KR890005194B1 - 하전비임장치의 제어방식 - Google Patents

하전비임장치의 제어방식 Download PDF

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Publication number
KR890005194B1
KR890005194B1 KR1019850005737A KR850005737A KR890005194B1 KR 890005194 B1 KR890005194 B1 KR 890005194B1 KR 1019850005737 A KR1019850005737 A KR 1019850005737A KR 850005737 A KR850005737 A KR 850005737A KR 890005194 B1 KR890005194 B1 KR 890005194B1
Authority
KR
South Korea
Prior art keywords
control
power supply
feedback
acceleration voltage
control system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR1019850005737A
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English (en)
Korean (ko)
Other versions
KR860002749A (ko
Inventor
히데노브 무라가이
Original Assignee
미쓰비시 뎅기 가부시끼가이샤
시기 모리야
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 미쓰비시 뎅기 가부시끼가이샤, 시기 모리야 filed Critical 미쓰비시 뎅기 가부시끼가이샤
Publication of KR860002749A publication Critical patent/KR860002749A/ko
Application granted granted Critical
Publication of KR890005194B1 publication Critical patent/KR890005194B1/ko
Expired legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/248—Components associated with high voltage supply
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243—Beam current control or regulation circuits

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
KR1019850005737A 1984-09-19 1985-08-08 하전비임장치의 제어방식 Expired KR890005194B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP84-198122 1984-09-19
JP59198122A JPS6174250A (ja) 1984-09-19 1984-09-19 荷電ビーム装置の制御方法
JP198122 1984-09-19

Publications (2)

Publication Number Publication Date
KR860002749A KR860002749A (ko) 1986-04-28
KR890005194B1 true KR890005194B1 (ko) 1989-12-16

Family

ID=16385817

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019850005737A Expired KR890005194B1 (ko) 1984-09-19 1985-08-08 하전비임장치의 제어방식

Country Status (3)

Country Link
US (1) US4684782A (enExample)
JP (1) JPS6174250A (enExample)
KR (1) KR890005194B1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5185559A (en) * 1986-05-20 1993-02-09 Canon Kabushiki Kaisha Supply circuit for P-N junction cathode
US5401973A (en) * 1992-12-04 1995-03-28 Atomic Energy Of Canada Limited Industrial material processing electron linear accelerator

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3826889A (en) * 1970-10-12 1974-07-30 I Brukovsky System for automatic control of electron beam heating device
JPS4926897A (enExample) * 1972-07-05 1974-03-09
US3838313A (en) * 1973-05-21 1974-09-24 United Aircraft Corp Beam current regulator for electron beam machines
US4238660A (en) * 1978-05-24 1980-12-09 Colt Industries Operating Corp. Multi-lead servo feed system for electrical discharge machining apparatus
JPS5536748A (en) * 1978-09-08 1980-03-14 Hitachi Ltd Voltage comparing circuit

Also Published As

Publication number Publication date
JPS6174250A (ja) 1986-04-16
JPH0453069B2 (enExample) 1992-08-25
KR860002749A (ko) 1986-04-28
US4684782A (en) 1987-08-04

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