FR2654362B1 - Procede et dispositif de determination des conditions d'elimination d'hydrures gazeux tels silanes, arsine, phosphine et autres. - Google Patents

Procede et dispositif de determination des conditions d'elimination d'hydrures gazeux tels silanes, arsine, phosphine et autres.

Info

Publication number
FR2654362B1
FR2654362B1 FR8914829A FR8914829A FR2654362B1 FR 2654362 B1 FR2654362 B1 FR 2654362B1 FR 8914829 A FR8914829 A FR 8914829A FR 8914829 A FR8914829 A FR 8914829A FR 2654362 B1 FR2654362 B1 FR 2654362B1
Authority
FR
France
Prior art keywords
arsine
silanes
phosphine
disposal
determining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR8914829A
Other languages
English (en)
Other versions
FR2654362A1 (fr
Inventor
Cornut Philippe
Delobel Olivier
Leondaridis Paul
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
Original Assignee
Air Liquide SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA filed Critical Air Liquide SA
Priority to FR8914829A priority Critical patent/FR2654362B1/fr
Publication of FR2654362A1 publication Critical patent/FR2654362A1/fr
Application granted granted Critical
Publication of FR2654362B1 publication Critical patent/FR2654362B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
    • G01N25/48—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation
    • G01N25/4846—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation for a motionless, e.g. solid sample
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
FR8914829A 1989-11-13 1989-11-13 Procede et dispositif de determination des conditions d'elimination d'hydrures gazeux tels silanes, arsine, phosphine et autres. Expired - Fee Related FR2654362B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8914829A FR2654362B1 (fr) 1989-11-13 1989-11-13 Procede et dispositif de determination des conditions d'elimination d'hydrures gazeux tels silanes, arsine, phosphine et autres.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8914829A FR2654362B1 (fr) 1989-11-13 1989-11-13 Procede et dispositif de determination des conditions d'elimination d'hydrures gazeux tels silanes, arsine, phosphine et autres.

Publications (2)

Publication Number Publication Date
FR2654362A1 FR2654362A1 (fr) 1991-05-17
FR2654362B1 true FR2654362B1 (fr) 1992-02-21

Family

ID=9387318

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8914829A Expired - Fee Related FR2654362B1 (fr) 1989-11-13 1989-11-13 Procede et dispositif de determination des conditions d'elimination d'hydrures gazeux tels silanes, arsine, phosphine et autres.

Country Status (1)

Country Link
FR (1) FR2654362B1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59229109A (ja) * 1983-05-31 1984-12-22 Rohm Co Ltd シランガス燃焼装置
JPH0729049B2 (ja) * 1987-04-30 1995-04-05 三菱重工業株式会社 燃焼排ガス中の砒素化合物除去方法
EP0294142B1 (fr) * 1987-06-01 1992-03-25 Japan Pionics., Ltd. Procédé pour purifier de gaz d'échappement

Also Published As

Publication number Publication date
FR2654362A1 (fr) 1991-05-17

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Legal Events

Date Code Title Description
ST Notification of lapse