KR890012152A - 막(膜)두께 측정방법 - Google Patents

막(膜)두께 측정방법 Download PDF

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Publication number
KR890012152A
KR890012152A KR1019880009490A KR880009490A KR890012152A KR 890012152 A KR890012152 A KR 890012152A KR 1019880009490 A KR1019880009490 A KR 1019880009490A KR 880009490 A KR880009490 A KR 880009490A KR 890012152 A KR890012152 A KR 890012152A
Authority
KR
South Korea
Prior art keywords
rotating shaft
film thickness
sheet
measured
light shielding
Prior art date
Application number
KR1019880009490A
Other languages
English (en)
Other versions
KR920004750B1 (ko
Inventor
마꼬도 도꾸마루
도시시게 나가오
마사유끼 아리끼
히데끼 나까노
Original Assignee
시끼모리야
미쓰비시전기주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 시끼모리야, 미쓰비시전기주식회사 filed Critical 시끼모리야
Publication of KR890012152A publication Critical patent/KR890012152A/ko
Application granted granted Critical
Publication of KR920004750B1 publication Critical patent/KR920004750B1/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

내용 없음.

Description

막(膜)두께 측정방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 이발명의 한 실시예를 적용시킨 장치의 구성도.

Claims (1)

  1. 피측정시트를 회전축으로 밀착지지시키면서 주행시켜 상기 회전축의 면에서 소정의 거리를 두고 상기 회전축의 회전중심과 평행하게 차광판을 설치하고 상기 피측정시트의 표면과 상기 차광판의 사이를 레이저광을 사용하여 반사경에서 주사시키며 상기 피측정시시트의 막두께를 측정하는 방법에 있어서, 상기 회전축의 기점에서 상기회전축의 길이 방향으로 상기 회전축의 면과 상기차광판의 사이의 거리를 상기 기점으로부터의 각 위치와를 대응시켜 상기 주사의 결과를 제1의 정보로서 기억시키고, 상기 피측정시트이 주행상태에서 상기 피측정시트와 상기 차광판의 사이의 기리를 상기 기점으로부터의 각위치와 대응시켜 상기 주사의 결과를 제2의 정보로하며 상기 제1의 정보와 제2의 정보로 연산하여 상기 피측정시트의 두께를 검출하는 것을 특징으로 하는 막두께 측정방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019880009490A 1988-01-19 1988-07-27 막(膜)두께 측정방법 KR920004750B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP?63-9974 1988-01-19
JP997488 1988-01-19
JP88-9974 1988-01-19

Publications (2)

Publication Number Publication Date
KR890012152A true KR890012152A (ko) 1989-08-24
KR920004750B1 KR920004750B1 (ko) 1992-06-15

Family

ID=11734889

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880009490A KR920004750B1 (ko) 1988-01-19 1988-07-27 막(膜)두께 측정방법

Country Status (4)

Country Link
EP (1) EP0324896B1 (ko)
JP (1) JPH0674970B2 (ko)
KR (1) KR920004750B1 (ko)
DE (1) DE3877180T2 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1313757C (en) * 1988-04-26 1993-02-23 Mitsubishi Denki Kabushiki Kaisha Method for measuring film thickness
JP2622885B2 (ja) * 1989-10-09 1997-06-25 明産株式会社 シート厚さ測定装置
CN115597504B (zh) * 2022-12-15 2023-04-07 杭州百子尖科技股份有限公司 用于机器视觉量测的激光同轴度的校准装置及校准方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH645462A5 (de) * 1980-03-25 1984-09-28 Zumbach Electronic Ag Verfahren und vorrichtung zur beruehrungslosen messung einer dimension mindestens eines objekts.
US4730116A (en) * 1985-08-06 1988-03-08 Mitsubishi Denki Kabushiki Kaisha Sheet thickness measuring apparatus by optical scanning
KR900003208B1 (ko) * 1986-04-29 1990-05-10 미쓰비시전기주식회사 막(膜)두께의 측정장치

Also Published As

Publication number Publication date
EP0324896A2 (en) 1989-07-26
DE3877180T2 (de) 1993-05-19
EP0324896A3 (en) 1990-10-10
JPH0674970B2 (ja) 1994-09-21
JPH01280201A (ja) 1989-11-10
EP0324896B1 (en) 1992-12-30
KR920004750B1 (ko) 1992-06-15
DE3877180D1 (de) 1993-02-11

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