KR890000140A - 배기가스의 정화법 - Google Patents
배기가스의 정화법 Download PDFInfo
- Publication number
- KR890000140A KR890000140A KR1019880006576A KR880006576A KR890000140A KR 890000140 A KR890000140 A KR 890000140A KR 1019880006576 A KR1019880006576 A KR 1019880006576A KR 880006576 A KR880006576 A KR 880006576A KR 890000140 A KR890000140 A KR 890000140A
- Authority
- KR
- South Korea
- Prior art keywords
- exhaust gas
- oxide
- atomic ratio
- range
- metal atomic
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/8671—Removing components of defined structure not provided for in B01D53/8603 - B01D53/8668
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/04—Purification or separation of nitrogen
- C01B21/0405—Purification or separation processes
- C01B21/0411—Chemical processing only
- C01B21/0427—Chemical processing only by complexation
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
- C01B3/56—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by contacting with solids; Regeneration of used solids
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
- C01B2203/042—Purification by adsorption on solids
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
- C01B2203/0465—Composition of the impurity
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0043—Impurity removed
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Environmental & Geological Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Biomedical Technology (AREA)
- Health & Medical Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Combustion & Propulsion (AREA)
- Treating Waste Gases (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에서 사용할 수 있는 정화 칼럼의 한 예를 도시한 것이다.
Claims (8)
- 배기가스를 필수적으로(1) 산화제2구리, (2) 이산화망간 및 (3) 산화규소, 산화알루미늄 및 산화아연으로 구성된 그룹으로부터 선택된 적어도 1개의 금속산화물로 구성되고 밀도가 0.6 내지 1.5g/ml이며 금속원자비[M/(M+Cu+Mn]가 0.02 내지 0.70의 범위이고 금속원자비[CU/(Cu+Mn)]가 0.1 내지 0.9의 범위인 조성물(여기서, Cu는 구리의 그람원자수를 나타내고; Mn은 망간의 그람원자수를 나타내며; M은 규소, 알루미늄 및/또는 아연의 총 그람원자수를 나타낸다)을 함유하는 저온형 성형 정화제와 접촉시켜 배기가스로부터 유독성분을 제거함을 특징으로 하여, 기본 가스와 아르신, 포스핀, 디보란 및 셀렌화수소로 구성된 그룹으로부터 선택된 적어도 하나의 유독성분을 포함하는 배기가스를 정화하는 방법.
- 제1항에 있어서, 조성물의 금속원자비 [M/(M+Cu+Mu)]가 0.03 내지 0.55의 범위이고 금속원자비 [Cu/(Cu+Mn)]가 0.2 내지 0.8의 범위인 방법.
- 제1항에 있어서, 배기가스의 기본 가스가 질소, 수소 및 헬륨으로부터 선택되는 방법.
- 제1항에 있어서, 접촉을 정화제로 충진된 정화칼럼을 통해 배기가스를 통과시켜 수행하는 방법.
- 제4항에 있어서, 접촉을 -20℃ 내지 40℃의 유입구 가스온도에서 수행하는 방법.
- 제4항에 있어서, 정화칼럼을 정화칼럼의 돌파점을 검출하는 검출제로 추가로 충진시키는 방법.
- 제1항에 있어서, 유독성분을 함유하는 배기가스를 필수적으로(4) 산화제2구리 및 (5) 이산화규소, 산화알루미늄 및 산화아연으로 구성된 그룹으로부터 선택된 적어도 1개의 금속산화물로 구성되고, 밀도가1.5 내지 3.5g/ml이며, 금속원자비 [M/(M+Cu)]가 0.02 내지 0.70의 범위인 성형 조성물(여기서, M은규소, 알루미늄 및/또는 아연의 총 그람원자수를 나타내며, Cu는 구리의 그람원자수를 나타낸다)을포함하는 고용량형 정화제로 전처리하는 단계를 추가로 포함하는 방법.
- 제7항에 있어서, 접촉을 유입구측에서는 고용량형 정화제로 충진되고 배출구측에서는 저온형 정화제로 충진된 정화칼럼을 통해 배기가스를 통과시켜 수행하는 방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62-134932 | 1987-06-01 | ||
JP62134932A JPH074506B2 (ja) | 1987-06-01 | 1987-06-01 | 排ガスの浄化方法 |
JP134931/87 | 1987-06-01 | ||
JP134932/87 | 1987-06-01 | ||
JP62134931A JPH074505B2 (ja) | 1987-06-01 | 1987-06-01 | 排ガスの浄化筒 |
JP62-134931 | 1987-06-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR890000140A true KR890000140A (ko) | 1989-03-11 |
KR960003147B1 KR960003147B1 (ko) | 1996-03-05 |
Family
ID=26468915
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019880006576A KR960003147B1 (ko) | 1987-06-01 | 1988-06-01 | 배기가스의 정화법 |
Country Status (4)
Country | Link |
---|---|
US (1) | US4996030A (ko) |
EP (1) | EP0294142B1 (ko) |
KR (1) | KR960003147B1 (ko) |
DE (1) | DE3869480D1 (ko) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8813270D0 (en) * | 1988-06-04 | 1988-07-06 | Plasma Products Ltd | Dry exhaust gas conditioning |
US5417934A (en) * | 1988-06-04 | 1995-05-23 | Boc Limited | Dry exhaust gas conditioning |
FR2652280B1 (fr) * | 1989-09-22 | 1991-11-29 | Air Liquide | Procede d'elimination d'hydrures gazeux sur support solide a base d'oxydes metalliques. |
FR2654362B1 (fr) * | 1989-11-13 | 1992-02-21 | Air Liquide | Procede et dispositif de determination des conditions d'elimination d'hydrures gazeux tels silanes, arsine, phosphine et autres. |
US5182088A (en) * | 1990-09-07 | 1993-01-26 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Removal of gaseous hydrides |
WO1993010896A1 (en) * | 1991-11-27 | 1993-06-10 | Calgon Carbon Corporation | Chromium-free impregnated activated universal respirator carbon for adsorption of toxic gases and/or vapors |
US5391358A (en) * | 1992-08-21 | 1995-02-21 | Praxair Technology, Inc. | Gas purification system |
US5417921A (en) * | 1993-03-03 | 1995-05-23 | Degesch America, Inc. | Method for removing fumigation gases from fumigated structures |
US5853678A (en) * | 1993-03-17 | 1998-12-29 | Nipon Sanso Corporation | Method for removing hydrides, alkoxides and alkylates out of a gas using cupric hydroxide |
US5885845A (en) * | 1993-12-22 | 1999-03-23 | Nippon Sanso Corporation | Method for detecting inorganic hydrides, inorganic halides and organometallic compounds in a gas using copper hydroxide |
JP3347478B2 (ja) * | 1994-06-13 | 2002-11-20 | 日本パイオニクス株式会社 | 排ガスの浄化方法 |
US5674462A (en) * | 1994-07-25 | 1997-10-07 | Calgon Carbon Corporation | Method for the removal of non-metal and metalloid hydrides |
JP3554390B2 (ja) * | 1995-01-24 | 2004-08-18 | 日本原子力研究所 | デカボランガスの酸化処理法 |
WO1996029099A1 (fr) * | 1995-03-23 | 1996-09-26 | Toto Ltd. | Procede de desodorisation, desodorisant, procede d'elaboration du desodorisant, et equipement de desodorisation |
US5785741A (en) * | 1995-07-17 | 1998-07-28 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges, Claude | Process and system for separation and recovery of perfluorocompound gases |
US5858065A (en) * | 1995-07-17 | 1999-01-12 | American Air Liquide | Process and system for separation and recovery of perfluorocompound gases |
JPH0929002A (ja) | 1995-07-17 | 1997-02-04 | Teisan Kk | ガス回収装置 |
US5759237A (en) * | 1996-06-14 | 1998-06-02 | L'air Liquide Societe Anonyme Pour L'etude Et, L'exploitation Des Procedes Georges Claude | Process and system for selective abatement of reactive gases and recovery of perfluorocompound gases |
IE80909B1 (en) * | 1996-06-14 | 1999-06-16 | Air Liquide | An improved process and system for separation and recovery of perfluorocompound gases |
US5955037A (en) * | 1996-12-31 | 1999-09-21 | Atmi Ecosys Corporation | Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases |
US6338312B2 (en) * | 1998-04-15 | 2002-01-15 | Advanced Technology Materials, Inc. | Integrated ion implant scrubber system |
SG111909A1 (en) * | 1999-01-21 | 2005-06-29 | Mitsui Chemicals Inc | Agent for and process of treating exhaust gas |
US6447576B1 (en) * | 1999-10-29 | 2002-09-10 | Japan Pionics Co., Ltd. | Cleaning agent and cleaning process of harmful gas |
US6491884B1 (en) | 1999-11-26 | 2002-12-10 | Advanced Technology Materials, Inc. | In-situ air oxidation treatment of MOCVD process effluent |
US7067091B2 (en) | 2001-06-28 | 2006-06-27 | Sued-Chemie Catalysts Japan Inc. | Treating agent for metal-hydride-containing exhaust gas and method of preparing the same as well as method of treating metal-hydride-containing exhaust gas |
US7393810B2 (en) * | 2002-10-30 | 2008-07-01 | Lawrence Livermore National Security, Llc | Solid materials for removing arsenic and method thereof |
US6800259B2 (en) * | 2002-03-04 | 2004-10-05 | Cabot Corporation | Methods to control H2S and arsine emissions |
US7364603B2 (en) | 2002-12-09 | 2008-04-29 | Applied Materials, Inc. | Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream |
US6805728B2 (en) * | 2002-12-09 | 2004-10-19 | Advanced Technology Materials, Inc. | Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream |
JP4048108B2 (ja) * | 2002-12-26 | 2008-02-13 | 日本パイオニクス株式会社 | 有害ガスの浄化方法 |
US11369913B2 (en) | 2019-04-30 | 2022-06-28 | Nasik Elahi | Air pollution remediation system for large open-air spaces |
CN111744498B (zh) * | 2020-05-25 | 2021-05-25 | 广州广钢气体能源股份有限公司 | 一种锰铜复合氧化物催化剂及其制备方法与应用 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB328592A (en) * | 1929-01-18 | 1930-04-22 | Ig Farbenindustrie Ag | Improvements in the purification of gases |
CH184728A (fr) * | 1934-09-18 | 1936-06-15 | Pirelli | Masse filtrante pour masque antigaz contre l'acide cyanhydrique, et procédé pour sa fabrication. |
DE1131512B (de) * | 1954-12-30 | 1962-06-14 | Dr Hugo Stoltzenberg | Absorptionsmassen für transparente Atemfilter und Verfahren zu deren Herstellung |
CA1216136A (en) * | 1983-03-03 | 1987-01-06 | Toshio Aibe | Method for removal of poisonous gases |
JPS6068034A (ja) * | 1983-09-14 | 1985-04-18 | Nippon Paionikusu Kk | 有毒成分の除去法 |
DE3561499D1 (en) * | 1985-03-13 | 1988-03-03 | Japan Pionics | Method of cleaning exhaust gases |
JPS61296268A (ja) * | 1985-06-25 | 1986-12-27 | Nippon Paionikusu Kk | 検知剤 |
JPS6295119A (ja) * | 1985-10-21 | 1987-05-01 | Nippon Chem Ind Co Ltd:The | 水素化ガスの除去方法 |
-
1988
- 1988-05-31 EP EP88304928A patent/EP0294142B1/en not_active Expired - Lifetime
- 1988-05-31 DE DE8888304928T patent/DE3869480D1/de not_active Expired - Lifetime
- 1988-06-01 US US07/200,886 patent/US4996030A/en not_active Expired - Lifetime
- 1988-06-01 KR KR1019880006576A patent/KR960003147B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US4996030A (en) | 1991-02-26 |
EP0294142A3 (en) | 1989-03-01 |
KR960003147B1 (ko) | 1996-03-05 |
DE3869480D1 (de) | 1992-04-30 |
EP0294142B1 (en) | 1992-03-25 |
EP0294142A2 (en) | 1988-12-07 |
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