DE3877180D1 - Dickenmessverfahren. - Google Patents

Dickenmessverfahren.

Info

Publication number
DE3877180D1
DE3877180D1 DE8888116769T DE3877180T DE3877180D1 DE 3877180 D1 DE3877180 D1 DE 3877180D1 DE 8888116769 T DE8888116769 T DE 8888116769T DE 3877180 T DE3877180 T DE 3877180T DE 3877180 D1 DE3877180 D1 DE 3877180D1
Authority
DE
Germany
Prior art keywords
thickness method
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888116769T
Other languages
English (en)
Other versions
DE3877180T2 (de
Inventor
Makoto Tokumaru
Tosisige Nagao
Masayuki Ariki
Hideki Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of DE3877180D1 publication Critical patent/DE3877180D1/de
Publication of DE3877180T2 publication Critical patent/DE3877180T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE8888116769T 1988-01-19 1988-10-10 Dickenmessverfahren. Expired - Fee Related DE3877180T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP997488 1988-01-19

Publications (2)

Publication Number Publication Date
DE3877180D1 true DE3877180D1 (de) 1993-02-11
DE3877180T2 DE3877180T2 (de) 1993-05-19

Family

ID=11734889

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888116769T Expired - Fee Related DE3877180T2 (de) 1988-01-19 1988-10-10 Dickenmessverfahren.

Country Status (4)

Country Link
EP (1) EP0324896B1 (de)
JP (1) JPH0674970B2 (de)
KR (1) KR920004750B1 (de)
DE (1) DE3877180T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1313757C (en) * 1988-04-26 1993-02-23 Mitsubishi Denki Kabushiki Kaisha Method for measuring film thickness
JP2622885B2 (ja) * 1989-10-09 1997-06-25 明産株式会社 シート厚さ測定装置
CN115597504B (zh) * 2022-12-15 2023-04-07 杭州百子尖科技股份有限公司 用于机器视觉量测的激光同轴度的校准装置及校准方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH645462A5 (de) * 1980-03-25 1984-09-28 Zumbach Electronic Ag Verfahren und vorrichtung zur beruehrungslosen messung einer dimension mindestens eines objekts.
US4730116A (en) * 1985-08-06 1988-03-08 Mitsubishi Denki Kabushiki Kaisha Sheet thickness measuring apparatus by optical scanning
KR900003208B1 (ko) * 1986-04-29 1990-05-10 미쓰비시전기주식회사 막(膜)두께의 측정장치

Also Published As

Publication number Publication date
DE3877180T2 (de) 1993-05-19
KR920004750B1 (ko) 1992-06-15
EP0324896A3 (en) 1990-10-10
EP0324896B1 (de) 1992-12-30
KR890012152A (ko) 1989-08-24
JPH01280201A (ja) 1989-11-10
JPH0674970B2 (ja) 1994-09-21
EP0324896A2 (de) 1989-07-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee