KR890017285A - 감광성 중합체의 제조방법 - Google Patents

감광성 중합체의 제조방법 Download PDF

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Publication number
KR890017285A
KR890017285A KR1019890005808A KR890005808A KR890017285A KR 890017285 A KR890017285 A KR 890017285A KR 1019890005808 A KR1019890005808 A KR 1019890005808A KR 890005808 A KR890005808 A KR 890005808A KR 890017285 A KR890017285 A KR 890017285A
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KR
South Korea
Prior art keywords
group
general formula
following general
repeating unit
unit represented
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KR1019890005808A
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English (en)
Inventor
히로토시 마에다
고우이찌 쿠니무네
Original Assignee
노기 사다오
짓소 가부시끼가이샤
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Application filed by 노기 사다오, 짓소 가부시끼가이샤 filed Critical 노기 사다오
Publication of KR890017285A publication Critical patent/KR890017285A/ko

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/14Polyamide-imides
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0387Polyamides or polyimides

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Macromonomer-Based Addition Polymer (AREA)

Abstract

내용 없음

Description

감광성 중합체의 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (1)

  1. 다음 일반식(I)으로 표시되는 반복단위, 다음 일반식(Ⅱ)으로 표시되는 반복단위 또는 이 두개의 단위를 함유하는 폴리(아미드)이소이미드를 다음 일반식(Ⅲ)으로 표시되는 감광성 불포화기 함유 아민과 온도 0 내지 100℃에서 반응시킴을 특징으로 하여, 다음 일반식(Ⅳ)으로 표시되는 반복단위를 함유한 감광성 중합체를 제조하는 방법.
    상기식에서, R1은 각각 독립적으로 3가 또는 4가의 탄소환식 방향족기 또는 복소환식기이고, R2는 각각 독립적으로 적어도 2개의 탄소원자를 갖는 지방족기 또는 지환식기, 방향지방족기, 탄소환식, 방향족기 또는 복소환식기 또는 폴리실록산기이며, R3은 감광성 불포화기를 갖는 1가의 유기기이고, m은 1 또는 2이며, n은 0 또는 1이고, 1 ≤m + n ≤2의 값을 가진다.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019890005808A 1988-05-02 1989-05-01 감광성 중합체의 제조방법 KR890017285A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP109538 1988-05-02
JP63109538A JPH0749483B2 (ja) 1988-05-02 1988-05-02 感光性重合体の製造方法

Publications (1)

Publication Number Publication Date
KR890017285A true KR890017285A (ko) 1989-12-15

Family

ID=14512789

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890005808A KR890017285A (ko) 1988-05-02 1989-05-01 감광성 중합체의 제조방법

Country Status (3)

Country Link
EP (1) EP0341028A2 (ko)
JP (1) JPH0749483B2 (ko)
KR (1) KR890017285A (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5187241A (en) * 1990-05-15 1993-02-16 International Business Machines Corporation Isoimide modifications of a polyimide and reaction thereof with nucleophiles
DE69308671T2 (de) * 1992-07-22 1997-10-16 Asahi Chemical Ind Photoempfindliche Polyimid-Zusammensetzung
US6379865B1 (en) 2000-04-11 2002-04-30 3M Innovative Properties Company Photoimageable, aqueous acid soluble polyimide polymers
TW202136375A (zh) * 2020-02-04 2021-10-01 日商富士軟片股份有限公司 樹脂組成物、硬化膜、積層體、硬化膜的製造方法及半導體元件

Also Published As

Publication number Publication date
JPH01278531A (ja) 1989-11-08
EP0341028A2 (en) 1989-11-08
JPH0749483B2 (ja) 1995-05-31

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