JPS6174250A - 荷電ビーム装置の制御方法 - Google Patents

荷電ビーム装置の制御方法

Info

Publication number
JPS6174250A
JPS6174250A JP59198122A JP19812284A JPS6174250A JP S6174250 A JPS6174250 A JP S6174250A JP 59198122 A JP59198122 A JP 59198122A JP 19812284 A JP19812284 A JP 19812284A JP S6174250 A JPS6174250 A JP S6174250A
Authority
JP
Japan
Prior art keywords
power supply
feedback control
feedback
control system
acceleration voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59198122A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0453069B2 (enExample
Inventor
Eishin Murakami
村上　英信
Masashi Yasunaga
安永　政司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59198122A priority Critical patent/JPS6174250A/ja
Priority to KR1019850005737A priority patent/KR890005194B1/ko
Priority to US06/774,735 priority patent/US4684782A/en
Publication of JPS6174250A publication Critical patent/JPS6174250A/ja
Publication of JPH0453069B2 publication Critical patent/JPH0453069B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/248—Components associated with high voltage supply
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243—Beam current control or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
JP59198122A 1984-09-19 1984-09-19 荷電ビーム装置の制御方法 Granted JPS6174250A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP59198122A JPS6174250A (ja) 1984-09-19 1984-09-19 荷電ビーム装置の制御方法
KR1019850005737A KR890005194B1 (ko) 1984-09-19 1985-08-08 하전비임장치의 제어방식
US06/774,735 US4684782A (en) 1984-09-19 1985-09-11 Control system for a charged particle beam apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59198122A JPS6174250A (ja) 1984-09-19 1984-09-19 荷電ビーム装置の制御方法

Publications (2)

Publication Number Publication Date
JPS6174250A true JPS6174250A (ja) 1986-04-16
JPH0453069B2 JPH0453069B2 (enExample) 1992-08-25

Family

ID=16385817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59198122A Granted JPS6174250A (ja) 1984-09-19 1984-09-19 荷電ビーム装置の制御方法

Country Status (3)

Country Link
US (1) US4684782A (enExample)
JP (1) JPS6174250A (enExample)
KR (1) KR890005194B1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5185559A (en) * 1986-05-20 1993-02-09 Canon Kabushiki Kaisha Supply circuit for P-N junction cathode
US5401973A (en) * 1992-12-04 1995-03-28 Atomic Energy Of Canada Limited Industrial material processing electron linear accelerator

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3826889A (en) * 1970-10-12 1974-07-30 I Brukovsky System for automatic control of electron beam heating device
JPS4926897A (enExample) * 1972-07-05 1974-03-09
US3838313A (en) * 1973-05-21 1974-09-24 United Aircraft Corp Beam current regulator for electron beam machines
US4238660A (en) * 1978-05-24 1980-12-09 Colt Industries Operating Corp. Multi-lead servo feed system for electrical discharge machining apparatus
JPS5536748A (en) * 1978-09-08 1980-03-14 Hitachi Ltd Voltage comparing circuit

Also Published As

Publication number Publication date
JPH0453069B2 (enExample) 1992-08-25
KR860002749A (ko) 1986-04-28
KR890005194B1 (ko) 1989-12-16
US4684782A (en) 1987-08-04

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