
야시히고 하라
게이야 사이도우
고우이지 가라사기
아기라 사세
Original Assignee
가부시기가이샤 히다찌세이사꾸쇼
미쓰다 가쓰시게
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시기가이샤 히다찌세이사꾸쇼, 미쓰다 가쓰시게 filed Critical 가부시기가이샤 히다찌세이사꾸쇼
Publication of KR870004389A publication Critical patent/KR870004389A/ko
Application granted granted Critical
Publication of KR900002578B1 publication Critical patent/KR900002578B1/ko
Expired legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/309—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of printed or hybrid circuits or circuit substrates

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Toxicology (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Character Input (AREA)
  • Image Processing (AREA)
  • Closed-Circuit Television Systems (AREA)
  • Image Analysis (AREA)
KR1019860007707A 1985-10-02 1986-09-13 프린트 기판 페턴 검사방법 및 그 장치 Expired KR900002578B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP60-218112 1985-10-02
JP218112 1985-10-02
JP60218112A JPH0762868B2 (ja) 1985-10-02 1985-10-02 プリント基板の配線パターン欠陥検査方法

Publications (2)

Publication Number Publication Date
KR870004389A KR870004389A (ko) 1987-05-09
KR900002578B1 true KR900002578B1 (ko) 1990-04-20

Family

ID=16714815

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019860007707A Expired KR900002578B1 (ko) 1985-10-02 1986-09-13 프린트 기판 페턴 검사방법 및 그 장치

Country Status (4)

Country Link
US (1) US4700225A (https=)
JP (1) JPH0762868B2 (https=)
KR (1) KR900002578B1 (https=)
DE (1) DE3626061A1 (https=)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3422395A1 (de) * 1983-06-16 1985-01-17 Hitachi, Ltd., Tokio/Tokyo Verfahren und vorrichtung zum ermitteln von verdrahtungsmustern
JPH0623999B2 (ja) * 1986-07-28 1994-03-30 株式会社日立製作所 パタ−ン欠陥検出方法
DE3750285T2 (de) * 1986-10-03 1995-03-30 Omron Tateisi Electronics Co Gerät zur Untersuchung einer elektronischen Vorrichtung in fester Baugruppe.
US4872052A (en) * 1986-12-03 1989-10-03 View Engineering, Inc. Semiconductor device inspection system
US4998207A (en) * 1988-02-01 1991-03-05 Cooper Industries, Inc. Method of manufacture of circuit boards
US4854039A (en) * 1988-05-04 1989-08-08 The Technology Congress, Ltd. Prototype circuit board and method of testing
US4975972A (en) * 1988-10-18 1990-12-04 At&T Bell Laboratories Method and apparatus for surface inspection
US5040228A (en) * 1989-08-28 1991-08-13 At&T Bell Laboratories Method and apparatus for automatically focusing an image-acquisition device
IL99823A0 (en) * 1990-11-16 1992-08-18 Orbot Instr Ltd Optical inspection method and apparatus
DE4318956A1 (de) * 1993-06-14 1994-12-15 Grundig Emv Verfahren und Anordnung zur Überprüfung von Leiterplatten
JP3617547B2 (ja) * 1995-02-14 2005-02-09 富士通株式会社 配線パターンを観察する方法および加工装置
JPH10260190A (ja) * 1997-03-17 1998-09-29 Olympus Optical Co Ltd 走査型蛍光プローブ顕微鏡
US6304680B1 (en) 1997-10-27 2001-10-16 Assembly Guidance Systems, Inc. High resolution, high accuracy process monitoring system
JP4143206B2 (ja) * 1998-03-09 2008-09-03 明晃化成工業株式会社 記録媒体用ディスクの収納ケース
DE20004332U1 (de) 2000-03-08 2000-07-06 modus high-tech electronics GmbH, 47877 Willich Vorrichtung zur optischen Qualitätskontrolle
US6700658B2 (en) 2001-10-05 2004-03-02 Electro Scientific Industries, Inc. Method and apparatus for circuit pattern inspection
DE102005028427B3 (de) * 2005-06-17 2007-01-11 Leica Microsystems Semiconductor Gmbh Verfahren zur optischen Aufnahme und Inspektion eines Wafers im Rahmen der Randentlackung
DE102011114874B4 (de) * 2011-09-30 2024-09-26 Carl Zeiss Microscopy Gmbh Mikroskop umfassend eine Auswerteschaltung für einen optoelektronischen Detektor zum Aufzeichnen insbesondere von Fluoreszenzereignissen
US11255898B2 (en) * 2020-05-08 2022-02-22 Rohde & Schwarz Gmbh & Co. Kg System and method for testing a device-under-test

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5369538A (en) * 1976-12-02 1978-06-21 Fuji Electric Co Ltd Pattern recognizing equipment
JPS5371563A (en) * 1976-12-08 1978-06-26 Hitachi Ltd Automatic inspection correcting method for mask
US4152723A (en) * 1977-12-19 1979-05-01 Sperry Rand Corporation Method of inspecting circuit boards and apparatus therefor
DE3422395A1 (de) * 1983-06-16 1985-01-17 Hitachi, Ltd., Tokio/Tokyo Verfahren und vorrichtung zum ermitteln von verdrahtungsmustern
US4556903A (en) * 1983-12-20 1985-12-03 At&T Technologies, Inc. Inspection scanning system
JPS60152189A (ja) * 1984-01-19 1985-08-10 Shimadzu Corp デジタルサブトラクシヨンシステム

Also Published As

Publication number Publication date
KR870004389A (ko) 1987-05-09
DE3626061C2 (https=) 1989-09-14
JPH0762868B2 (ja) 1995-07-05
DE3626061A1 (de) 1987-05-27
US4700225A (en) 1987-10-13
JPS6278687A (ja) 1987-04-10

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